JPH0241252U - - Google Patents
Info
- Publication number
- JPH0241252U JPH0241252U JP12011888U JP12011888U JPH0241252U JP H0241252 U JPH0241252 U JP H0241252U JP 12011888 U JP12011888 U JP 12011888U JP 12011888 U JP12011888 U JP 12011888U JP H0241252 U JPH0241252 U JP H0241252U
- Authority
- JP
- Japan
- Prior art keywords
- axis direction
- fixing frame
- mask
- mask fixing
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案による大型フオトマスク検査装
置全体の平面図、第２図は本考案による大型フオ
トマスク検査装置全体の正面図である。
１……土台、２……ＬＭガイド、３……フオト
マスク、４……マスク固定枠、５……ＬＭブロツ
ク、６……ロボツト（Ｘ軸）、７……ロボツト（
Ｙ軸）、８……顕微鏡、９……ＣＣＤカメラ。
FIG. 1 is a plan view of the entire large-sized photomask inspection apparatus according to the present invention, and FIG. 2 is a front view of the entire large-sized photomask inspection apparatus according to the present invention. 1...Foundation, 2...LM guide, 3...Photo mask, 4...Mask fixing frame, 5...LM block, 6...Robot (X axis), 7...Robot (
Y axis), 8...Microscope, 9...CCD camera.
Claims (1)
用装置において、ライトテーブルと、前記ライト
テーブル上にＸ軸方向に摺動可能に設置されたマ
スク固定枠と、前記マスク固定枠をＸ軸方向に摺
動するロボツトと、前記マスク固定枠の摺動方向
に対して垂直方向（Ｙ軸方向）に摺動し、かつ、
顕微鏡とＣＣＤカメラとの少なくとも一方を搭載
するロボツトとから構成され、Ｘ軸方向はマスク
を、Ｙ軸方向は顕微鏡（ＣＣＤカメラ）を自動走
査することを特徴とする大型フオトマスク検査装
置。 An apparatus for inspecting pattern shapes and defects of large photomasks, comprising a light table, a mask fixing frame installed on the light table so as to be slidable in the X-axis direction, and a robot that slides the mask fixing frame in the X-axis direction. and slide in a direction perpendicular to the sliding direction of the mask fixing frame (Y-axis direction), and
A large photomask inspection device comprising a robot equipped with at least one of a microscope and a CCD camera, and characterized in that it automatically scans the mask in the X-axis direction and the microscope (CCD camera) in the Y-axis direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12011888U JPH0241252U (en) | 1988-09-13 | 1988-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12011888U JPH0241252U (en) | 1988-09-13 | 1988-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0241252U true JPH0241252U (en) | 1990-03-22 |
Family
ID=31365941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12011888U Pending JPH0241252U (en) | 1988-09-13 | 1988-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0241252U (en) |
-
1988
- 1988-09-13 JP JP12011888U patent/JPH0241252U/ja active Pending
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