JPH0242059U - - Google Patents

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Publication number
JPH0242059U
JPH0242059U JP11849388U JP11849388U JPH0242059U JP H0242059 U JPH0242059 U JP H0242059U JP 11849388 U JP11849388 U JP 11849388U JP 11849388 U JP11849388 U JP 11849388U JP H0242059 U JPH0242059 U JP H0242059U
Authority
JP
Japan
Prior art keywords
crucible
waveguide
absorbing material
microwave
microwave absorbing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11849388U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11849388U priority Critical patent/JPH0242059U/ja
Publication of JPH0242059U publication Critical patent/JPH0242059U/ja
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図はこの考案の一実施例の説明図、第２図
は従来の電子衝撃加熱蒸発源の説明図である。 １，１０……るつぼ、２……マイクロ波吸収材
料層、３……導波管、４……マイクロ波発振器、
５，１１……蒸発材料。 FIG. 1 is an explanatory diagram of an embodiment of this invention, and FIG. 2 is an explanatory diagram of a conventional electron impact heating evaporation source. 1, 10... Crucible, 2... Microwave absorbing material layer, 3... Waveguide, 4... Microwave oscillator,
5,11... Evaporation material.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] マイクロ波吸収材料単独または他の材料と組合
せて形成され内部に蒸発材料を入れたるつぼと、
このるつぼの周囲に配置され前記るつぼにマイク
ロ波を伝える導波管と、この導波管に取付けられ
前記るつぼのマイクロ波吸収材料にマイクロ波を
供給して前記蒸発材料を加熱蒸発させるマイクロ
波発振器とを備えた蒸発源。 a crucible formed of a microwave absorbing material alone or in combination with other materials and containing an evaporative material therein;
A waveguide placed around the crucible and transmitting microwaves to the crucible; and a microwave oscillator attached to the waveguide that supplies microwaves to the microwave absorbing material of the crucible to heat and evaporate the evaporation material. and an evaporation source.
JP11849388U 1988-09-08 1988-09-08 Pending JPH0242059U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11849388U JPH0242059U (en) 1988-09-08 1988-09-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11849388U JPH0242059U (en) 1988-09-08 1988-09-08

Publications (1)

Publication Number Publication Date
JPH0242059U true JPH0242059U (en) 1990-03-23

Family

ID=31362903

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11849388U Pending JPH0242059U (en) 1988-09-08 1988-09-08

Country Status (1)

Country Link
JP (1) JPH0242059U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011094222A (en) * 2009-11-02 2011-05-12 Tokki Corp Evaporation source in vapor-deposition apparatus, and vapor-deposition apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011094222A (en) * 2009-11-02 2011-05-12 Tokki Corp Evaporation source in vapor-deposition apparatus, and vapor-deposition apparatus

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