JPH0242059U - - Google Patents
Info
- Publication number
- JPH0242059U JPH0242059U JP11849388U JP11849388U JPH0242059U JP H0242059 U JPH0242059 U JP H0242059U JP 11849388 U JP11849388 U JP 11849388U JP 11849388 U JP11849388 U JP 11849388U JP H0242059 U JPH0242059 U JP H0242059U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- waveguide
- absorbing material
- microwave
- microwave absorbing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000011358 absorbing material Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例の説明図、第２図
は従来の電子衝撃加熱蒸発源の説明図である。 １，１０……るつぼ、２……マイクロ波吸収材
料層、３……導波管、４……マイクロ波発振器、
５，１１……蒸発材料。
は従来の電子衝撃加熱蒸発源の説明図である。 １，１０……るつぼ、２……マイクロ波吸収材
料層、３……導波管、４……マイクロ波発振器、
５，１１……蒸発材料。
Claims (1)
- マイクロ波吸収材料単独または他の材料と組合
せて形成され内部に蒸発材料を入れたるつぼと、
このるつぼの周囲に配置され前記るつぼにマイク
ロ波を伝える導波管と、この導波管に取付けられ
前記るつぼのマイクロ波吸収材料にマイクロ波を
供給して前記蒸発材料を加熱蒸発させるマイクロ
波発振器とを備えた蒸発源。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11849388U JPH0242059U (ja) | 1988-09-08 | 1988-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11849388U JPH0242059U (ja) | 1988-09-08 | 1988-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0242059U true JPH0242059U (ja) | 1990-03-23 |
Family
ID=31362903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11849388U Pending JPH0242059U (ja) | 1988-09-08 | 1988-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0242059U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011094222A (ja) * | 2009-11-02 | 2011-05-12 | Tokki Corp | 蒸着装置における蒸発源及び蒸着装置 |
-
1988
- 1988-09-08 JP JP11849388U patent/JPH0242059U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011094222A (ja) * | 2009-11-02 | 2011-05-12 | Tokki Corp | 蒸着装置における蒸発源及び蒸着装置 |