JPH0242061U - - Google Patents

Info

Publication number
JPH0242061U
JPH0242061U JP12027088U JP12027088U JPH0242061U JP H0242061 U JPH0242061 U JP H0242061U JP 12027088 U JP12027088 U JP 12027088U JP 12027088 U JP12027088 U JP 12027088U JP H0242061 U JPH0242061 U JP H0242061U
Authority
JP
Japan
Prior art keywords
electrode member
vacuum chamber
transparent plate
monitoring window
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12027088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12027088U priority Critical patent/JPH0242061U/ja
Publication of JPH0242061U publication Critical patent/JPH0242061U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12027088U 1988-09-12 1988-09-12 Pending JPH0242061U ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12027088U JPH0242061U ( ) 1988-09-12 1988-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12027088U JPH0242061U ( ) 1988-09-12 1988-09-12

Publications (1)

Publication Number Publication Date
JPH0242061U true JPH0242061U ( ) 1990-03-23

Family

ID=31366229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12027088U Pending JPH0242061U ( ) 1988-09-12 1988-09-12

Country Status (1)

Country Link
JP (1) JPH0242061U ( )

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08315432A (ja) * 1995-05-15 1996-11-29 Nippondenso Co Ltd 光情報記録媒体の製造装置及び製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08315432A (ja) * 1995-05-15 1996-11-29 Nippondenso Co Ltd 光情報記録媒体の製造装置及び製造方法

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