JPH0242061U - - Google Patents

Info

Publication number
JPH0242061U
JPH0242061U JP12027088U JP12027088U JPH0242061U JP H0242061 U JPH0242061 U JP H0242061U JP 12027088 U JP12027088 U JP 12027088U JP 12027088 U JP12027088 U JP 12027088U JP H0242061 U JPH0242061 U JP H0242061U
Authority
JP
Japan
Prior art keywords
electrode member
vacuum chamber
transparent plate
monitoring window
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12027088U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12027088U priority Critical patent/JPH0242061U/ja
Publication of JPH0242061U publication Critical patent/JPH0242061U/ja
Pending legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例である監視用窓２
０を用いた真空アーク放電型ＰＶＤ装置の基本的
な構成を示す系統図、第２図は前記監視用窓２０
の構成を拡大して示す断面図、第３図は典型的な
先行技術の基本的な構成を示す簡略化した断面図
である。 １１……真空槽、１２……カソード、１３……
基材、１６……アーク電源、１８……放射温度計
、１９……透孔、２０……監視用窓、２２……電
極部材、２３……絶縁ホルダ、２５……透明板、
２６……バイアス電源、３８……金属イオン。

Claims (1)

  1. 【実用新案登録請求の範囲】 内部で金属イオンを発生させる真空槽に透孔を
    形成し、この透孔に透明板を固定して前記真空槽
    内を外部から監視することができるようにした薄
    膜形成装置の監視用窓において、 前記透明板に対向して、この透明板近傍の前記
    真空槽内に、網体、多孔板、またはスリツト板で
    構成した電極部材を配置し、この電極部材に正の
    バイアス電圧を印加するようにしたことを特徴と
    する薄膜形成装置の監視用窓。
JP12027088U 1988-09-12 1988-09-12 Pending JPH0242061U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12027088U JPH0242061U (ja) 1988-09-12 1988-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12027088U JPH0242061U (ja) 1988-09-12 1988-09-12

Publications (1)

Publication Number Publication Date
JPH0242061U true JPH0242061U (ja) 1990-03-23

Family

ID=31366229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12027088U Pending JPH0242061U (ja) 1988-09-12 1988-09-12

Country Status (1)

Country Link
JP (1) JPH0242061U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08315432A (ja) * 1995-05-15 1996-11-29 Nippondenso Co Ltd 光情報記録媒体の製造装置及び製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08315432A (ja) * 1995-05-15 1996-11-29 Nippondenso Co Ltd 光情報記録媒体の製造装置及び製造方法

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