JPH0242438U - - Google Patents
Info
- Publication number
- JPH0242438U JPH0242438U JP12184488U JP12184488U JPH0242438U JP H0242438 U JPH0242438 U JP H0242438U JP 12184488 U JP12184488 U JP 12184488U JP 12184488 U JP12184488 U JP 12184488U JP H0242438 U JPH0242438 U JP H0242438U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- wafer
- stored
- semiconductor
- storage part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000005192 partition Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 7
- 238000010586 diagram Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図は本考案の半導体収納ケースの一実施例
を示す説明図、第２図は他の実施例を示す正面図
、第３図は更に他の実施例を示す上面図、第４図
及び第５図は従来ケースの説明図である。
１：ウエハ、２：仕切、３：収納部、４：段差
、５：蓋、６：蓋部段差、７，８，９：変形例を
示す段差。
Fig. 1 is an explanatory diagram showing one embodiment of the semiconductor storage case of the present invention, Fig. 2 is a front view showing another embodiment, Fig. 3 is a top view showing still another embodiment, Figs. FIG. 5 is an explanatory diagram of the conventional case. 1: wafer, 2: partition, 3: storage section, 4: step, 5: lid, 6: lid step, 7, 8, 9: step showing modification.
Claims (1)
納部に収納する半導体ウエハ収納ケースにおいて
、前記ウエハを支持し隣接する各ウエハが互いに
高低を生ずる如く前記収納部の底面に設けられた
段差と、該段差と対向する段差を具え、収納され
た前記ウエハの上端部を抑止して揺動を防止する
蓋とを有することを特徴とする半導体ウエハ収納
ケース。 In a semiconductor wafer storage case in which semiconductor wafers are separated one by one by a partition and stored in a storage part, a step is provided on the bottom of the storage part to support the wafers and make adjacent wafers higher and lower than each other; 1. A semiconductor wafer storage case, comprising: a step and a lid that faces the wafer and restrains the upper end of the stored wafer to prevent it from swinging.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12184488U JPH0242438U (en) | 1988-09-16 | 1988-09-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12184488U JPH0242438U (en) | 1988-09-16 | 1988-09-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0242438U true JPH0242438U (en) | 1990-03-23 |
Family
ID=31369226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12184488U Pending JPH0242438U (en) | 1988-09-16 | 1988-09-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0242438U (en) |
-
1988
- 1988-09-16 JP JP12184488U patent/JPH0242438U/ja active Pending
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