JPH0242438U - - Google Patents

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Publication number
JPH0242438U
JPH0242438U JP12184488U JP12184488U JPH0242438U JP H0242438 U JPH0242438 U JP H0242438U JP 12184488 U JP12184488 U JP 12184488U JP 12184488 U JP12184488 U JP 12184488U JP H0242438 U JPH0242438 U JP H0242438U
Authority
JP
Japan
Prior art keywords
wafers
wafer
stored
semiconductor
storage part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12184488U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12184488U priority Critical patent/JPH0242438U/ja
Publication of JPH0242438U publication Critical patent/JPH0242438U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案の半導体収納ケースの一実施例
を示す説明図、第２図は他の実施例を示す正面図
、第３図は更に他の実施例を示す上面図、第４図
及び第５図は従来ケースの説明図である。 １：ウエハ、２：仕切、３：収納部、４：段差
、５：蓋、６：蓋部段差、７，８，９：変形例を
示す段差。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体ウエハを仕切により一枚づつ分離して収
    納部に収納する半導体ウエハ収納ケースにおいて
    、前記ウエハを支持し隣接する各ウエハが互いに
    高低を生ずる如く前記収納部の底面に設けられた
    段差と、該段差と対向する段差を具え、収納され
    た前記ウエハの上端部を抑止して揺動を防止する
    蓋とを有することを特徴とする半導体ウエハ収納
    ケース。
JP12184488U 1988-09-16 1988-09-16 Pending JPH0242438U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12184488U JPH0242438U (ja) 1988-09-16 1988-09-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12184488U JPH0242438U (ja) 1988-09-16 1988-09-16

Publications (1)

Publication Number Publication Date
JPH0242438U true JPH0242438U (ja) 1990-03-23

Family

ID=31369226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12184488U Pending JPH0242438U (ja) 1988-09-16 1988-09-16

Country Status (1)

Country Link
JP (1) JPH0242438U (ja)

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