JPH024246U - - Google Patents
Info
- Publication number
- JPH024246U JPH024246U JP1988082094U JP8209488U JPH024246U JP H024246 U JPH024246 U JP H024246U JP 1988082094 U JP1988082094 U JP 1988082094U JP 8209488 U JP8209488 U JP 8209488U JP H024246 U JPH024246 U JP H024246U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- shaped object
- holder
- peripheral edge
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988082094U JPH024246U (da) | 1988-06-20 | 1988-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988082094U JPH024246U (da) | 1988-06-20 | 1988-06-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH024246U true JPH024246U (da) | 1990-01-11 |
Family
ID=31306857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988082094U Pending JPH024246U (da) | 1988-06-20 | 1988-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH024246U (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013254884A (ja) * | 2012-06-08 | 2013-12-19 | Ns:Kk | 基板の保持・剥離方法及びその装置 |
-
1988
- 1988-06-20 JP JP1988082094U patent/JPH024246U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013254884A (ja) * | 2012-06-08 | 2013-12-19 | Ns:Kk | 基板の保持・剥離方法及びその装置 |