JPH0243515Y2 - - Google Patents
Info
- Publication number
- JPH0243515Y2 JPH0243515Y2 JP16676985U JP16676985U JPH0243515Y2 JP H0243515 Y2 JPH0243515 Y2 JP H0243515Y2 JP 16676985 U JP16676985 U JP 16676985U JP 16676985 U JP16676985 U JP 16676985U JP H0243515 Y2 JPH0243515 Y2 JP H0243515Y2
- Authority
- JP
- Japan
- Prior art keywords
- activated carbon
- granular activated
- hydrogen peroxide
- pipe
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 73
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 56
- 239000007788 liquid Substances 0.000 claims description 19
- 239000007864 aqueous solution Substances 0.000 claims description 15
- 239000007789 gas Substances 0.000 claims description 8
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 24
- 239000000243 solution Substances 0.000 description 17
- GEHJYWRUCIMESM-UHFFFAOYSA-L sodium sulfite Chemical compound [Na+].[Na+].[O-]S([O-])=O GEHJYWRUCIMESM-UHFFFAOYSA-L 0.000 description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- 238000012545 processing Methods 0.000 description 8
- 235000011121 sodium hydroxide Nutrition 0.000 description 8
- 238000000354 decomposition reaction Methods 0.000 description 7
- 239000011550 stock solution Substances 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 235000010265 sodium sulphite Nutrition 0.000 description 5
- 239000002351 wastewater Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000003638 chemical reducing agent Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910021642 ultra pure water Inorganic materials 0.000 description 4
- 239000012498 ultrapure water Substances 0.000 description 4
- 238000011001 backwashing Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000006386 neutralization reaction Methods 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001802 infusion Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000007793 ph indicator Substances 0.000 description 2
- 238000013022 venting Methods 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000005465 channeling Effects 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000001223 reverse osmosis Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Landscapes
- Removal Of Specific Substances (AREA)
Description
【考案の詳細な説明】
＜産業上の利用分野＞
本考案は、過酸化水素を比較的多量に含有する
水溶液から過酸化水素を除去し、これを放流可能
とする過酸化水素の除去装置に関するものであ
る。[Detailed description of the invention] <Industrial field of application> The present invention relates to a hydrogen peroxide removal device that removes hydrogen peroxide from an aqueous solution containing a relatively large amount of hydrogen peroxide and makes it possible to discharge the hydrogen peroxide. It is something.
＜従来技術＞
半導体を製造する電子工業では製品の洗浄に、
各種イオンはもとより、微粒子、生菌、TOCな
どの不純物を極限値まで除去した、いわゆる超純
水が用いられる。このような超純水は濾過、イオ
ン交換処理、逆浸透膜処理、紫外線殺菌等あらゆ
る技術を駆使して製造されるが、当該超純水の純
度を維持するために、超純水を移送する配管は定
期的に洗浄される。当該配管洗浄は特に配管の滞
留部に沈着するスライムの除去や、接液部全般の
殺菌のために行うもので、洗浄剤としては通常、
0.15重量％〜0.25重量％の過酸化水素を水溶液が
用いられる。<Prior art> In the electronics industry that manufactures semiconductors, cleaning of products is
So-called ultrapure water is used, which has impurities such as various ions, particulates, viable bacteria, and TOC removed to the limit. This type of ultrapure water is produced using various techniques such as filtration, ion exchange treatment, reverse osmosis membrane treatment, and ultraviolet sterilization, but in order to maintain the purity of the ultrapure water, it is necessary to transport the ultrapure water. Pipes are cleaned regularly. This pipe cleaning is especially performed to remove slime deposited in the stagnation part of the pipe and to sterilize all parts that come in contact with liquid, and the cleaning agent is usually
An aqueous solution containing 0.15% to 0.25% by weight of hydrogen peroxide is used.
したがつて電子工業では当該洗浄に用いた過酸
化水素の水溶液が定期的に廃液として排出される
こととなる。 Therefore, in the electronics industry, the aqueous hydrogen peroxide solution used for cleaning is periodically discharged as waste liquid.
このような過酸化水素を含む水溶液はそのまま
放流することができないので、従来は当該廃液に
亜硫酸ナトリウムなどの還元剤を添加し、過酸化
水素の酸化力を中和した後放流している。 Since such an aqueous solution containing hydrogen peroxide cannot be discharged as is, conventionally, a reducing agent such as sodium sulfite is added to the waste liquid to neutralize the oxidizing power of hydrogen peroxide before discharge.
＜考案が解決しようとする問題点＞
しかしながら従来の還元剤を用いて上記中和を
行う処理装置は以下のような欠点を有している。<Problems to be Solved by the Invention> However, the conventional processing apparatus that performs the above neutralization using a reducing agent has the following drawbacks.
まず過酸化水素と亜硫酸ナトリウムの反応時間
が２〜３時間と比較的長く、したがつて反応槽も
それだけ大きくなり、当該廃液量が多い場合は反
応槽の設置面積を広く必要とするし、またその処
理液に過酸化水素が残留しても、逆に亜硫酸ソー
ダが残留してもいずれの場合も放流不適となり、
酸やアルカリの中和反応と比較して放流における
認容範囲が極めて狭く、酸化還元の中和は技術的
にかなり難しく、これを自動化する場合制御が比
較的複雑となる。 First of all, the reaction time between hydrogen peroxide and sodium sulfite is relatively long, 2 to 3 hours, and the reaction tank is accordingly large.If the amount of waste liquid is large, the installation area of the reaction tank is required to be large. Whether hydrogen peroxide or sodium sulfite remains in the treated solution, it is unsuitable for discharge in either case.
Compared to acid or alkali neutralization reactions, the tolerance range for discharge is extremely narrow, redox neutralization is technically quite difficult, and when automated, control becomes relatively complex.
したがつてこのような反応槽、自動制御機構お
よび撹拌機構を備えた処理装置の設備費は比較的
的高価となり、かつ定常的に亜硫酸ナトリウム等
の還元剤も必要とするので、ランニングコストも
高い。 Therefore, the equipment cost of a processing device equipped with such a reaction tank, automatic control mechanism, and stirring mechanism is relatively high, and running costs are also high because a reducing agent such as sodium sulfite is constantly required. .
本考案者は従来の処理装置における、かかる欠
点を解決するために、先に特願昭60−163887号に
て、過酸化水素を含む水溶液のPHを10以上に調整
して粒状活性炭充填層に通液する方法を提案し
た。 In order to solve these drawbacks of conventional processing equipment, the present inventor previously proposed in Japanese Patent Application No. 60-163887 that the pH of an aqueous solution containing hydrogen peroxide was adjusted to 10 or higher and that a bed of granular activated carbon was used. We proposed a method to pass fluid through.
本方法は粒状活性炭の有する還元力を用いて水
溶液中の過酸化水素を分解除去するものである
が、水溶液中のPHを10以上に調整することによ
り、過酸化水素の分解速度をより速くして過酸化
水素を効果的に除くものである。 This method uses the reducing power of granular activated carbon to decompose and remove hydrogen peroxide in an aqueous solution, but by adjusting the pH of the aqueous solution to 10 or more, the decomposition rate of hydrogen peroxide can be made faster. This effectively removes hydrogen peroxide.
すなわち過酸化水素を含む水溶液が粒状活性炭
層に接触すると、直ちに分解反応が生じ酸素が発
生するが、水溶液のPHが９以下では粒状活性炭の
充填層の内部でも酸素が発生し、それが気泡とな
つて充填層内に閉じ込められ、水溶液がシヨート
パス（チヤンネリング現象）することにより、比
較的早期に処理水に過酸化水素が漏出するが、水
溶液のPHが10以上となると過酸化水素の分解速度
が速くなるため粒状活性炭充填層の比較的上層部
で分解し、充填層内に発生する気泡の量が極めて
少なくなり、過酸化水素のシヨートパスが起こら
ず比較的長時間処理することができるのである。 In other words, when an aqueous solution containing hydrogen peroxide comes into contact with a bed of granular activated carbon, a decomposition reaction occurs immediately and oxygen is generated. However, if the pH of the aqueous solution is 9 or less, oxygen is also generated inside the packed bed of granular activated carbon, which causes bubbles. Hydrogen peroxide is trapped in the packed bed and leaks into the treated water relatively early due to short pass (channelling phenomenon) of the aqueous solution, but when the pH of the aqueous solution exceeds 10, the decomposition rate of hydrogen peroxide slows down. Because of this speed, decomposition occurs in a relatively upper layer of the granular activated carbon packed bed, the amount of bubbles generated in the packed bed is extremely small, and the hydrogen peroxide shot pass does not occur, making it possible to process for a relatively long time.
本考案は前述したように粒状活性炭充填層に接
触する当該水溶液のPHを上昇させることにより当
該充填層内での気泡の発生を可能なかぎり回避す
るとともに、装置的にも発生した酸素を効果的に
排出できるような構造とした装置を提供すること
を目的とする。 As mentioned above, this invention increases the pH of the aqueous solution that comes into contact with the granular activated carbon packed bed to avoid the generation of bubbles in the packed bed as much as possible, and also effectively removes the generated oxygen from the equipment perspective. The purpose of the present invention is to provide a device with a structure capable of discharging wastewater.
＜問題点を解決する手段＞
本考案は槽内に粒状活性炭を充填するとともに
当該充填層の下方に空間部を形成し、かつ当該空
間部に外部へ通じるガス抜き管を連通し、さらに
粒状活性炭充填層の上方部に流入管を、前記空間
部に流出管をそれぞれ連通した構造からなり、PH
を10以上に調整した過酸化水素を含む水溶液を前
記流入管から流入し、当該流入液を粒状活性炭充
填層の上面に直接撒布させながら当該充填層に通
過させ、処理液を流出管から流出させることを特
徴とするものである。<Means for solving the problem> The present invention is to fill a tank with granular activated carbon, form a space below the packed bed, connect a gas vent pipe to the outside with the space, and then fill the tank with granular activated carbon. It has a structure in which an inflow pipe is connected to the upper part of the packed bed, and an outflow pipe is connected to the space, and the PH
An aqueous solution containing hydrogen peroxide adjusted to 10 or more flows in from the inflow pipe, the inflow liquid is directly spread on the upper surface of the granular activated carbon packed bed and passes through the packed bed, and the treated liquid flows out from the outflow pipe. It is characterized by this.
以下に本考案を図面に基づいて詳細に説明す
る。 The present invention will be explained in detail below based on the drawings.
第１図は本考案の実施態様の一例のフローを示
す説明図であり、上方が開放した槽１内に、液は
通過するが粒状活性炭は通過させないスクリーン
２、たとえば目板にサラン布を張つたものを設置
し、当該スクリーン２の上部に粒状活性炭を充填
して、粒状活性炭層３を形成する。 FIG. 1 is an explanatory diagram showing the flow of an example of an embodiment of the present invention, in which a tank 1 with an open top is provided with a screen 2 that allows liquid to pass through but does not allow granular activated carbon to pass through. A granular activated carbon layer 3 is formed by installing a screen 2 and filling the upper part of the screen 2 with granular activated carbon.
粒状活性炭層３の上方部にデイストリビユータ
４を設置し、当該デイストリビユータ４に過酸化
水素を含む水溶液である原液の流入管５の一端を
連通し、さらに粒状活性炭層３の下方に形成した
空間部Ｓに処理液の流出管６を連通するととも
に、当該処理液の流出管６に逆洗水流入管７を連
通する。 A distributor 4 is installed above the granular activated carbon layer 3, and one end of an inflow pipe 5 for a stock solution, which is an aqueous solution containing hydrogen peroxide, is communicated with the distributor 4, and further below the granular activated carbon layer 3 is formed. A processing liquid outflow pipe 6 is connected to the space S, and a backwash water inflow pipe 7 is connected to the processing liquid outflow pipe 6.
また空間部Ｓに、粒状活性炭層３の上方まで立
上げたガス抜き管８を連通する。 Further, a gas venting pipe 8 extending up to above the granular activated carbon layer 3 is communicated with the space S.
一方前記原液の流入管５に粒状活性炭層３の逆
洗排水を排出するための逆洗排水流出管９とカ性
ソーダ溶液流入管１０の一端を連通し、当該カ性
ソーダ溶液流入管１０の他端を注入ポンプ１１を
介してカ性ソーダ溶液層１２に連通する。なお原
液の流入管５とカ性ソーダ溶液流入管１０の接合
点下流側に混合器１３を付設するとともに、当該
混合器１３の下流側にPH電極１４を付設し、当該
PH電極１４と注入ポンプ１１とをPH指示調節計１
５を介して計装的に接続する。なお１６はブロー
管であり、１７〜２１はそれぞれ弁を示す。 On the other hand, a backwash wastewater outflow pipe 9 for discharging backwash wastewater from the granular activated carbon layer 3 and one end of a caustic soda solution inflow pipe 10 are connected to the inflow pipe 5 for the stock solution, and one end of the caustic soda solution inflow pipe 10 is connected to the inflow pipe 5 for the raw solution. The other end is connected to the caustic soda solution layer 12 via the injection pump 11 . Note that a mixer 13 is attached downstream of the junction between the raw solution inflow pipe 5 and the caustic soda solution inflow pipe 10, and a PH electrode 14 is attached downstream of the mixer 13.
The PH electrode 14 and the infusion pump 11 are connected to the PH indicator controller 1.
5 for instrumentation connection. Note that 16 is a blow pipe, and 17 to 21 each indicate a valve.
＜作用＞ 次の本装置の操作を以下に説明する。<Effect> The next operation of this device will be explained below.
運転の当初に粒状活性炭を充填して粒状活性炭
層３を形成するが、当該粒状活性炭に微粉炭が混
入している場合は、弁２０、弁１８を開口して逆
洗水流入管７から逆洗水を流入し、粒状活性炭層
３を適度に膨張させ、微粉炭を含む逆洗排水を逆
洗排水流出管９から流出させる。なお当該逆洗工
程は、以下に説明する通液工程を続行するにした
がい粒状活性炭層３に懸濁物質が詰まり、その圧
力損失が上昇した際にも適宜に行う。このような
逆洗が終了した後、弁２１を開口して槽内１の水
をブロー管１６から排出する。 At the beginning of operation, granular activated carbon is filled to form a granular activated carbon layer 3, but if the granular activated carbon contains pulverized carbon, the valves 20 and 18 are opened and backwashing is performed from the backwash water inlet pipe 7. Water is introduced to appropriately expand the granular activated carbon layer 3, and backwash wastewater containing pulverized coal is caused to flow out from a backwash wastewater outflow pipe 9. Note that the backwashing step is also performed appropriately when the granular activated carbon layer 3 is clogged with suspended matter and the pressure loss increases as the liquid passing step described below continues. After such backwashing is completed, the valve 21 is opened and the water in the tank 1 is discharged from the blow pipe 16.
次いで弁１７、弁１９を開口し、その他の弁は
閉じ、原液の流入管５から原液を流入し、処理液
の流出管６から処理液を得る通液を行う。 Next, the valves 17 and 19 are opened, and the other valves are closed to allow the raw solution to flow in from the raw solution inlet pipe 5 and to obtain the processing liquid from the treatment liquid outlet pipe 6.
なお当該通液時に注入ポンプ１１を駆動して原
液にカ性ソーダ溶液を混合し、原液のPHを10以
上、好ましくは10.5〜11.0に調整する。 Note that during the liquid passage, the injection pump 11 is driven to mix the caustic soda solution into the stock solution, and adjust the pH of the stock solution to 10 or more, preferably 10.5 to 11.0.
この調整はPH電極１４によつて測定されるPH
が、あらかじめ定めた所定の範囲になるように、
PH指示調節計１５により計装的に注入ポンプ１１
のカ性ソーダ溶液注入量を調節することにより行
う。 This adjustment is based on the PH measured by the PH electrode 14.
is within a predetermined range,
The infusion pump 11 is instrumented by the PH indicating controller 15.
This is done by adjusting the amount of caustic soda solution injected.
デイストリビユータ４により均等に分配した原
液を粒状活性炭層３の上面に直接撒布させ、当該
層３、スクリーン２を順次通過させ、空間部Ｓで
集液し、処理液を処理液の流出管６から流出す
る。 The stock solution evenly distributed by the distributor 4 is directly spread on the upper surface of the granular activated carbon layer 3, passed through the layer 3 and the screen 2 in order, collected in the space S, and the processing solution is passed through the processing solution outflow pipe 6. flows out from.
このような通液により原液中に存在する過酸化
水素は粒状活性炭層３に接触することにより分解
するが、当該分解により発生する酸素の大部分は
粒状活性炭層３の上面から大気に放出される。ま
たたとえ粒状活性炭層３内で少量の酸素が発生し
ても、当該酸素は液の流れにより空間部Ｓに押し
流され、空間部Ｓに連通したガス抜き管８から大
気に放出される。 Through such liquid passage, the hydrogen peroxide present in the stock solution is decomposed by contacting the granular activated carbon layer 3, but most of the oxygen generated by the decomposition is released into the atmosphere from the upper surface of the granular activated carbon layer 3. . Furthermore, even if a small amount of oxygen is generated within the granular activated carbon layer 3, the oxygen is swept away into the space S by the flow of the liquid and is released into the atmosphere from the gas vent pipe 8 communicating with the space S.
＜効果＞
このように本考案は粒状活性炭を充填する槽を
上部開放型とし、かつ粒状活性炭充填層の下部に
空間部を形成し、当該空間部に外部へ通じるガス
抜き管を連通し、過酸化水素を含む水溶液のPHを
10以上に調整してその分解速度を速めて粒状活性
炭充填層の上面に直接撒布するので、発生する酸
素を容易に槽外へ放出することができ、粒状活性
炭の充填層に気泡を発生させることがなく、チヤ
ンネリング現象に起因する過酸化水素の漏出を効
果的に防止することができる。<Effects> In this way, the present invention has an open top type tank for filling granular activated carbon, and a space is formed at the bottom of the granular activated carbon packed bed, and a gas venting pipe leading to the outside is connected to the space to prevent overheating. The pH of an aqueous solution containing hydrogen oxide
The decomposition rate is adjusted to 10 or more to accelerate the decomposition rate and then sprayed directly onto the top surface of the granular activated carbon packed bed, so the generated oxygen can be easily released to the outside of the tank and bubbles can be generated in the granular activated carbon packed bed. Therefore, leakage of hydrogen peroxide caused by channeling phenomenon can be effectively prevented.
なお槽１を密閉型とし、重力式通液によらず圧
力式通液とすることも可能であるが、その場合
は、槽１の上部にガス抜き弁などを設置し、上部
粒状活性炭層３から発生する酸素を大気に放出す
るような構造とする必要がある。 It is also possible to make the tank 1 a closed type and use pressure flow instead of gravity flow, but in that case, a gas vent valve etc. is installed at the top of the tank 1, and the upper granular activated carbon layer 3 The structure must be such that the oxygen generated by the gas is released into the atmosphere.
本考案における粒状活性炭層３の充填層高は、
400mm〜600mmが適当で、あまり厚く充填すると充
填層内に気泡が発生しやすくなるので好ましくな
い。また通液流速は原液の過酸化水素の含有量が
多い程、低流速にする必要があるが、過酸化水素
含有量がたとえば0.2重量％の時はLV7ｍ／Ｈ前
後、および過酸化水素含有量がたとえば３重量％
の時はLV3ｍ／Ｈ前後が適当である。 The packed bed height of the granular activated carbon layer 3 in the present invention is:
A range of 400 mm to 600 mm is appropriate; if the layer is packed too thick, air bubbles are likely to occur in the packed layer, which is not preferable. In addition, the flow rate of the liquid needs to be lower as the hydrogen peroxide content of the stock solution increases, but for example, when the hydrogen peroxide content is 0.2% by weight, the flow rate is around LV7m/H, and the hydrogen peroxide content For example, 3% by weight
In this case, around LV3m/H is appropriate.
以上説明したごとく、本考案は粒状活性炭層に
原液を通過させるのみで過酸化水素を除去できる
ので、従来装置のような大きな反応槽を必要とせ
ず、装置の設置面積を小さくすることができ、か
つ操作が簡単であるから自動操作も容易であり、
装置の設備費を従来のものより安価とすることが
でき、さらに亜硫酸ナトリウムなどの還元剤を用
いないので、ランニングコストも大幅に低減でき
る。 As explained above, the present invention can remove hydrogen peroxide by simply passing the undiluted solution through the granular activated carbon layer, so it does not require a large reaction tank like conventional equipment, and the installation area of the equipment can be reduced. And since it is easy to operate, automatic operation is also easy.
Equipment costs for the device can be lower than conventional ones, and since reducing agents such as sodium sulfite are not used, running costs can also be significantly reduced.
第１図は本考案の実施態様の一例のフローを示
す説明図である。
１……槽、２……スクリーン、３……粒状活性
炭層、４……デイストリビユータ、５……原液の
流入管、６……処理液の流出管、７……逆洗水流
入管、８……ガス抜き管、９……逆洗排水排出
管、１０……カ性ソーダ溶液流入管、１１……注
入ポンプ、１２……カ性ソーダ溶液槽、１３……
混合器、１４……PH電極、１５……PH指示調節
計、１６……ブロー管、１７〜２１……弁、Ｓ…
…空間部。
FIG. 1 is an explanatory diagram showing a flow of an example of an embodiment of the present invention. 1... Tank, 2... Screen, 3... Granular activated carbon layer, 4... Distributor, 5... Inflow pipe for raw solution, 6... Outflow pipe for treated liquid, 7... Backwash water inflow pipe, 8 ... Gas vent pipe, 9 ... Backwash drainage discharge pipe, 10 ... Caustic soda solution inflow pipe, 11 ... Injection pump, 12 ... Caustic soda solution tank, 13 ...
Mixer, 14...PH electrode, 15...PH indicator controller, 16...Blow pipe, 17-21...Valve, S...
...Space department.
Claims (1)
層の下方に空間部を形成し、かつ当該空間部に外
部へ通じるガス抜き管を連通し、さらに粒状活性
炭充填層の上方部に流入管を、前記空間部に流出
管をそれぞれ連通した構造からなり、PHを10以上
に調整した過酸化水素を含む水溶液を前記流入管
から流入し、当該流入液を粒状活性炭充填層の上
面に直接撒布させながら当該充填層に通過させ、
処理液を流出管から流出させることを特徴とする
過酸化水素の除去装置。 The tank is filled with granular activated carbon, and a space is formed below the filled bed, and a gas vent pipe leading to the outside is connected to the space, and an inflow pipe is connected above the granular activated carbon filled bed. It has a structure in which outflow pipes are connected to each space, and an aqueous solution containing hydrogen peroxide whose pH is adjusted to 10 or more flows in from the inflow pipe, and the inflow liquid is directly sprinkled on the upper surface of the granular activated carbon packed bed while the Pass it through a packed bed,
A hydrogen peroxide removal device characterized by causing a treated liquid to flow out from an outflow pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16676985U JPH0243515Y2 (en) | 1985-10-31 | 1985-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16676985U JPH0243515Y2 (en) | 1985-10-31 | 1985-10-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6275893U JPS6275893U (en) | 1987-05-15 |
| JPH0243515Y2 true JPH0243515Y2 (en) | 1990-11-19 |
Family
ID=31098062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16676985U Expired JPH0243515Y2 (en) | 1985-10-31 | 1985-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0243515Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021182480A1 (en) * | 2020-03-13 | 2021-09-16 | メタウォーター株式会社 | Water treatment method, control device for water treatment device, and control program for water treatment device |
-
1985
- 1985-10-31 JP JP16676985U patent/JPH0243515Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021182480A1 (en) * | 2020-03-13 | 2021-09-16 | メタウォーター株式会社 | Water treatment method, control device for water treatment device, and control program for water treatment device |
| JPWO2021182480A1 (en) * | 2020-03-13 | 2021-09-16 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6275893U (en) | 1987-05-15 |
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