JPH0244740U - - Google Patents

Info

Publication number
JPH0244740U
JPH0244740U JP12340488U JP12340488U JPH0244740U JP H0244740 U JPH0244740 U JP H0244740U JP 12340488 U JP12340488 U JP 12340488U JP 12340488 U JP12340488 U JP 12340488U JP H0244740 U JPH0244740 U JP H0244740U
Authority
JP
Japan
Prior art keywords
fixed frame
substrate
frame
rotary table
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12340488U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12340488U priority Critical patent/JPH0244740U/ja
Publication of JPH0244740U publication Critical patent/JPH0244740U/ja
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)

Description

【図面の簡単な説明】
第１図ａ，ｂは本考案の実施例の一部断面図と
平面図、第２図可動枠を示す説明図、第３図は従
来例を示す説明図である。 図において、１は回転台、２は真空チヤツク、
５は固定枠、６は凹部、７は可動枠、Ａは基板で
ある。

Claims (1)

  1. 【実用新案登録請求の範囲】 回転台１の真空チヤツク２に、正方形基板Ａを
    収容する凹部６を有する固定枠５を円形の一部で
    形成して設け、 固定枠５の開口側に円弧状可動枠７を、閉じた
    円を成して基板Ａを収容保持するように取付ける
    スピンコータ治具。
JP12340488U 1988-09-22 1988-09-22 Pending JPH0244740U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12340488U JPH0244740U (ja) 1988-09-22 1988-09-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12340488U JPH0244740U (ja) 1988-09-22 1988-09-22

Publications (1)

Publication Number Publication Date
JPH0244740U true JPH0244740U (ja) 1990-03-28

Family

ID=31372227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12340488U Pending JPH0244740U (ja) 1988-09-22 1988-09-22

Country Status (1)

Country Link
JP (1) JPH0244740U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009177166A (ja) * 2007-12-28 2009-08-06 Horiba Ltd 検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009177166A (ja) * 2007-12-28 2009-08-06 Horiba Ltd 検査装置

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