JPH0244740U - - Google Patents
Info
- Publication number
- JPH0244740U JPH0244740U JP12340488U JP12340488U JPH0244740U JP H0244740 U JPH0244740 U JP H0244740U JP 12340488 U JP12340488 U JP 12340488U JP 12340488 U JP12340488 U JP 12340488U JP H0244740 U JPH0244740 U JP H0244740U
- Authority
- JP
- Japan
- Prior art keywords
- fixed frame
- substrate
- frame
- rotary table
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
Landscapes
- Coating Apparatus (AREA)
Description
第１図ａ，ｂは本考案の実施例の一部断面図と
平面図、第２図可動枠を示す説明図、第３図は従
来例を示す説明図である。
図において、１は回転台、２は真空チヤツク、
５は固定枠、６は凹部、７は可動枠、Ａは基板で
ある。
1A and 1B are a partial sectional view and a plan view of an embodiment of the present invention, FIG. 2 is an explanatory view showing a movable frame, and FIG. 3 is an explanatory view showing a conventional example. In the figure, 1 is a rotary table, 2 is a vacuum chuck,
5 is a fixed frame, 6 is a recessed portion, 7 is a movable frame, and A is a substrate.
Claims (1)
収容する凹部６を有する固定枠５を円形の一部で
形成して設け、 固定枠５の開口側に円弧状可動枠７を、閉じた
円を成して基板Ａを収容保持するように取付ける
スピンコータ治具。[Claims for Utility Model Registration] The vacuum chuck 2 of the rotary table 1 is provided with a fixed frame 5 formed of a circular part and having a recess 6 for accommodating the square substrate A, and an arc-shaped fixed frame 5 is provided on the opening side of the fixed frame 5. A spin coater jig for mounting the movable frame 7 so as to form a closed circle and accommodate and hold the substrate A.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12340488U JPH0244740U (en) | 1988-09-22 | 1988-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12340488U JPH0244740U (en) | 1988-09-22 | 1988-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0244740U true JPH0244740U (en) | 1990-03-28 |
Family
ID=31372227
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12340488U Pending JPH0244740U (en) | 1988-09-22 | 1988-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0244740U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009177166A (en) * | 2007-12-28 | 2009-08-06 | Horiba Ltd | Inspection device |
-
1988
- 1988-09-22 JP JP12340488U patent/JPH0244740U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009177166A (en) * | 2007-12-28 | 2009-08-06 | Horiba Ltd | Inspection device |
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