JPH0245642U - - Google Patents
Info
- Publication number
- JPH0245642U JPH0245642U JP1988124551U JP12455188U JPH0245642U JP H0245642 U JPH0245642 U JP H0245642U JP 1988124551 U JP1988124551 U JP 1988124551U JP 12455188 U JP12455188 U JP 12455188U JP H0245642 U JPH0245642 U JP H0245642U
- Authority
- JP
- Japan
- Prior art keywords
- interlayer insulating
- semiconductor device
- insulating film
- film
- silicon oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Description
第１図は本考案の第１実施例の縦断面図、第２
図は本考案の第１実施例におけるシリコン窒化膜
のパターン形状を示す平面図、第３図は本考案の
第２実施例における第２図と同様の平面図、第４
図は本考案の第３実施例における第２図と同様の
平面図である。
１……シリコン基板、２……シリコン酸化膜、
３……第１層目アルミニウム配線、４……シリコ
ン酸化膜、５……シリコン窒化膜、６……第２層
目アルミニウム配線、７……シリコン酸化膜。
Fig. 1 is a longitudinal sectional view of the first embodiment of the present invention, and the second
The figure is a plan view showing the pattern shape of the silicon nitride film in the first embodiment of the present invention, FIG. 3 is a plan view similar to FIG. 2 in the second embodiment of the present invention, and FIG.
This figure is a plan view similar to FIG. 2 of the third embodiment of the present invention. 1...Silicon substrate, 2...Silicon oxide film,
3...First layer aluminum wiring, 4...Silicon oxide film, 5...Silicon nitride film, 6...Second layer aluminum wiring, 7...Silicon oxide film.
Claims (1)
構成した半導体装置において、前記半導体装置の
四隅の部分には、前記層間絶縁膜に重ねてシリコ
ン窒化膜を選択的に形成したことを特徴とする半
導体装置。 A semiconductor device in which an interlayer insulating film of a multilayer wiring structure is made of a silicon oxide film, characterized in that a silicon nitride film is selectively formed on the interlayer insulating film at the four corners of the semiconductor device. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988124551U JPH0245642U (en) | 1988-09-22 | 1988-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988124551U JPH0245642U (en) | 1988-09-22 | 1988-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0245642U true JPH0245642U (en) | 1990-03-29 |
Family
ID=31374384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988124551U Pending JPH0245642U (en) | 1988-09-22 | 1988-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0245642U (en) |
-
1988
- 1988-09-22 JP JP1988124551U patent/JPH0245642U/ja active Pending