JPH024579A - Draw-type laser beam recording member - Google Patents

Draw-type laser beam recording member

Info

Publication number
JPH024579A
JPH024579A JP63156517A JP15651788A JPH024579A JP H024579 A JPH024579 A JP H024579A JP 63156517 A JP63156517 A JP 63156517A JP 15651788 A JP15651788 A JP 15651788A JP H024579 A JPH024579 A JP H024579A
Authority
JP
Japan
Prior art keywords
recording
laser beam
recording medium
layer
type laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63156517A
Other languages
Japanese (ja)
Inventor
Satoshi Taguchi
敏 田口
Akio Omae
大前 昭雄
Hiroshi Shinagawa
品川 宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Priority to JP63156517A priority Critical patent/JPH024579A/en
Publication of JPH024579A publication Critical patent/JPH024579A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41MPRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M5/00Duplicating or marking methods; Sheet materials for use therein
    • B41M5/26Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)

Abstract

PURPOSE:To provide the title member with excellent preservation stability and high sensitivity by providing a thin Se film with an average film thickness in a specified range on a recording medium, in a pit-forming DRAW-type laser beam recoding member using the recording medium which comprises at least Te and a plasma-polymerized product of an organic compound. CONSTITUTION:A thin Se film having an average film thickness of 1-100Angstrom is provided on a recording medium, in a pit-forming DRAW-type laser beam recording member using the recording medium which comprises at least Te and a plasma-polymerized product of an organic compound. Namely, a Te- containing layer susceptible to deterioration by oxidation is covered by a chemically stable Se layer, whereby chemical changes of the Te-containing layer is restrained. Further, thermal properties of Se prevent the Se layer from producing adverse effects on sensitivity of recording by formation of pits. Therefore, a pit-forming DRAW-type laser beam recording member having excellent preservation stability and high sensitivity can be obtained.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は小孔形成型の追記型レーザービーム記録部材に
おいて、記録媒体の経時劣化を防ぐための保護層に関す
るものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a protective layer for preventing the recording medium from deteriorating over time in a write-once type laser beam recording member of the small hole forming type.

〔従来技術〕[Prior art]

近年、光ディスク等のレーザービーム記録部材は高密度
記録、ランダムアクセスが可能であり、しかも可搬であ
るというフロッピーディスク、固定磁気ディスク、磁気
テープなどの従来の情報記録用部材にはない特長をもつ
記録媒体としてコンピューター用、ビデオ用等の情報記
録の分野で注目されている。
In recent years, laser beam recording materials such as optical disks are capable of high-density recording, random access, and are portable, features that conventional information recording materials such as floppy disks, fixed magnetic disks, and magnetic tapes do not have. It is attracting attention as a recording medium in the field of information recording for computers, videos, etc.

光ディスクは、その記録・再生の特徴から再生専用型、
追記型、消去可能型に大まかに分類できる。この中で追
記型光ディスクは、−回のみ記録が可能であるものを指
す。この型の光ディスクは一度記録した情報の消去はで
きないが、逆に長期間の保存が必要であったり、消去す
ると困る情報等の記録の分野での使用が期待されている
Due to its recording and playback characteristics, optical discs are read-only type,
They can be roughly classified into write-once type and erasable type. Among these, the write-once optical disc refers to one on which recording can be performed only - times. Although this type of optical disk cannot erase information once recorded, it is expected to be used in the field of recording information that needs to be stored for a long time or that is difficult to erase.

追記型光ディスクでは書込みレーザーパルス照射部分の
記録媒体の昇華、融解により小孔を形成せしめ記録部分
と未記録部分との光の反射率や透過率の違いから情報の
読み出しを行う小孔形成型光ディスクがよく知られてい
る。小孔形成型の光ディスクの記録媒体としてはAβ、
Bi、、Te、Pb、Mo等の金属、半金属、半導体の
単体の薄膜が使用可能であることが知られているが、な
、かてもTeが記録・再生特性において優れている。
In write-once optical discs, small holes are formed by sublimation and melting of the recording medium in the area irradiated with the writing laser pulse, and information is read out based on the difference in light reflectance and transmittance between recorded and unrecorded areas. is well known. As recording media for small hole-forming optical discs, Aβ,
It is known that single thin films of metals, semimetals, and semiconductors such as Bi, Te, Pb, and Mo can be used, but Te has particularly excellent recording and reproducing characteristics.

さらに、Teと有機化合物のプラズマ重合物を含有する
記録媒体においては記録感度が向上することが特開昭5
7−98394号公報に記載されている。しかし、これ
らの記録媒体は経時劣化が起こり易く、情報の保存安定
性に問題のあることも知られている。
Furthermore, in Japanese Patent Laid-Open No. 5-1973, it was shown that recording sensitivity was improved in recording media containing plasma polymers of Te and organic compounds.
It is described in Japanese Patent No. 7-98394. However, it is known that these recording media are prone to deterioration over time and have problems with information storage stability.

小孔形成型の媒体における記録膜の経時劣化としては主
に次の2つを挙げることができる。
The following two main types of deterioration over time of a recording film in a small hole forming type medium can be mentioned.

■記録膜が巨視的に化学的な変化を起こすことで、記録
膜の光学的な性質が変化し、これにより記録特性の変化
や再生信号レベルの変化などを生じるもの、■記録膜に
微視的なりラック等の欠陥が生じ、再生時に信号の欠落
や不必要な信号を発生するもの、である。
■ Macroscopic chemical changes in the recording film that cause changes in the optical properties of the recording film, resulting in changes in recording characteristics and reproduction signal levels; ■ Microscopic changes in the recording film. Defects such as distortion racks occur, causing signal dropouts and unnecessary signals during playback.

■の化学的変化については、その対策としては媒体自身
を化学的に安定化させることで対応するのが最も一般的
である。
The most common countermeasure for the chemical change (2) is to chemically stabilize the medium itself.

例えば、特公昭60−23997号公報にはTeを含む
記録媒体にSeを加える方法が提案されている。
For example, Japanese Patent Publication No. 60-23997 proposes a method of adding Se to a recording medium containing Te.

また、本発明者らも有機化合物のプラズマ重合物を保護
層として設けることを提案した。(特願昭61−314
261号)。
The present inventors also proposed providing a plasma polymerized organic compound as a protective layer. (Special application 1986-314
No. 261).

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

ところが、上記の方法により保存安定性の改良を行った
場合には元の記録媒体に比べ感度が低下してしまい、よ
り高いパワーのレーザー光を当てないと必ずしも満足の
いく記録特性が得られないことが判った。
However, when storage stability is improved using the above method, the sensitivity decreases compared to the original recording medium, and satisfactory recording characteristics cannot necessarily be obtained unless a higher power laser beam is applied. It turned out that.

本発明の目的は保存安定性に優れ、高感度を有する追記
型レーザービーム記録部材を提供することにある。
An object of the present invention is to provide a write-once type laser beam recording member having excellent storage stability and high sensitivity.

〔課題を解決するための手段] すなわち、本発明は少なくともTeと有機化合物のプラ
ズマ重合物を含有する記録媒体を用いた小孔形成型追記
型レーザービーム記録部材において、該記録媒体の上に
膜厚が平均で1人〜100人のSe薄膜を設けたことを
特徴とする追記型レーザービーム記録部材を提供するも
のである。
[Means for Solving the Problems] That is, the present invention provides a small hole-forming write-once laser beam recording member using a recording medium containing at least a plasma polymerized product of Te and an organic compound, in which a film is formed on the recording medium. The present invention provides a write-once type laser beam recording member characterized in that a Se thin film having an average thickness of 1 to 100 layers is provided.

本発明は酸化劣化等を起こし易いTe含有層を化学的に
より安定なSe層で覆うことによりTe含有層の化学的
な変化を抑制すること、およびSeO熱的性質から小孔
形成に対し5eJiiが記録感度に悪影響を及ぼしにく
いとの知見を元に行ったものであるが、驚くべきことに
Se層の膜厚が平均で1人とSeの単分子層にも満たな
い厚みでも保存安定性に効果があることが判った。
The present invention suppresses chemical changes in the Te-containing layer by covering the Te-containing layer, which is prone to oxidative deterioration, with a chemically more stable Se layer. This was done based on the knowledge that recording sensitivity is unlikely to be adversely affected, but surprisingly, storage stability was achieved even when the thickness of the Se layer was on average less than one layer and less than a monolayer of Se. It turned out to be effective.

以下本発明について具体的に説明する。The present invention will be specifically explained below.

本発明で用いられる記録媒体は少なくともTeと有機化
合物のプラズマ重合物を含有するものである。
The recording medium used in the present invention contains at least Te and a plasma polymer of an organic compound.

本発明に用いられる有機化合物のプラズマ重合物として
はメタン、エタン、プロパン、ブタン、ペンタンなどの
飽和炭化水素、エチレン、プロピレン、ブテン、ペンテ
ンなどの不飽和炭化水素、メタノール、エタノール、プ
ロパツールなどのアルコール類、アセトン、メチルエチ
ルケトンなどのケトン類、ベンゼン、トルエンなどの芳
香族化合物などが挙げられる。また、二硫化炭素、メル
カプタンなどの含硫化合物、テトラフルオロエチレン、
ヘキサフルオロプロピレン、オクタフルオロシクロブタ
ンなどの含フツ素化合物、メチルアミン、エチルアミン
、プロピルアミン、ジメチルアミン、ジエチルアミン、
ピリジンなどの含窒素化合物などの有機化合物を1〜1
O−6Torr程度の真空度で、高周波放電あるいは直
流放電により重合させることにより得ることができる。
Examples of plasma polymerized organic compounds used in the present invention include saturated hydrocarbons such as methane, ethane, propane, butane, and pentane, unsaturated hydrocarbons such as ethylene, propylene, butene, and pentene, and methanol, ethanol, and propatool. Examples include alcohols, ketones such as acetone and methyl ethyl ketone, and aromatic compounds such as benzene and toluene. In addition, sulfur-containing compounds such as carbon disulfide and mercaptan, tetrafluoroethylene,
Fluorine-containing compounds such as hexafluoropropylene and octafluorocyclobutane, methylamine, ethylamine, propylamine, dimethylamine, diethylamine,
1 to 1 organic compounds such as nitrogen-containing compounds such as pyridine
It can be obtained by polymerization using high frequency discharge or direct current discharge at a vacuum degree of about O-6 Torr.

このプラズマ重合をTeの真空蒸着またはスパッタリン
グと同時に行うことによりTeと有機化合物のプラズマ
重合物を含有する記録媒体を作成することができる。
By performing this plasma polymerization simultaneously with vacuum evaporation or sputtering of Te, a recording medium containing a plasma polymer of Te and an organic compound can be produced.

これらの記録媒体層は真空蒸着、スパッツクリング法等
の公知の方法によりガラス基板、ポリカーボネート、ポ
リメチルメタクリレート等の樹脂基板上に薄膜状に形成
される。
These recording medium layers are formed in the form of a thin film on a resin substrate such as a glass substrate, polycarbonate, or polymethyl methacrylate by a known method such as vacuum evaporation or the Spatzkling method.

上記記録媒体層は基板上に直接に、または薄膜状に形成
された重合物のような有機物層を介して基板上に形成し
てもよい。
The recording medium layer may be formed directly on the substrate, or may be formed on the substrate via an organic material layer such as a polymer formed in the form of a thin film.

以上のように従来技術で作成された記録媒体上にSeの
薄膜を設けることにより本発明の目的である保存安定性
に優れ、高感度を有する小孔形成型追記型レーザービー
ム記録部材が得られる。
As described above, by providing a thin film of Se on a recording medium prepared using the conventional technique, it is possible to obtain a small hole-forming write-once laser beam recording member that has excellent storage stability and high sensitivity, which is the object of the present invention. .

Seの薄膜は真空蒸着、スパンツタリング法等の公知の
方法により上記記録媒体上に形成することができる。
The Se thin film can be formed on the recording medium by a known method such as vacuum evaporation or spun sputtering.

一般にSe層の膜厚が厚くなるにしたがって保存安定性
は向上するが、記録感度は若干低下する。
Generally, as the thickness of the Se layer increases, storage stability improves, but recording sensitivity slightly decreases.

Se層が平均で1人未満の場合には保存安定性向上の効
果が少なく、一方100人を超えてもそれ以上の保存安
定性の向上が期待できず、記録感度が幾分低下する。こ
のためSeの膜厚は平均で1〜100人が用いられるが
、好ましくは平均で1〜30人、より好まし°くは平均
で3〜20人の範囲である。
If the number of Se layers is less than one person on average, the effect of improving storage stability will be small, while if it exceeds 100 people, no further improvement in storage stability can be expected, and the recording sensitivity will decrease somewhat. For this reason, the Se film thickness is in the range of 1 to 100 layers on average, preferably 1 to 30 layers on average, and more preferably 3 to 20 layers on average.

また、Teと有機化合物のプラズマ重合物を含有する記
録媒体の記録・再生特性を安定化させるためTeの結晶
化を50〜80°Cに加熱して行うことがよく行われて
いるが、この加熱処理については5eff膜を成膜する
前に行ってもよいし、また成膜後に行ってもよい。
Furthermore, in order to stabilize the recording/reproducing characteristics of recording media containing plasma polymerized Te and organic compounds, Te crystallization is often carried out by heating to 50 to 80°C. The heat treatment may be performed before or after forming the 5eff film.

〔発明の効果〕〔Effect of the invention〕

本発明によれば保存安定性に優れ、高感度な小孔形成型
追記型レーザビーム記録部材を提供することができる。
According to the present invention, it is possible to provide a small hole-forming write-once laser beam recording member with excellent storage stability and high sensitivity.

〔実施例〕〔Example〕

以下、本発明を実施例により具体的に説明するが、本発
明はこれらに限定されるものではない。
EXAMPLES Hereinafter, the present invention will be specifically explained with reference to Examples, but the present invention is not limited thereto.

実施例 1 130mm φのプリグループ付ポリカーボネート基板
を真空蒸着装置内にセットし、C32ガスを導入し、高
周波コイルを用いてプラズマ重合膜を基板上に形成した
。さらにプラズマ重合を続けながらTeを抵抗加熱方式
のボートより蒸発させ、Te・C82系膜を形成した。
Example 1 A polycarbonate substrate with a pregroup of 130 mm φ was set in a vacuum evaporation apparatus, C32 gas was introduced, and a plasma polymerized film was formed on the substrate using a high frequency coil. Further, while plasma polymerization was continued, Te was evaporated from a resistance heating boat to form a Te/C82 film.

なお、この記録媒体の膜厚は約250人であった。つい
で別のボートよりSeを蒸発させ前記記録媒体上に約1
0人のSe薄膜を成膜した。このようにして得られたレ
ーザー記録部材(以下ディスク単板と略す)を真空蒸着
装置から取り出し、相対湿度40%以下のオーブンに入
れて70″Cで1時間Teの結晶化を行った。得られた
ディスク単板の記録・再生特性を830nmのレーザー
光を用い、再生時のレーザーパワーを0.8mWとし、
記録時のレーザーパワーを変化させて測定した。なお、
記録位置は半径40mm、回転数180Or p m、
周波数5MHzでレーザー光照射パルスは50nsであ
った。その結果、キャリヤ一対ノイズ比(C/N)50
dB以上になるレーザーパワーは5.8mWであった。
The film thickness of this recording medium was about 250 people. Then, Se is evaporated from another boat to deposit about 1
A thin film of 0 Se was deposited. The laser recording member thus obtained (hereinafter abbreviated as a single disk) was taken out of the vacuum deposition apparatus and placed in an oven at a relative humidity of 40% or less to crystallize Te at 70"C for 1 hour. The recording and reproducing characteristics of the single disc were evaluated using an 830 nm laser beam and a laser power of 0.8 mW during reproduction.
Measurements were made by changing the laser power during recording. In addition,
The recording position is a radius of 40mm, a rotation speed of 180Orpm,
The laser light irradiation pulse was 50 ns at a frequency of 5 MHz. As a result, the carrier-to-noise ratio (C/N) was 50
The laser power that exceeded dB was 5.8 mW.

このディスク単板を80°C1相対湿度80%の恒温槽
に20日間入れて保存安定性の加速試験を行った。
This disk veneer was placed in a constant temperature bath at 80° C. and 80% relative humidity for 20 days to conduct an accelerated storage stability test.

その後、このディスク単板の記録・再生特性は加速試験
前と差は認められず、一方レーザー光の反射率は加速試
験前の97%を保っていた。
Thereafter, no difference was observed in the recording/reproducing characteristics of this single disk compared to before the accelerated test, and on the other hand, the reflectance of laser light remained at 97% of that before the accelerated test.

比較例 l Seの薄膜を成膜しなかった以外は実施例1と同様にし
て上層にTeとC32とのプラズマ重合物を含み、下層
がC32のプラズマ重合膜を設けたディスク単板を得、
次いでTeの結晶化を行った。このディスク単板を実施
例1と同様に記録・再生特性を測定すると共に保存安定
性の加速試験を行ったところ、加速試験前に50dBを
超える記録時レーザーパワーは5.8mWであった。ま
た、加速試験後には最高C/Nが約10dB低下すると
ともに反射率は加速試験前の60%にまで低下していた
Comparative Example 1 A disk veneer was obtained in the same manner as in Example 1 except that a thin film of Se was not formed, and the upper layer contained a plasma polymerized product of Te and C32, and the lower layer was provided with a plasma polymerized film of C32.
Next, Te was crystallized. The recording/reproducing characteristics of this single disk were measured in the same manner as in Example 1, and an accelerated storage stability test was conducted.The laser power during recording exceeding 50 dB before the accelerated test was 5.8 mW. Further, after the accelerated test, the maximum C/N decreased by about 10 dB and the reflectance decreased to 60% of that before the accelerated test.

実施例 2〜5および比較例 2 実施例1と同様にしてC82とのプラズマ重合膜とTe
とCS zとのプラズマ重合膜を有する2層構造の記録
部材を作成した。ただし、プラズマ重合条件を変化させ
たため本記録部材の組成比は実施例1と若干具なってお
り、また膜厚は約300人であった。得られたディスク
単板5枚は同時に70°Cで1時間加熱処理を行った後
、1枚はそのまま、他の4枚はその上に第1表に示す膜
厚にSe薄膜を真空蒸着法により成膜し、保存安定性加
速試験前後での記録・再生特性、反射率変化をみたとこ
ろ第1表に示すように本発明のレーザー記録部材は高感
度で、且つ保存安定性に優れていた。
Examples 2 to 5 and Comparative Example 2 A plasma polymerized film with C82 and Te
A recording member having a two-layer structure having a plasma polymerized film of and CS z was prepared. However, since the plasma polymerization conditions were changed, the composition ratio of this recording member was slightly different from that of Example 1, and the film thickness was about 300. Five of the resulting single disks were simultaneously heat-treated at 70°C for 1 hour, then one was left as is and a Se thin film was applied on top of it to the thickness shown in Table 1 by vacuum evaporation. The recording/reproducing characteristics and changes in reflectance were observed before and after an accelerated storage stability test. As shown in Table 1, the laser recording member of the present invention had high sensitivity and excellent storage stability. .

比較例 3 真空蒸着装置内にポリカーボネート基板をセットし、T
eとSeを別々のボートから同時に蒸発させ、TeとS
eを含む記録層を有するディスク単板を作成した。なお
、記録層中のT e / S eの体積比は81/19
であった。このディスク単板の記録・再生特性を測定し
たところ、レーザーパワーを7mWに上げてもC/Nは
50dB以下であり、非常に感度が低かった。
Comparative Example 3 A polycarbonate substrate was set in a vacuum evaporation device, and T
Evaporate e and Se simultaneously from separate boats, Te and S
A single disc having a recording layer containing e.g. The volume ratio of T e / S e in the recording layer is 81/19.
Met. When the recording and reproducing characteristics of this single disk were measured, even when the laser power was increased to 7 mW, the C/N was 50 dB or less, and the sensitivity was extremely low.

実施例 6 真空蒸着装置内にポリカーボネート基板をセットし、六
フッ化プロピレン(以下6FPと略す)ガスを導入し、
高周波コイルを用いて6FPプラズマ重合膜を形成した
。次に導入ガスをC82とし、プラズマ重合を行いなが
らTeを抵抗加熱方式のボートから蒸発させTe−C3
2膜を作成した。この記録媒体の膜厚は約250人であ
った。プラズマ重合とTeの蒸発を止めた後、別のボー
トよりSeを蒸発させ約10人のSe薄膜をつけた。
Example 6 A polycarbonate substrate was set in a vacuum evaporation apparatus, and hexafluoropropylene (hereinafter abbreviated as 6FP) gas was introduced.
A 6FP plasma polymerized film was formed using a high frequency coil. Next, the introduced gas was C82, and Te was evaporated from a resistance heating boat while plasma polymerization was being carried out to form Te-C3.
Two films were created. The film thickness of this recording medium was about 250 people. After stopping the plasma polymerization and Te evaporation, Se was evaporated from another boat to form a Se thin film of about 10 people.

得られたディスク単板を実施例1と同様にしてTeの結
晶化を行った後記録・再生特性および保存安定性加速試
験を実施例1と同様におこなったところ、C/N≧50
dBとなる記録時レーザーパワーは 5.8 mWであ
り、加速試験後の反射率はもとの97%を保っており、
高感度、優れた保存安定性を示した。
After crystallizing Te on the obtained disk single plate in the same manner as in Example 1, accelerated recording/reproducing characteristics and storage stability tests were conducted in the same manner as in Example 1. As a result, C/N≧50
The laser power during recording, which corresponds to dB, was 5.8 mW, and the reflectance after the accelerated test remained at 97% of the original.
It showed high sensitivity and excellent storage stability.

実施例 7 導入ガスを6FPのみとしたこと以外は実施例6と同様
にして6FPプラズマ重合膜−Te・6FPプラズマ重
合膜−3e膜の3層構造を有するディスク単板を作製し
た。実施例1と同様に記録・再生特性および保存安定性
加速試験を行ったところ実施例6と類似の結果が得られ
、高感度、保存安定性に優れていることが判った。
Example 7 A disk single plate having a three-layer structure of 6FP plasma polymerized film-Te/6FP plasma polymerized film-3e film was produced in the same manner as in Example 6 except that only 6FP was used as the introduced gas. Accelerated tests on recording/reproducing characteristics and storage stability were conducted in the same manner as in Example 1, and results similar to those in Example 6 were obtained, indicating that the sample had high sensitivity and excellent storage stability.

実施例 日 導入ガスをオクタフルオロシクロブタン(以下PCBと
略す)とした他は実施例7と同様にして成膜し、PCB
プラズマ重合膜−Te −PCBプラズマ重合膜−Se
膜の3層構造を有するディスク単板を作製した。実施例
1と同様に記録・再生特性および保存安定性加速試験を
行ったところ、このディスク単板は高感度であり、保存
安定性に優れていた。
Example A film was formed in the same manner as in Example 7 except that the introduced gas was octafluorocyclobutane (hereinafter abbreviated as PCB).
Plasma polymerized film-Te -PCB plasma polymerized film-Se
A disk veneer having a three-layer structure of membranes was fabricated. Accelerated recording/reproducing characteristics and storage stability tests were conducted in the same manner as in Example 1, and the disk single plate was found to have high sensitivity and excellent storage stability.

実施例 8 RF電源および直流電源を有するスパッタリング装置内
にグループ付ポリカーボネート基板をセットし、ターゲ
ットとしてRF電源にはTeを、直流電源にはSeを用
いた。系内を真空排気後テトラフルオロエチレン(以下
TFEと略す)を30%を含有するArを導入し、RF
電源を入れスパッタリングを行い、Te−TFEプラズ
マ重合物からなる記録媒体を作成した。次にTFEの導
入を停止し、Ar単独ガスを導入すると共に電源を直流
電源に変えSeのスパッタリングを行った。
Example 8 A grouped polycarbonate substrate was set in a sputtering apparatus having an RF power source and a DC power source, and as a target, Te was used for the RF power source and Se was used for the DC power source. After evacuating the system, Ar containing 30% of tetrafluoroethylene (hereinafter abbreviated as TFE) was introduced, and RF
The power was turned on and sputtering was performed to create a recording medium made of Te-TFE plasma polymer. Next, the introduction of TFE was stopped, Ar gas alone was introduced, and the power source was changed to a DC power source to perform sputtering of Se.

このようにしてTe−TFEプラズマ重合物層約200
人、Se層約10人の2層構造をもつディスク単板を得
た。実施例1と同様に記録・再生特性および保存安定性
加速試験を行ったところ、このディスク単板は高感度で
あり、かつ保存安定性に優れていることを確認した。
In this way, a Te-TFE plasma polymer layer of about 200
A disk veneer having a two-layer structure of approximately 10 layers of carbon and Se layers was obtained. Accelerated recording/reproducing characteristics and storage stability tests were performed in the same manner as in Example 1, and it was confirmed that this single disk had high sensitivity and excellent storage stability.

Claims (1)

【特許請求の範囲】[Claims] 少なくともTeと有機化合物のプラズマ重合物を含有す
る記録媒体を用いた小孔形成型追記型レーザービーム記
録部材において、該記録媒体の上に膜厚が平均で1Å〜
100ÅのSe薄膜を設けたことを特徴とする追記型レ
ーザービーム記録部材。
In a small hole-forming write-once laser beam recording member using a recording medium containing at least a plasma polymer of Te and an organic compound, the average film thickness on the recording medium is 1 Å or more.
A write-once laser beam recording member characterized by being provided with a 100 Å Se thin film.
JP63156517A 1988-06-23 1988-06-23 Draw-type laser beam recording member Pending JPH024579A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63156517A JPH024579A (en) 1988-06-23 1988-06-23 Draw-type laser beam recording member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63156517A JPH024579A (en) 1988-06-23 1988-06-23 Draw-type laser beam recording member

Publications (1)

Publication Number Publication Date
JPH024579A true JPH024579A (en) 1990-01-09

Family

ID=15629513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63156517A Pending JPH024579A (en) 1988-06-23 1988-06-23 Draw-type laser beam recording member

Country Status (1)

Country Link
JP (1) JPH024579A (en)

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