JPH0246048Y2 - - Google Patents

Info

Publication number
JPH0246048Y2
JPH0246048Y2 JP1984125046U JP12504684U JPH0246048Y2 JP H0246048 Y2 JPH0246048 Y2 JP H0246048Y2 JP 1984125046 U JP1984125046 U JP 1984125046U JP 12504684 U JP12504684 U JP 12504684U JP H0246048 Y2 JPH0246048 Y2 JP H0246048Y2
Authority
JP
Japan
Prior art keywords
lid
divided
cavity
dish
polycrystalline silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984125046U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6139931U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984125046U priority Critical patent/JPS6139931U/ja
Publication of JPS6139931U publication Critical patent/JPS6139931U/ja
Application granted granted Critical
Publication of JPH0246048Y2 publication Critical patent/JPH0246048Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Silicon Compounds (AREA)
JP1984125046U 1984-08-17 1984-08-17 多結晶シリコンウエハ用製造皿 Granted JPS6139931U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984125046U JPS6139931U (ja) 1984-08-17 1984-08-17 多結晶シリコンウエハ用製造皿

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984125046U JPS6139931U (ja) 1984-08-17 1984-08-17 多結晶シリコンウエハ用製造皿

Publications (2)

Publication Number Publication Date
JPS6139931U JPS6139931U (ja) 1986-03-13
JPH0246048Y2 true JPH0246048Y2 (pl) 1990-12-05

Family

ID=30683731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984125046U Granted JPS6139931U (ja) 1984-08-17 1984-08-17 多結晶シリコンウエハ用製造皿

Country Status (1)

Country Link
JP (1) JPS6139931U (pl)

Also Published As

Publication number Publication date
JPS6139931U (ja) 1986-03-13

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