JPH0246209U - - Google Patents
Info
- Publication number
- JPH0246209U JPH0246209U JP12275488U JP12275488U JPH0246209U JP H0246209 U JPH0246209 U JP H0246209U JP 12275488 U JP12275488 U JP 12275488U JP 12275488 U JP12275488 U JP 12275488U JP H0246209 U JPH0246209 U JP H0246209U
- Authority
- JP
- Japan
- Prior art keywords
- wire
- circular area
- center
- slider
- pole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Position Or Direction (AREA)
Description
第１図ａ，ｂ、第２図ａ，ｂは本考案の一実施
例を示す説明図、第３図は第１図、第２図の実施
例の動作を示す説明図、第４図ａ，ｂは従来のこ
の種のＸＹテーブル位置検出装置の一例を示す説
明図である。
１…ＸＹテーブル、１ａ…Ｘ軸移動テーブル、
１ｂ…Ｙ軸移動テーブル、２…アーム、３…ワイ
ヤ、４…ポール、５…ベース、６…フツク、７…
ばね、８…スライダ、９…フオトセンサ。なお図
中同一符号は同一または相当するものを示す。
Fig. 1 a, b and Fig. 2 a, b are explanatory diagrams showing one embodiment of the present invention; Fig. 3 is an explanatory diagram showing the operation of the embodiment of Fig. 1 and Fig. 2; Fig. 4 a; , b are explanatory views showing an example of a conventional XY table position detection device of this type. 1...XY table, 1a...X-axis moving table,
1b...Y-axis moving table, 2...arm, 3...wire, 4...pole, 5...base, 6...hook, 7...
Spring, 8...Slider, 9...Photo sensor. Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
内に限定する場合、該ＸＹテーブルの位置決めの
位置が上記円領域内にあるか否かを検出するＸＹ
テーブル位置検出装置において、該ＸＹテーブル
のＸ軸移動テーブル上に重なつたＹ軸移動テーブ
ルに固定したアームの先端にワイヤの一端を接続
し、該ＸＹテーブルの位置決めの位置が上記円領
域の中心のとき上記アームの上記ワイヤの一端を
接続した位置に上面中央の穴が重なる位置にポー
ルを該ＸＹテーブルを設置したベース平面上に固
定し、上記ワイヤを上記ポールの上面中央の上記
穴を通して側面から引き出し上記ベース平面に平
行に展張し、展張した上記ワイヤの他端を上記ベ
ース平面に固定したフツクにばねを介して連結し
た上記ベース平面上で上記ポールを中心とする円
の径方向にスライドするスライダに接続し、該Ｘ
Ｙテーブルの位置決めの位置の上記円領域の中心
からの変位を上記スライダの直線上の変位に移し
て、上記スライダの直線上の変位をフオトセンサ
で検知し該ＸＹテーブルの位置決めの位置が上記
円領域内にあるか否かを検出するＸＹテーブル位
置検出装置。 When the positioning range of the XY table is limited to a predetermined circular area, the XY table detects whether the positioning position of the XY table is within the circular area.
In the table position detection device, one end of a wire is connected to the tip of an arm fixed to a Y-axis moving table that overlaps the X-axis moving table of the XY table, and the positioning position of the XY table is the center of the circular area. At this time, fix the pole on the base plane on which the XY table is installed at a position where the hole at the center of the top surface overlaps the position where one end of the wire of the arm is connected, and pass the wire through the hole at the center of the top surface of the pole to the side. The other end of the stretched wire is connected via a spring to a hook fixed to the base plane, and the wire slides in the radial direction of a circle centered on the pole. Connect the slider to the corresponding X
The displacement of the positioning position of the Y table from the center of the circular area is transferred to the linear displacement of the slider, and the linear displacement of the slider is detected by a photo sensor, and the positioning position of the XY table is set in the circular area. An XY table position detection device that detects whether the
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12275488U JPH0720724Y2 (en) | 1988-09-21 | 1988-09-21 | XY table position detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12275488U JPH0720724Y2 (en) | 1988-09-21 | 1988-09-21 | XY table position detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0246209U true JPH0246209U (en) | 1990-03-29 |
| JPH0720724Y2 JPH0720724Y2 (en) | 1995-05-15 |
Family
ID=31370980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12275488U Expired - Lifetime JPH0720724Y2 (en) | 1988-09-21 | 1988-09-21 | XY table position detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0720724Y2 (en) |
-
1988
- 1988-09-21 JP JP12275488U patent/JPH0720724Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0720724Y2 (en) | 1995-05-15 |
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