JPH0246537B2 - KEISANSETSUKAIJIKISOSEIBUTSU - Google Patents
KEISANSETSUKAIJIKISOSEIBUTSUInfo
- Publication number
- JPH0246537B2 JPH0246537B2 JP14387085A JP14387085A JPH0246537B2 JP H0246537 B2 JPH0246537 B2 JP H0246537B2 JP 14387085 A JP14387085 A JP 14387085A JP 14387085 A JP14387085 A JP 14387085A JP H0246537 B2 JPH0246537 B2 JP H0246537B2
- Authority
- JP
- Japan
- Prior art keywords
- mol
- porcelain
- dielectric
- cao
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Description
(産業上の利用分野)
本発明は高周波集積回路板、誘電体共振器、共
振器支持台、ICパツケージ、マイクロ波透過窓
等エレクトロニクス分野で利用されるセラミツク
ス特に硅酸石灰磁器組成物に関する。
(従来の技術)
硅酸石灰は従来から高周波絶縁磁器として用い
られている。
しかしながらこの磁器はアルミナ磁器に比べ
1GHz以上の高周波では誘電損失が大きいために
共振周波数の温度係数が小さいという長所がある
にもかかわらず用途がある比較的低周波(〜10M
Hz)の狭い範囲に限定されるものであつた。
(発明が解決しようとする問題点)
上記従来の硅酸石灰系の磁器に於て高周波誘電
損失が大きいという欠点を解決すればその利用範
囲も拡大できるのでその改良が切望されるところ
である。
(問題点を解決するための手段)
本発明はこのような状況に鑑みなされたもの
で、SiO2−CaOに対しTiO2を小量加えることよ
つて、これを焼結したものが、共振周波数の温度
係数が小さいばかりでなく、高周波誘電損失が非
常に小さくできることを見出した。
即ち、本発明の要旨とするところはモル分率で
別紙第1図の三成分組成図の点、A、B、C及び
Dを結ぶ4辺形区域に囲まれた範囲(4辺形を構
成する直線上も含む)内の割合SiO2、CaO及び
TiO2からなる磁器組成物であり、点、A、B、
C及びDは次表のとおりとするものである。
(Field of Industrial Application) The present invention relates to ceramics, particularly silicate-lime porcelain compositions, used in the electronics field such as high-frequency integrated circuit boards, dielectric resonators, resonator supports, IC packages, and microwave transmission windows. (Prior Art) Lime silicate has been conventionally used as high frequency insulating porcelain. However, compared to alumina porcelain, this porcelain
Due to the large dielectric loss at high frequencies above 1 GHz, there are applications at relatively low frequencies (~10M
Hz). (Problems to be Solved by the Invention) If the drawback of the conventional lime silicate porcelain of large high-frequency dielectric loss can be solved, the range of its use can be expanded, and improvement thereof is strongly desired. (Means for Solving the Problems) The present invention was made in view of the above situation, and by adding a small amount of TiO 2 to SiO 2 −CaO, the sintered product can increase the resonance frequency. We have found that not only the temperature coefficient of is small, but also the high frequency dielectric loss can be made extremely small. That is, the gist of the present invention is to calculate the mole fraction in the range surrounded by the quadrilateral area connecting the points A, B, C, and D of the ternary composition diagram in Figure 1 of the attached sheet (which constitutes the quadrilateral). (including on the straight line) SiO 2 , CaO and
It is a porcelain composition consisting of TiO2 , with points A, B,
C and D shall be as shown in the following table.
【表】【table】
【表】
の三成分を合量で500gとなるようにし、これと
脱イオン水350mlとを内容積1のポリエチレン
ボールミル(20φmm、99.9%アルミナ球石1Kg)
へ入れて50時間粉砕混合する。このスラリーを冷
凍乾燥し粉末とし、この粉末を1260℃で1時間仮
焼し、32メツシユの篩を通す。
上記仮焼粉末 300g
脱イオン水 200ml
ヒドロキシプロピルセルロース 9g
以上の三成分を内容積1のポリエチレンボー
ルミル(20φmm、99.9%アルミナ球石2Kg)へ入
れて50時間混合粉砕する。
このようにして得られたスラリーを冷凍乾燥
し、乾燥粉末を32メツシユの篩を通し素地とし
た。
次に素地を圧力1500Kg/cm2でサイズ19φmm×
10.2Lmmに金型プレス成形した。
この成形体を1280℃〜1320℃の範囲のそれぞれ
の最適温度で大気中で焼成し、焼成品をサイズ
15φmm×8Lmmに研磨加工した。両端面は0.1S側面
は0.3Sである。
加工品をアセトンで30分間、脱イオン水で30分
間それぞれ超音波洗滌したものを試料とし、諸特
性を測定した結果を表1に示す。
測定は測定周波数9〜10GHz誘電体円柱共振法
で行なつた。[Table] Combine the three components in a total amount of 500 g, and add 350 ml of deionized water to a polyethylene ball mill with an internal volume of 1 (20 φ mm, 99.9% alumina ball 1 kg).
and grind and mix for 50 hours. This slurry is freeze-dried to form a powder, which is calcined at 1260°C for 1 hour and passed through a 32-mesh sieve. 300 g of the above calcined powder 200 ml of deionized water 9 g of hydroxypropyl cellulose The above three components were placed in a polyethylene ball mill (20 φ mm, 2 kg of 99.9% alumina balls) with an inner volume of 1, and mixed and ground for 50 hours. The slurry thus obtained was freeze-dried, and the dried powder was passed through a 32-mesh sieve to form a base material. Next, the base material was heated to a pressure of 1500Kg/cm 2 and the size was 19φmm×
It was press-molded with a die of 10.2Lmm. This molded body is fired in the air at the optimal temperature in the range of 1280℃ to 1320℃, and the fired product is sized.
Polished to 15φmm x 8Lmm. Both end faces are 0.1S and side faces are 0.3S. Table 1 shows the results of measuring various properties of processed products that were ultrasonically cleaned with acetone for 30 minutes and deionized water for 30 minutes. The measurement was performed using a dielectric cylinder resonance method at a measurement frequency of 9 to 10 GHz.
【表】【table】
【表】
表1から明らかなように、本発明の実施例に相
当する試料No.1〜11ではいずれも誘電体力率が
0.7〜1.9という小さい値であるのに対し、本発明
の範囲を外れた比較例のものではその誘電体力率
が7.2〜7.9という大きい値である。又Q値も本発
明の実施例は3000〜4000と大きい値であるのに対
し比較例のものは900〜400と小さい。
次に本発明においてSiO2を45.0モル%〜51.5モ
ル%としたのは、45.0モル%よりSiO2が少なくな
ると比誘電率も共振周波数の温度係数も大きくな
り、51.5モル%を超えた場合は誘電体力率が著し
く大きくなるからである。
又、CaOを48.0モル%〜52.0モル%としたの
は、48.0モル%よりCaOが少なくなると焼結体が
得られず52.0モル%を超えた場合は誘電体力率が
極めて悪くなる傾向が大きいためである。
更に又TiO2を0.5モル%〜3.0モル%としたの
は、0.5モル%よりTiO2が少なくなると、共振周
波数の温度係数は極めて優れているものの誘電体
力率が大き過ぎ、逆に3.0モル%を超えた場合は
共振周波数の温度係数が大きくなるにも拘わら
ず、誘電体力率が極めて大きくなるためである。
(発明の効果)
以上の説明から判るように本発明ではSiO2に
CaO及びTiO2を特定割合で配合し焼結する組成
物にしてSiO2+CaOの有する高周波領域での共
振周波数の温度係数の小さい長所を生かしながら
TiO2の混在により高周波誘電損失を著しく小さ
くすることができ、高周波利用の分野に極めて有
効な絶縁磁器を提供することを可能ならしめるも
のである。[Table] As is clear from Table 1, the dielectric power factor was
The dielectric power factor is a small value of 0.7 to 1.9, whereas the dielectric power factor of a comparative example outside the scope of the present invention is a large value of 7.2 to 7.9. Furthermore, the Q value of the examples of the present invention is as large as 3000 to 4000, whereas that of the comparative example is as small as 900 to 400. Next, in the present invention, SiO 2 is set to 45.0 mol % to 51.5 mol % because when SiO 2 is less than 45.0 mol %, both the relative dielectric constant and the temperature coefficient of the resonance frequency become large. This is because the dielectric power factor becomes significantly large. In addition, the reason why CaO is set at 48.0 mol% to 52.0 mol% is because if CaO is less than 48.0 mol%, a sintered body cannot be obtained, and if it exceeds 52.0 mol%, the dielectric power factor tends to be extremely poor. It is. Furthermore, the reason why TiO 2 is set to 0.5 mol % to 3.0 mol % is that when TiO 2 is less than 0.5 mol %, although the temperature coefficient of the resonance frequency is extremely excellent, the dielectric power factor is too large; This is because if it exceeds , the dielectric power factor becomes extremely large even though the temperature coefficient of the resonance frequency becomes large. (Effect of the invention) As can be seen from the above explanation, in the present invention, SiO 2
By creating a composition in which CaO and TiO 2 are mixed in a specific ratio and sintered, we can take advantage of the small temperature coefficient of resonance frequency of SiO 2 + CaO in the high frequency range.
The inclusion of TiO 2 makes it possible to significantly reduce high-frequency dielectric loss, making it possible to provide insulating porcelain that is extremely effective in the field of high-frequency applications.
第1図は本発明の基本成分範囲を示す三成分組
成図である。
FIG. 1 is a three-component composition diagram showing the basic component ranges of the present invention.
Claims (1)
成分の配合比がモル分率で表わした三成分組成図
において、次下の点 【表】 を結ぶ線上及びこの線に囲まれる組成範囲にある
ことを特徴とする硅酸石灰磁器組成物。[Claims] 1. In the ternary composition diagram in which the blending ratio of the ternary porcelain composition consisting of SiO 2 , CaO and TiO 2 is expressed in mole fraction, on the line connecting the points below [Table] and this line A silicate lime porcelain composition characterized by being in a composition range surrounded by.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14387085A JPH0246537B2 (en) | 1985-07-02 | 1985-07-02 | KEISANSETSUKAIJIKISOSEIBUTSU |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14387085A JPH0246537B2 (en) | 1985-07-02 | 1985-07-02 | KEISANSETSUKAIJIKISOSEIBUTSU |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS627665A JPS627665A (en) | 1987-01-14 |
| JPH0246537B2 true JPH0246537B2 (en) | 1990-10-16 |
Family
ID=15348909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14387085A Expired - Lifetime JPH0246537B2 (en) | 1985-07-02 | 1985-07-02 | KEISANSETSUKAIJIKISOSEIBUTSU |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0246537B2 (en) |
-
1985
- 1985-07-02 JP JP14387085A patent/JPH0246537B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS627665A (en) | 1987-01-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |