JPH0246866U - - Google Patents
Info
- Publication number
- JPH0246866U JPH0246866U JP12587788U JP12587788U JPH0246866U JP H0246866 U JPH0246866 U JP H0246866U JP 12587788 U JP12587788 U JP 12587788U JP 12587788 U JP12587788 U JP 12587788U JP H0246866 U JPH0246866 U JP H0246866U
- Authority
- JP
- Japan
- Prior art keywords
- quartz ampoule
- growth
- substrate
- liquid phase
- phase epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図ａ，ｂは本考案にかかる石英アンプルの
実施例を示す図、第２図は本考案にかかる石英
アンプルの実施例を示す図、第３図は閉管方式
液相エピタキシヤル成長装置の概要図、第４図は
従来の石英アンプルを示す図、第５図は液相エピ
タキシヤル成長状態を示す図である。
図において、ｌは石英アンプルの中心軸線、ｐ
は非対称な端面、１は石英アンプル、２は加熱反
応炉、３は被成長基板、４は基板ホルダー、５は
成長用メルト、１１は外套管、１２は基板固定治
具、２２，３２は基板固定治具（非対称な端面ｐ
をもつた基板固定治具）、３１は対向治具、を示
している。
Figures 1a and b are diagrams showing an embodiment of a quartz ampoule according to the present invention, Figure 2 is a diagram showing an embodiment of a quartz ampoule according to the invention, and Figure 3 is a diagram showing a closed tube type liquid phase epitaxial growth apparatus. A schematic diagram, FIG. 4 is a diagram showing a conventional quartz ampoule, and FIG. 5 is a diagram showing a state of liquid phase epitaxial growth. In the figure, l is the central axis of the quartz ampoule, p
1 is an asymmetric end surface, 1 is a quartz ampoule, 2 is a heating reactor, 3 is a growth substrate, 4 is a substrate holder, 5 is a growth melt, 11 is an outer tube, 12 is a substrate fixing jig, 22 and 32 are substrates Fixing jig (asymmetrical end surface p
(a substrate fixing jig having a board fixing jig), and 31 indicates an opposing jig.
Claims (1)
アンプル１と該石英アンプル内の前記被成長基板
３を保持した基板固定治具１２，２２との接触端
面の少なくとも一方の端面ｐが前記石英アンプル
の中心軸線ｌに対して非対称形をなしていること
を特徴とする液相エピタキシヤル成長装置。 At least one end face p of the contact end faces between the quartz ampoule 1 containing the growth substrate 3 and the growth melt 5 and the substrate fixing jigs 12 and 22 holding the growth substrate 3 inside the quartz ampoule is connected to the quartz ampoule. A liquid phase epitaxial growth apparatus characterized by having an asymmetric shape with respect to a central axis l.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12587788U JPH0246866U (en) | 1988-09-26 | 1988-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12587788U JPH0246866U (en) | 1988-09-26 | 1988-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0246866U true JPH0246866U (en) | 1990-03-30 |
Family
ID=31376872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12587788U Pending JPH0246866U (en) | 1988-09-26 | 1988-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0246866U (en) |
-
1988
- 1988-09-26 JP JP12587788U patent/JPH0246866U/ja active Pending
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