JPH048438U - - Google Patents
Info
- Publication number
- JPH048438U JPH048438U JP4835890U JP4835890U JPH048438U JP H048438 U JPH048438 U JP H048438U JP 4835890 U JP4835890 U JP 4835890U JP 4835890 U JP4835890 U JP 4835890U JP H048438 U JPH048438 U JP H048438U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrostatic chuck
- holder
- fixing means
- close contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 description 1
Description
第１図は本考案の実施例の断面図である。第２
図は弾性部の拡大図である。第３図は従来の技術
による実施例である。
１……静電チヤツク電極、２……ＲＦ電極、３
……弾性部（静電チヤツク電極）、４……弾性部
（ＲＦ電極）、５……固定手段、６……試料、７
……吸着面、８……接続面、９……熱膨張。
FIG. 1 is a sectional view of an embodiment of the present invention. Second
The figure is an enlarged view of the elastic part. FIG. 3 shows an embodiment according to the prior art. 1... Electrostatic chuck electrode, 2... RF electrode, 3
...Elastic part (electrostatic chuck electrode), 4...Elastic part (RF electrode), 5... Fixing means, 6... Sample, 7
... Adsorption surface, 8 ... Connection surface, 9 ... Thermal expansion.
Claims (1)
密着する状態で保持されている静電チヤツク電極
とからなるホルダーにおいて、前記ＲＦ電極及び
静電チヤツク電極に薄肉形状よりなる弾性部を設
けたことを特徴とするホルダー。 In a holder consisting of an RF electrode and an electrostatic chuck electrode held in close contact with the RF electrode by a fixing means, the RF electrode and the electrostatic chuck electrode are provided with an elastic portion having a thin wall shape. A holder featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4835890U JPH048438U (en) | 1990-05-08 | 1990-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4835890U JPH048438U (en) | 1990-05-08 | 1990-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH048438U true JPH048438U (en) | 1992-01-27 |
Family
ID=31565094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4835890U Pending JPH048438U (en) | 1990-05-08 | 1990-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH048438U (en) |
-
1990
- 1990-05-08 JP JP4835890U patent/JPH048438U/ja active Pending