JPH0247600A - collimator - Google Patents

Abstract

PURPOSE:To obtain a collimator easy of center alignment by providing a center position adjusting screw of the collimator in the neighborhood of both the ends of an outer cylinder in which an inner cylinder having collimator pieces is inserted and further setting a fixing member for fixing the inner cylinder. CONSTITUTION:An inner cylinder to which a first and a second collimator pieces 2, 3 are adhered is inserted in an outer cylinder 1 having a projecting part 16 in the inside thereof. Next, after the axial position of the inner cylinder 7 is determined to the outer pipe 1, it is fixed by fixing screws 15. Thereafter the center alignment of the first collimator piece 2 is performed by an adjusting screw 8 to fix the adjusting screw 8 by the method such as painting, and further an adjusting screw 9 is fixed after the center of the second collimator piece 3 is aligned by the adjusting screw 9. Thus work for aligning the center of the collimator piece with the other center of the outer cylinder 1 can easily be performed in the collimator.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a collimator used in an X-ray diffraction apparatus.

[Prior Art] In devices that perform X-ray diffraction, such as micro-area X-ray diffractometers, Debye-Sierra cameras, Laue cameras, Weisenberg cameras, and four-axis diffractometers, an incident X-ray beam from an Qualitative analysis is performed by irradiating a minute area of a sample as a smaller spot and analyzing the diffraction lines generated therefrom.

An example of a conventional collimator is shown in FIG. FIG. 2 is a cross-sectional view of a so-called double pinhole collimator that separates two collimator pieces. A through hole is provided in the axial direction of the outer cylinder 1, and the first collimator piece 2 is provided at both ends of the through hole.
and a second collimator piece 3 is attached.

The collimator pieces 2 and 3 are discs made of molybdenum, gold, etc., with a diameter of about 3 mm and a thickness of about 0.4 m, and holes of about 10 μm to 1 μm in diameter are drilled in them. Generally, the diameter of the hole in the first collimator piece 2 near the X-ray source is set larger than the diameter of the second collimator piece 3. This is to increase the intensity of the X-ray beam, but
When high parallelism is required for the line beam, the first collimator piece 2 and the second collimator piece 3 have holes of the same diameter.

In the configuration shown in Fig. 2, the X-ray beam incident from the direction of the arrow 6 is focused by the first collimator piece 2 and the second collimator piece 3, and is made into a narrow beam that is irradiated onto a minute area of the sample (not shown). . In addition, in the figure,
5.6 is an auxiliary ring.

A collimator as shown in FIG. 3 has also been proposed. In the case shown in FIG. 3, an inner cylinder 7 containing a first collimator piece 2 and a second collimator piece 3 is inserted into the outer cylinder 1, and the first and second collimator pieces 2.3 are inserted into the inner cylinder 7. The center position of the hole can be adjusted from the outside using adjustment screws 8 and 9 as adjustment members. That is, FIG. 4 shows a cross-sectional view of the adjustment screw 8 along line A-A', and as is clear from FIG. 4, the first frimeter piece 2 can be adjusted by adjusting the four screws 8'. The radial position can be adjusted.

The adjustment screw 9 has a similar structure. In addition, the third
In the figure, the first collimator piece 2 is glued to the inner cylinder 7, but the second collimator piece 3 is composed of a through hole formed in the axial direction of the inner cylinder 7. In the collimator shown in FIG. The inner cylinder 7 is longer than the outer cylinder 1, and the second collimator piece is arranged so as to protrude from the outer cylinder toward the sample side. This is to reduce the dead angle, and this It is a feature.

Now, as shown in FIG. 5 asb, if the second collimator piece 3 of the collimator shown in FIG. 2 and the second collimator piece 3 of the collimator shown in FIG. 3 are at the same distance from the sample 10, then the sample 10 The collimator shown in FIG. 3 has a smaller angle θ at which the collimator is viewed from the angle θ, and the collimator shown in FIG. 3 is less obtrusive to the detector, that is, the dead angle is smaller.

[Problems to be Solved by the Invention] Now, in order to irradiate an X-ray beam to a microscopic region of a sample to be measured using a collimator with good reproducibility and compatibility, it is necessary to The outer diameter of the outer cylinder must be constant and perfectly circular, and the center of the hole in each collimator piece must coincide with the center of the outer cylinder.

However, in order to fix the first and second collimator pieces 2.3 to the outer cylinder 1 in the collimator shown in FIG.
Glue the first and second collimator pieces 2 and 3 to the auxiliary rings 4 and 5, respectively, and after the adhesive has dried, glue the auxiliary rings 4.5 to the outer cylinder 1 while observing with a microscope. As a result, the auxiliary ring would sometimes lift up during gluing and change its position, or the auxiliary ring would move as the adhesive contracted during the drying process. If a misalignment of the collimator piece 2 or 3 is confirmed after the auxiliary ring 4.5 is glued and dried, it must be discarded and another collimator must be remade from scratch.

However, if the diameter of the hole in the collimator piece is 0.5 to 1
If it is about +n, positioning work is relatively easy, but
Recently, collimator pieces with diameters as small as IOμm are often required, and it was extremely difficult to center and bond collimator pieces with such small diameters using the method described above. .

On the other hand, in the collimator having the configuration shown in FIG. 3, first, the first collimator piece 2 is glued to the inner cylinder 7,
After drying, insert the inner cylinder 7 into the outer cylinder 1. Then, hold the collimator with the V block 11 as shown in FIG. Adjust the adjustment screw 8 so that it does not move. This means that the hole in the first collimator piece 2 is centered. Next, the same process is performed for the second collimator piece 3.

However, according to the configuration shown in FIG. 3, when adjusting the center position of the hole of the first collimator piece 2 with the adjustment screw 8, the inner cylinder 7 rotates about the adjustment screw 9 as a fulcrum, and the adjustment screw 9 When adjusting the center position of the hole in the second collimator piece 3, the inner cylinder 7 rotates around the adjustment screw 8, so first align the center of the first collimator piece 2 with the adjustment screw 8 as described above. However, when the next adjustment screw 9 is used to align the center of the second collimator piece 3, the center of the first collimator piece 2 will move, and as a result, the adjustment work for centering the flimeter pieces 2 and 3 will be delayed. was very time-consuming.

The present invention solves the above-mentioned problems, and an object of the present invention is to provide a collimator that can easily align the center of a collimator piece with the center of an outer cylinder 1.

[Means for Solving the Problems] In order to achieve the above object, the collimator of the present invention has the following features:
A collimator comprising an outer cylinder and an inner cylinder inserted inside the outer cylinder and having at least one collimator piece, wherein the outer cylinder has adjustment members near both ends thereof for adjusting the center position of the collimator piece. The invention is characterized in that it further includes a fixing member that fixes the inner cylinder between both of the adjustment members.

[Function] In the present invention, since the fixing member is provided between the two adjustment members provided near both ends of the outer cylinder, preferably approximately in the center, the inner cylinder does not interfere on either side of the fixing member.
They can be adjusted independently of each other, so the center of the collimator piece only needs to be adjusted twice, which simplifies the adjustment work.

[Example] Examples will be described below with reference to the drawings.

FIG. 1 is a diagram showing the configuration of one embodiment of the collimator according to the present invention. When compared with that shown in FIG. teeth,
The difference is that a fixing screw 15 for fixing the inner cylinder 7 to the outer cylinder 1 is provided.

The protrusion 16 and the fixing member 15 constitute a fixing member.

Now, in order to manufacture the collimator having the configuration shown in FIG. 1 are fitted together without play, and after the axial position of the inner cylinder 7 with respect to the outer cylinder 1 has been determined, the fixing screw 15 is
It is fixed at

As a result, the parts on both sides of the fixed thread 15 of the inner cylinder 7 do not interfere with each other and can be adjusted independently. That is, if we consider the case where the center of the first collimator piece 2 is aligned with the adjustment screw 8, the inner cylinder 7 only bends about the part fixed with the fixing screw 15 as a fulcrum, and there is no effect on the second collimator piece 3. It has no effect. Therefore, as shown in FIG. 6, hold the first collimator piece 2 against the V block in the same way as shown in FIG. After aligning the center of the second collimator piece 3 with the adjustment screw 9, the adjustment screw 9 is fixed, and the adjustment work of the collimator pieces 2 and 3 is completed. It is clear that the adjustment screws 8 and 9 may have the same construction as shown in FIG.

Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications are possible. For example, the structure of the collimator is not limited to that shown in FIG. In other words, in the above embodiments, a so-called double pinhole collimator was taken as an example, but the present invention can also be applied to a so-called single collimator having one collimator piece. Moreover, various means for fixing the inner cylinder 7 to the outer cylinder 1 can be considered, and are not limited to the combination of the protrusion 16 and the fixing screw 15 described in the embodiment. Furthermore, the position of the fixing member is not limited to the center of the outer cylinder 1, but may be anywhere between the adjusting screws 8 and 9.

Furthermore, the adjustment screw can be fixed by impregnating the screw itself with an adhesive instead of painting it.

[Effects of the Invention] As is clear from the above description, according to the present invention, ■ the position does not shift because an unstable adhesive is not used; and ■ the positioning and fixing of the collimator piece to the outer cylinder. This can be done using the adjustment screw using the rigidity of the inner cylinder, making the work easier. ■ The second collimator piece protrudes from the tip of the outer cylinder toward the sample, reducing the dead angle. Excellent effects can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing the configuration of an embodiment of a collimator according to the present invention, FIGS. 2 and 3 are diagrams showing the configuration of a conventional collimator, and FIG. 4 is a cross section taken along A-A in FIG. 3. FIG. 5 is a diagram for explaining the dead angle, and FIG. 6 is a diagram for explaining the method of adjusting the collimator shown in FIGS. 1 and 3. 1... Outer cylinder, 2... Third collimator piece, 3...
2nd collimator piece, 7...inner cylinder, 8.9...adjustment screw. Applicant: Japan

Claims (1)

[Claims] (1) In a collimator consisting of an outer cylinder and an inner cylinder inserted inside the outer cylinder and having at least one collimator piece, the outer cylinder has a center position adjuster for adjusting the center position of the collimator piece near both ends of the outer cylinder. A collimator comprising: an adjusting member, and further comprising a fixing member for fixing an inner cylinder between the adjusting members.