JPH0247651U - - Google Patents
Info
- Publication number
- JPH0247651U JPH0247651U JP12522688U JP12522688U JPH0247651U JP H0247651 U JPH0247651 U JP H0247651U JP 12522688 U JP12522688 U JP 12522688U JP 12522688 U JP12522688 U JP 12522688U JP H0247651 U JPH0247651 U JP H0247651U
- Authority
- JP
- Japan
- Prior art keywords
- support frame
- protective film
- protective
- holes
- supporting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims description 4
Description
第１図は本考案によるフオトマスク保護装置の
一実施例をフオトマスクとともに示す斜視図であ
る。
１……フオトマスク、２……保護膜、３……支
持枠。
FIG. 1 is a perspective view showing an embodiment of a photomask protection device according to the present invention together with a photomask. 1... Photomask, 2... Protective film, 3... Support frame.
Claims (1)
して成るフオトマスク保護装置において、 上記支持枠を貫通細孔を有する部材で形成した
ことを特徴とするフオトマスク保護装置。[Claims for Utility Model Registration] A photomask protection device comprising a protective film and a support frame for supporting the protective film, wherein the support frame is formed of a member having through holes. Protective device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12522688U JPH0247651U (en) | 1988-09-26 | 1988-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12522688U JPH0247651U (en) | 1988-09-26 | 1988-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0247651U true JPH0247651U (en) | 1990-03-30 |
Family
ID=31375645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12522688U Pending JPH0247651U (en) | 1988-09-26 | 1988-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0247651U (en) |
-
1988
- 1988-09-26 JP JP12522688U patent/JPH0247651U/ja active Pending