JPH0330425U - - Google Patents
Info
- Publication number
- JPH0330425U JPH0330425U JP9039489U JP9039489U JPH0330425U JP H0330425 U JPH0330425 U JP H0330425U JP 9039489 U JP9039489 U JP 9039489U JP 9039489 U JP9039489 U JP 9039489U JP H0330425 U JPH0330425 U JP H0330425U
- Authority
- JP
- Japan
- Prior art keywords
- ray mask
- silicon substrate
- support film
- absorbers
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000006096 absorbing agent Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Description
第１図はこの考案のＸ線マスクの一実施例の構
成を示す断面図、第２図ａないし第２図ｆは同上
Ｘ線マスクの製造工程を示す工程断面図である。
１……シリコン基板、２……支持膜、３……吸
収体。
FIG. 1 is a sectional view showing the structure of an embodiment of the X-ray mask of this invention, and FIGS. 2a to 2f are process sectional views showing the manufacturing process of the same X-ray mask. 1...Silicon substrate, 2...Support film, 3...Absorber.
Claims (1)
に同じパターンの吸収体を形成してなることを特
徴とするＸ線マスク。 An X-ray mask characterized in that absorbers with the same pattern are formed on both the front and back sides of a support film formed on a silicon substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9039489U JPH0330425U (en) | 1989-08-02 | 1989-08-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9039489U JPH0330425U (en) | 1989-08-02 | 1989-08-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0330425U true JPH0330425U (en) | 1991-03-26 |
Family
ID=31639917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9039489U Pending JPH0330425U (en) | 1989-08-02 | 1989-08-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0330425U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009022282A (en) * | 2007-06-18 | 2009-02-05 | Hiroki Hachiuma | Mariculture system |
-
1989
- 1989-08-02 JP JP9039489U patent/JPH0330425U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009022282A (en) * | 2007-06-18 | 2009-02-05 | Hiroki Hachiuma | Mariculture system |