JPH0249385B2 - - Google Patents

Info

Publication number
JPH0249385B2
JPH0249385B2 JP61080080A JP8008086A JPH0249385B2 JP H0249385 B2 JPH0249385 B2 JP H0249385B2 JP 61080080 A JP61080080 A JP 61080080A JP 8008086 A JP8008086 A JP 8008086A JP H0249385 B2 JPH0249385 B2 JP H0249385B2
Authority
JP
Japan
Prior art keywords
magnetic field
high frequency
substrate
groove
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61080080A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62238370A (ja
Inventor
Hirohiko Izumi
Akira Ishibashi
Yasuaki Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP61080080A priority Critical patent/JPS62238370A/ja
Publication of JPS62238370A publication Critical patent/JPS62238370A/ja
Publication of JPH0249385B2 publication Critical patent/JPH0249385B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording-members for original recording by exposure, e.g. to light, to heat or to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP61080080A 1986-04-09 1986-04-09 プラズマｃｖｄ装置 Granted JPS62238370A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61080080A JPS62238370A (ja) 1986-04-09 1986-04-09 プラズマｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61080080A JPS62238370A (ja) 1986-04-09 1986-04-09 プラズマｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS62238370A JPS62238370A (ja) 1987-10-19
JPH0249385B2 true JPH0249385B2 (sr) 1990-10-30

Family

ID=13708238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61080080A Granted JPS62238370A (ja) 1986-04-09 1986-04-09 プラズマｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS62238370A (sr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01226148A (ja) * 1988-03-07 1989-09-08 Mitsui Toatsu Chem Inc 膜形成装置
JPH01227427A (ja) * 1988-03-08 1989-09-11 Mitsui Toatsu Chem Inc 成膜装置
US9805918B2 (en) * 2013-02-06 2017-10-31 Arcelormittal Investigación Y Desarrollo Sl Plasma source

Also Published As

Publication number Publication date
JPS62238370A (ja) 1987-10-19

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Legal Events

Date Code Title Description
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LAPS Cancellation because of no payment of annual fees