JPH0249879B2 - KIDOBUOYOBIKUDOKEINOBOJINSOCHI - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a dust prevention device for preventing dirt and dust from entering the track and drive system of a moving platform that moves linearly or curved.

Prior Art Conventionally, as a dust prevention device for preventing dust from entering the track and drive system of a movable platform that moves in a straight line or a curve, for example, the dust prevention devices shown in FIGS. 8a, b, and c are known. ing.

The dust-proof device shown in FIGS. 8a and 8b consists of a bellows 3 (see a) that covers a rail unit (not shown), which is the track section of the slide unit 2 of the linear bearing 1, or a telescopic shield 4 (see b).
(see). The bellows 3 and the telescopic shield 4 are each attached at one end to the slide unit 2 and at the other end to the end of the rail unit.
It expands and contracts as the track moves, preventing dirt and dust from entering the track.

The dust-proof device shown in FIG. 8c is provided in the running direction of the movable platform 5, and on the left and right sides, in order to cover the wheels 5', 5', . . . and the track sections 7, 7' of the movable platform 5. It is composed of fixed covers 6, 6'.

Problems with the prior art However, in the fixed covers 6, 6',
Wheels 5', 5' on one side, openings 8, 8' for movement
Because of this, it is not possible to completely prevent dust and dust from entering.

In addition, although the bellows 3 and the telescope type shield 4 described above can prevent the intrusion of dirt and dust to a certain extent, the bellows 3 and the telescope type shield 4 constantly expand and contract as the slide unit 2 moves. Therefore, there is a problem that the life span is short and parts must be replaced within a relatively short period of time. Furthermore, the bellows 3 and the telescopic shield 4 require a storage space when the bellows 3 and the telescopic shield 4 are contracted. Another problem is that it can be applied to mobile devices that perform circular motion.

Purpose of the Invention The present invention was devised in view of the above circumstances, and is applicable to mobile devices that move in orbit, can completely prevent the intrusion of dirt and dust, is easy to maintain, and is compact. The purpose of this invention is to provide a dustproof device for track sections and drive systems.

Composition of the Invention In order to achieve the above object, the main means employed by the present invention is to provide a liquid storage tank having parallel tank sections on the left and right sides, and a liquid stored in both the tank sections. a movable platform including a wing portion to be inserted and supported in a central portion so as to be movable on a track portion provided in the center of the liquid storage tank; a drive system provided in a penetrating manner in the central portion of the movable platform; a fixed cover that is inserted penetratingly into a cavity formed in the wing section and a passage communicating with both cavities, whose lower end is inserted into the liquid, and whose interior is sealed; This is a dust prevention device for the track section and drive system.

Effect of the Invention Both wing parts of the movable platform, which is movably supported by a track part in the center part, move in a state of being immersed in the liquid in the tank parts provided on the left and right sides of the liquid storage tank. Furthermore, a fixed cover inserted in a penetrating manner into a cavity formed in both wing parts of the moving table and a passage communicating with both cavities is fixed with both lower ends of the fixed cover immersed in the liquid. There is. Therefore, the central portion of the movable table, which includes the track section and the drive system, is completely sealed by the liquid through the fixed cover, thereby preventing dirt, dust, etc. from entering the sliding section such as the track section and the drive system.

Embodiments Hereinafter, embodiments embodying the present invention will be described with reference to the accompanying drawings to provide an understanding of the present invention.

It should be noted that the following examples are examples embodying the present invention, and are not intended to limit the technical scope of the present invention.

Here, FIG. 1 is a plan view of a dust prevention device for a track section and drive system according to an embodiment of the present invention, FIG. 2 is a cross-sectional view taken along the line A-A in FIG. 1, and FIG. 4 is a sectional view taken along line C-C in FIG. 1; FIG. 5 is a perspective view of a moving device equipped with a dustproof device according to another embodiment of the present invention; FIG. 6 is a sectional view taken along line D-D in FIG. 5;
FIG. 7 is a sectional view taken along the line E--E in FIG. 5.

As shown in FIGS. 1 to 4, the dust prevention device F for the track section and drive system according to this embodiment includes a liquid storage tank 11 having left and right parallel tank parts 10, 10', and both tank parts 10 and 10'. , 10', and is supported in a movable manner by a track section 13 provided at the center of the liquid storage tank 11; This moving table 15
a drive system 14 provided in the center of the movable table 15 to drive the hollow parts 16, 16' formed in the wing parts 12, 12' and both the hollow parts 16, 1;
6', and its lower ends 18, 18' are inserted into the water, and
It is configured to include a fixed cover 9 whose inside is sealed.

First, the liquid storage tank 11 having left and right parallel tank parts 10, 10' is formed, for example, in an endless oval shape as in this embodiment, and has a plurality of support members 20, 2.
0, . . are suspended from the ceiling 21.

A conveying device 23 for conveying the workpiece 22 is attached to the moving table 15 . And the moving platform 15
The cross sections of the wing parts 12, 12' are formed into a streamlined shape so that the water in the tank parts 10, 10' does not ripple when the water moves.

Here, the track section 13 (see FIG. 3) includes wheels 2 rotatably attached to the center of the movable platform 15.
4, 24, . . . and a rail 25 attached to the center of the liquid storage tank 11 to guide the moving table 15 along the liquid storage tank 11 by the wheels 24, 24, .
It consists of 25.

The drive system 14 (see FIG. 4) includes a moving base 15
A chain 2 is partially attached to the main body and stretched in an elliptical and endless manner along the center of the liquid storage tank 11.
6, a plurality of sprockets 27, 27, .
6 and a motor (not shown) for driving the movable table 15 along the liquid storage tank 11.

Next, the fixed cover 19 is attached to the liquid storage tank 11.
It is formed into an endless oval shape to conform to the shape of. Further, the fixed cover 19 is attached to the liquid storage tank 11.
On the other hand, a plurality of support means 28, which retreat to avoid interference with the moving table 15 when the moving table 15 passes,
28,... (see Figure 4).

This support means 28 has an engaged member 29 attached to the back surface of the fixed cover 19 and an engaging member 30 that supports the fixed cover 19 by engaging the engaged member 29. When the approach of the moving table 15 is detected by the limit switch 31, the engaging member 3 is moved in order to avoid interference with the moving table 15.
0 and a solenoid 32 that retracts 0 downward.

In the dust prevention device F configured as described above, the movable base 1 is submerged in water in the tank parts 10 and 10' of the liquid storage tank 11 together with the lower ends 18 and 18' of the fixed cover 19.
5's wing parts 12, 12' are inserted, and the moving platform 1
5 is movably supported by a track section 13 and a drive system 14 provided in the center of the liquid storage tank 11 so that the fixed cover 19 is surrounded by the hollow sections 16, 16' and the passage 17 of the moving table 15. Therefore, the track section 13 and the drive system 14 are always completely sealed from the outside. And since a liquid is used for the seal, there are no mechanical consumable parts.

Although the inside of the fixed cover 19 is normally at atmospheric pressure, it is possible to further improve the dust-proofing effect by making the internal pressure different from the external pressure using a vacuum pump, compressor, etc.

Furthermore, since the dustproof device F uses the fixed cover 19, it does not require a storage space unlike the conventional bellows 3 and telescopic shield 4 shown in FIGS. 8a and 8b.

Further, when the movable table 15 is driven to travel via a chain 26 driven by a motor (not shown), supporting means 28 and 2 that support the fixed cover 19 are provided.
8, ... retreat to avoid interference with the moving table 15 when the moving table 15 passes, the movement locus of the moving table 15 can be made into a circumferential or endless elliptical shape, and the movement of the moving table 15 can be made circular or endlessly oval. It is also possible to increase the possible distance considerably.

Therefore, the above-mentioned dustproof device F is suitable for use in clean rooms where semiconductors and the like are manufactured, for example, where it is necessary to completely seal off dust generated in the track section and drive system, and where relatively long travel distances are required. It is ideal as a transport device for automated lines and as a dust prevention device for clean robots.

In the above embodiment, the water used for sealing the fixed cover 19 is stagnant in the tanks 10 and 10', but this water is circulated through a pump and a filter, and further water is By providing a weir at the outer edge of the tank parts 10, 10' in case of overflow, dust, dust, etc. floating in the tank parts 10, 10' can be collected.

Still other embodiments will be described based on FIGS. 5 to 7.

As shown in the figure, the dustproof device G according to this embodiment has almost the same basic structure as the dustproof device F (see FIGS. 1 to 4), and is movable in the X-axis direction and the Y-axis direction. This is for use in a mobile device H.

In the dust prevention device G, the moving platform 15' only moves in a straight line and its travel distance is relatively short, so the track section 13' is connected to the rail units 33, 33.
and a plurality of slide units 34, 34, . . . and are constructed by linear bearings.

The drive system 14' includes a ball screw shaft 36 rotatably attached to the liquid reservoir 11' and directly connected to the motor 35, and a ball screw nut 37 screwed onto the ball screw shaft 36 and attached to the moving table 15'. It is configured.

Furthermore, as shown in FIGS. 5 and 7, the fixed cover 19' has rubber gaskets 38 and 3 at both ends.
8 to both ends of the tank portions 10a, 10a' of the liquid storage tank 11'.

Since the dustproof device G is configured as described above, the fixed cover 19' is constructed at a lower cost than the fixed cover 19 of the dustproof device F (see FIGS. 1 and 4) supported by the support means 28. be able to.

In addition, the ball screw shaft 36 and the ball screw nut 3 that constitute the drive system 14' of the above embodiment
Drive system 1 with rack and pinion instead of 7
4' is also possible.

Effects of the Invention As described above, the present invention includes a liquid storage tank having horizontally parallel tank parts, a wing part inserted into the liquid stored in both the tank parts, and a central part of the liquid storage tank having parallel tank parts. A movable platform supported so as to be movable on a track provided in the center of the reservoir, a drive system provided penetratingly in the center of the movable platform, and a cavity formed in the wing and both cavities. inserted into the communicating passage in a penetrating manner, with its lower end inserted into the liquid, and
Since this is a dustproof device for the track section and drive system, which is characterized by a fixed cover whose inside is sealed, it can also be applied to mobile devices that move in orbit, completely preventing the intrusion of dust and dust. Therefore, it is possible to provide a dust-proof device using a track section and a bridge movement system that is compact and easy to maintain.

[Brief explanation of drawings]

1 is a plan view of a dust prevention device for a track section and drive system according to an embodiment of the present invention, FIG. 2 is a sectional view taken along the line A-A in FIG. 1, and FIG. 3 is a B-B in FIG.
-A cross-sectional view of the section viewed from the arrow B, and Fig. 4 shows the C-
5 is a sectional view taken in the direction of arrow C; FIG. 5 is a perspective view of a moving device equipped with a dustproof device according to another embodiment of the present invention; FIG.
The figure is a sectional view taken along the line D-D in FIG. 5, FIG. 7 is a sectional view taken along the line E-E in FIG. 5, and FIG.
b and c are perspective views of a conventional dustproof device for a track section and a drive system. (Explanation of symbols), 10, 10', 10a, 10
a'... Tank section, 11, 11'... Liquid storage tank, 12, 1
2'... Wing part, 13, 13'... Raceway part, 14, 1
4'... Drive system, 15, 15'... Moving table, 16,
16'...Cavity part, 17...Passway, 18, 18'...
...Lower end, 19, 19'...Fixed cover, F, G...
...Dust protection device.

Claims (1)

[Scope of Claims] 1. A liquid reservoir having parallel tank portions on the left and right sides, and a wing portion inserted into the liquid stored in both the tank portions, and a wing portion provided in the center of the liquid reservoir in the center portion of the liquid reservoir tank. A moving platform supported so as to be able to run on a track provided therein, a drive system provided in a penetrating manner in the center of the moving platform, and a cavity formed in the wing section and a passageway communicating with both cavities. 1. A dustproof device for a track section and a drive system, comprising a fixed cover, the lower end of which is inserted into the liquid, and the inside of which is sealed. 2. A dustproof device for a track section and drive system according to claim 1, wherein the pressure inside the cover is made different from the external pressure.