JPH0249923U - - Google Patents
Info
- Publication number
- JPH0249923U JPH0249923U JP12976488U JP12976488U JPH0249923U JP H0249923 U JPH0249923 U JP H0249923U JP 12976488 U JP12976488 U JP 12976488U JP 12976488 U JP12976488 U JP 12976488U JP H0249923 U JPH0249923 U JP H0249923U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- magnetic coupling
- sample
- transfer mechanism
- detaching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Non-Mechanical Conveyors (AREA)
Description
第１図はこの考案にかかる真空内搬送機構の平
面図、第２図は従来の真空内搬送機構の平面図、
第３図はこの考案にかかるクラツチ機構の構成部
品であるスライドの形状説明図、第４図はこの考
案にかかるシヤフト先端の試料保持構造図、第５
図はこの考案にかかる別形状の試料の保持構造図
、第６図はこの考案にかかる真空内設置機器との
脱着説明図である。
７……ピン、８……スライド。
FIG. 1 is a plan view of the vacuum transfer mechanism according to this invention, and FIG. 2 is a plan view of a conventional vacuum transfer mechanism.
Fig. 3 is an explanatory diagram of the shape of the slide, which is a component of the clutch mechanism according to this invention, Fig. 4 is a diagram of the sample holding structure at the tip of the shaft according to this invention, and Fig. 5
The figure is a diagram of a holding structure for a sample of a different shape according to this invention, and FIG. 6 is an explanatory diagram of attachment and detachment with equipment installed in a vacuum according to this invention. 7...Pin, 8...Slide.
Claims (1)
ツトカツプリングを有する搬送機構において、前
記マグネツトカツプリングのシヤフト部にクラツ
チ機構を設けたことを特徴とする真空内搬送機構
。 What is claimed is: 1. A transfer mechanism in a vacuum that includes a magnetic coupling for transferring and detaching a sample, etc. in a vacuum, characterized in that a clutch mechanism is provided in a shaft portion of the magnetic coupling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988129764U JPH0719733Y2 (en) | 1988-10-03 | 1988-10-03 | Vacuum transfer mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988129764U JPH0719733Y2 (en) | 1988-10-03 | 1988-10-03 | Vacuum transfer mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0249923U true JPH0249923U (en) | 1990-04-06 |
| JPH0719733Y2 JPH0719733Y2 (en) | 1995-05-10 |
Family
ID=31384341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988129764U Expired - Lifetime JPH0719733Y2 (en) | 1988-10-03 | 1988-10-03 | Vacuum transfer mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719733Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6094486U (en) * | 1983-12-02 | 1985-06-27 | 三菱重工業株式会社 | Automatic hand changing device |
-
1988
- 1988-10-03 JP JP1988129764U patent/JPH0719733Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6094486U (en) * | 1983-12-02 | 1985-06-27 | 三菱重工業株式会社 | Automatic hand changing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0719733Y2 (en) | 1995-05-10 |
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