JPH0249923U - - Google Patents

Info

Publication number
JPH0249923U
JPH0249923U JP12976488U JP12976488U JPH0249923U JP H0249923 U JPH0249923 U JP H0249923U JP 12976488 U JP12976488 U JP 12976488U JP 12976488 U JP12976488 U JP 12976488U JP H0249923 U JPH0249923 U JP H0249923U
Authority
JP
Japan
Prior art keywords
vacuum
magnetic coupling
sample
transfer mechanism
detaching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12976488U
Other languages
English (en)
Other versions
JPH0719733Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988129764U priority Critical patent/JPH0719733Y2/ja
Publication of JPH0249923U publication Critical patent/JPH0249923U/ja
Application granted granted Critical
Publication of JPH0719733Y2 publication Critical patent/JPH0719733Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Non-Mechanical Conveyors (AREA)

Description

【図面の簡単な説明】
第１図はこの考案にかかる真空内搬送機構の平
面図、第２図は従来の真空内搬送機構の平面図、
第３図はこの考案にかかるクラツチ機構の構成部
品であるスライドの形状説明図、第４図はこの考
案にかかるシヤフト先端の試料保持構造図、第５
図はこの考案にかかる別形状の試料の保持構造図
、第６図はこの考案にかかる真空内設置機器との
脱着説明図である。 ７……ピン、８……スライド。

Claims (1)

    【実用新案登録請求の範囲】
  1. 真空内で試料等の搬送および脱着を行うマグネ
    ツトカツプリングを有する搬送機構において、前
    記マグネツトカツプリングのシヤフト部にクラツ
    チ機構を設けたことを特徴とする真空内搬送機構
    。
JP1988129764U 1988-10-03 1988-10-03 真空内搬送機構 Expired - Lifetime JPH0719733Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988129764U JPH0719733Y2 (ja) 1988-10-03 1988-10-03 真空内搬送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988129764U JPH0719733Y2 (ja) 1988-10-03 1988-10-03 真空内搬送機構

Publications (2)

Publication Number Publication Date
JPH0249923U true JPH0249923U (ja) 1990-04-06
JPH0719733Y2 JPH0719733Y2 (ja) 1995-05-10

Family

ID=31384341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988129764U Expired - Lifetime JPH0719733Y2 (ja) 1988-10-03 1988-10-03 真空内搬送機構

Country Status (1)

Country Link
JP (1) JPH0719733Y2 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6094486U (ja) * 1983-12-02 1985-06-27 三菱重工業株式会社 ハンド自動交換装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6094486U (ja) * 1983-12-02 1985-06-27 三菱重工業株式会社 ハンド自動交換装置

Also Published As

Publication number Publication date
JPH0719733Y2 (ja) 1995-05-10

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