JPH0251358U - - Google Patents
Info
- Publication number
- JPH0251358U JPH0251358U JP13080988U JP13080988U JPH0251358U JP H0251358 U JPH0251358 U JP H0251358U JP 13080988 U JP13080988 U JP 13080988U JP 13080988 U JP13080988 U JP 13080988U JP H0251358 U JPH0251358 U JP H0251358U
- Authority
- JP
- Japan
- Prior art keywords
- frame
- mask
- indicate
- center
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002950 deficient Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 5
Description
第１図は本考案のマスクの構成図、第２図は本
考案のマスクによつてパターンニングされたウエ
ーハーを示した図、第３図は従来のマスクの構成
図、第４図は第３図のマスクによつてパターンニ
ングがされたウエーハーを示す図である。
１……マスク、１１……回路マスク、１２……
枠、１３……不良品領域、２……ウエーハー、２
１……回路チツプ、２２……枠、２３……不良品
領域。
Fig. 1 is a block diagram of the mask of the present invention, Fig. 2 is a diagram showing a wafer patterned with the mask of the present invention, Fig. 3 is a block diagram of a conventional mask, and Fig. 4 is a block diagram of a wafer patterned with the mask of the present invention. FIG. 3 is a diagram showing a wafer patterned with the mask shown in the figure. 1...Mask, 11...Circuit mask, 12...
Frame, 13... Defective product area, 2... Wafer, 2
1... Circuit chip, 22... Frame, 23... Defective product area.
Claims (1)
た良品範囲を示すための枠を備えたことを特徴と
する半導体用マスク。 A semiconductor mask characterized by having a frame in the center of a semiconductor wafer to indicate an arbitrarily set non-defective range.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13080988U JPH0251358U (en) | 1988-10-05 | 1988-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13080988U JPH0251358U (en) | 1988-10-05 | 1988-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0251358U true JPH0251358U (en) | 1990-04-11 |
Family
ID=31386309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13080988U Pending JPH0251358U (en) | 1988-10-05 | 1988-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0251358U (en) |
-
1988
- 1988-10-05 JP JP13080988U patent/JPH0251358U/ja active Pending