JPH0252301A - Formation of secondary curved surface - Google Patents
Formation of secondary curved surfaceInfo
- Publication number
- JPH0252301A JPH0252301A JP20312788A JP20312788A JPH0252301A JP H0252301 A JPH0252301 A JP H0252301A JP 20312788 A JP20312788 A JP 20312788A JP 20312788 A JP20312788 A JP 20312788A JP H0252301 A JPH0252301 A JP H0252301A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- plane
- quadratic
- support body
- curved surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Optical Elements Other Than Lenses (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、放物面ミラーや円筒面ミラーなどの二次曲面
ミラーの形成方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of forming a quadratic curved mirror such as a parabolic mirror or a cylindrical mirror.
従来、この種の二次曲面ミラーの形成方法としては、ミ
ラー母材を所定の曲面に研磨する研磨方法、または平面
ミラーを所定の曲率に曲げる曲げ方法がある。曲率半径
の小さなミラーについては前者の研磨方法でミラー面を
形成することか可能であるが、曲率半径か数Kmにおよ
ぶミラーについては、研磨方法てはミラー面の表面粒度
が低下するだめに、これに代わって後者の曲げ方法が用
いられていた。Conventionally, methods for forming this type of quadratic curved mirror include a polishing method in which a mirror base material is polished into a predetermined curved surface, and a bending method in which a plane mirror is bent into a predetermined curvature. For mirrors with a small radius of curvature, it is possible to form a mirror surface using the former polishing method, but for mirrors with a radius of curvature of several kilometers, the polishing method requires that the surface grain size of the mirror surface be reduced. The latter bending method was used instead.
上述した従来の二次曲面ミラーの形成方法は、ミラーの
支持体あるいはミラーの両支点に大きさの等しい曲げモ
ーメントをかける両端支持はり方法による円筒面ミラー
の形成方法がほとんどで、一種類のミラー形状のみを形
成するもののみであり、同一の機構を用いて放物面ミラ
ーを形成することは不可能であるという欠点がある。Most of the conventional methods for forming quadratic mirrors described above involve forming cylindrical mirrors using a double-end support beam method that applies equal bending moments to the mirror support or both fulcrums of the mirror. The disadvantage is that it only forms a shape, and it is impossible to form a parabolic mirror using the same mechanism.
本発明の目的は、従来の曲げ方法では実現できなかりた
、曲率半径の大きな放物面ミラーと円筒面ミラーを同一
機構を用いて形成することである。An object of the present invention is to form a parabolic mirror and a cylindrical mirror with a large radius of curvature using the same mechanism, which could not be achieved using conventional bending methods.
本発明の二次曲面ミラーの形成方法は、平面ミラーまた
は該平面ミラーを密着させて支持する支持体の相対向す
る平行直線状の両端縁を支点として、両支点にそれぞれ
、
Eは平面ミラーまたは平面ミラーを含
む支持体の縦弾性係数、
■はその断面二次モーメント、
1は両支点間の距離、
Fは二次曲面ミラーの焦点距離、
Dは両端縁を含む平面に対して二1次曲面ミラーの面の
傾きがセロとなる点より次曲面ミラーの対称面に下した
垂線の
該対称面との交点と二次曲面ミラーの頂点との間の距離
で表される値Ma、 Mbを有する曲げモーメントを互
いに反対方向に加えて平面ミラーまたは支持体を湾曲さ
せている。The method for forming a quadratic curved mirror of the present invention is based on two opposing parallel linear end edges of a plane mirror or a support that closely supports the plane mirror as fulcrums, and E is a plane mirror or The longitudinal elastic modulus of the support including the plane mirror, ■ is its second moment of area, 1 is the distance between both supports, F is the focal length of the quadratic curved mirror, and D is the 21st order with respect to the plane containing both edges. Values Ma and Mb expressed by the distance between the intersection of the perpendicular line drawn to the symmetry plane of the curved mirror with the symmetry plane and the vertex of the quadratic curved mirror from the point where the inclination of the surface of the curved mirror becomes zero. The plane mirror or support is curved by applying bending moments in opposite directions.
本発明の基本原理を図面を参照して説明する。 The basic principle of the present invention will be explained with reference to the drawings.
第1図は平面ミラー1が支持体2に密着した状態で支持
体両端縁に加えられた曲げモーメントにより曲面に曲げ
られた状態を示す図、第2図は放物線についてその二つ
の座標系の相互関係を示すグラフである。Figure 1 shows the plane mirror 1 in close contact with the support 2 and bent into a curved surface due to the bending moment applied to both edges of the support, and Figure 2 shows the relationship between the two coordinate systems for a parabola. It is a graph showing a relationship.
平面ミラー1が支持体2にミラー表面を介して密着して
いて、この状態で支持体2の両端縁を支点3,4として
両支点3.4に、それぞれMa、 Mbの大きさの曲げ
モーメントを互いに反対方向に加えて支持体2を湾曲さ
せることにより、円筒面ミラーまたは放物面ミラーを形
成することができる。なお、支持体2を用いずに平面ミ
ラー1の両端に直接曲げモーメントをかける場合も原理
的には上記の場合と同じであるため、以下に支持体2を
用いる場合について、まず、放物面ミラーの形成方法を
説明する。The plane mirror 1 is in close contact with the support body 2 via the mirror surface, and in this state, bending moments of magnitudes Ma and Mb are applied to both the support points 3 and 4 with both end edges of the support body 2 as the fulcrums 3 and 4, respectively. By curving the support body 2 by applying in opposite directions, a cylindrical mirror or a parabolic mirror can be formed. Note that when applying a bending moment directly to both ends of the plane mirror 1 without using the support 2, the principle is the same as the above case. A method for forming a mirror will be explained.
第1図の支持体2は両端縁に垂直な任意の断面形はすべ
て同一のはり形状を有するため、ある−断面について2
次元の問題として考察することができるので、両支点3
.4間を結ぶ直線に対して支持体2の中心線5の傾きが
ゼロになる点を原点として、中心線5の接線方向をX軸
とし、これに垂直な方向をY軸(湾曲側を正方向とする
)にとる。そこで、両支点3.4間の距離を2、平面ミ
ラー1を含む支持体2の縦弾性係数および弾面次モーメ
ントをそれぞれE、Iとすると、支点3に大きさMaの
曲げモーメントを時計方向に、支点4に大きさMbの曲
げモーメントを反時計方向に、それぞれ支持体2に加え
たときの中心線5の形状は次式で表すことができる。The support 2 in FIG.
Since it can be considered as a dimensional problem, both fulcrums 3
.. The origin is the point where the inclination of the center line 5 of the support body 2 is zero with respect to the straight line connecting the two, the tangential direction of the center line 5 is the X axis, and the direction perpendicular to this is the Y axis (the curved side is the positive direction). Therefore, if the distance between both fulcrums 3.4 is 2, and the longitudinal elastic modulus and moment of elasticity of the support 2 including the plane mirror 1 are E and I, respectively, then a bending moment of magnitude Ma is applied to the fulcrum 3 in a clockwise direction. The shape of the center line 5 when a bending moment of magnitude Mb is applied counterclockwise to the support 2 at the fulcrum 4 can be expressed by the following equation.
式(1)は材料力学において公知の両端支持はりのたわ
み計算公式より、上述した中心線5の傾きがゼロとなる
原点に座標系を平行変換することにより容易に得られる
ので誘導を省略する。一方、放物線は第2図に示すよう
に焦点距離Fを用いて、一般にf(x、y)−y2−+
px=oで表される。+コで、x=D、y=−2F汀の
位置を原点として、原点(D。Equation (1) can be easily obtained by parallel transformation of the coordinate system to the origin where the inclination of the center line 5 is zero, from the formula for calculating the deflection of a beam supported at both ends, which is known in the field of mechanics of materials, so the derivation will be omitted. On the other hand, as shown in Figure 2, a parabola is generally expressed using a focal length F, f(x,y)-y2-+
It is expressed as px=o. +, x = D, y = -2F With the position of the bottom as the origin, the origin (D.
−2F■)における放物線の接線方向をX軸とし、これ
に垂直な方向をY軸として座標変換を行うと、放物線y
=ト(x)は次に示す多項式で近似することができる。-2F■)), the tangent direction of the parabola is the X axis, and the direction perpendicular to this is the Y axis.
=t(x) can be approximated by the following polynomial.
ただし、式(3) 、 (4)中のP、Qはそれぞれ次
式で表される。However, P and Q in formulas (3) and (4) are respectively expressed by the following formulas.
式(2)の誘導も、第2図に示すように座標系を原点(
0,0) カラ点(o、 −z、rl) ニ平行s動す
f、かつ新しい原点における放物線の接線方向にX軸が
一致するまで回転させて新座標系に変換した上で7式を
Xに関する多項式に展開し、Xの4次項風−Lを省略す
ることにより得ることができるので誘導の詳細は省略す
る。すなわち、式(2)は放物線を近似した曲線である
。Equation (2) can also be derived by changing the coordinate system to the origin (
0, 0) Empty point (o, -z, rl) Move f in two parallel s and rotate until the X axis coincides with the tangential direction of the parabola at the new origin, convert it to a new coordinate system, and then convert Equation 7. Since it can be obtained by expanding into a polynomial regarding X and omitting the quartic term wind -L of X, details of the induction will be omitted. That is, equation (2) is a curve that approximates a parabola.
したがって、式(1)と式(2)のXに関する2次項と
3次項の係数を等しく置くことにより放物面を形成する
ための曲げモーメントの条件式が得られ、このときの曲
げモーメントの大きさMa、 Mbはそれぞれ次の式(
3) 、 (4)で表される。Therefore, by setting the coefficients of the quadratic and cubic terms regarding X in equations (1) and (2) equally, the bending moment conditional expression for forming a paraboloid can be obtained, and the magnitude of the bending moment at this time is Ma and Mb are each expressed by the following formula (
3) and (4).
3P+ (12Q−3P2)”/2 、、、(3゜
Ma=
Mb=Ma−P ・・・(4
)なお、式(3) 、 (4)においてMa=Mbとす
れば」−述した従来方式と同様に円筒面ミラーを形成す
ることができることは容易に類推されよう。3P+ (12Q-3P2)''/2 ,,, (3゜Ma= Mb=Ma-P...(4
) If Ma=Mb in equations (3) and (4), it can be easily inferred that a cylindrical mirror can be formed in the same manner as in the conventional method described above.
次に、本発明の実施例について図面を参照して説明する
。Next, embodiments of the present invention will be described with reference to the drawings.
第3図は本発明の二次曲面ミラーの形成方法の実施例に
より製造された放物面ミラーの理想放物面ミラーからの
ずれ測定結果を示すグラフである。FIG. 3 is a graph showing the results of measuring the deviation of a parabolic mirror manufactured by an embodiment of the method for forming a quadratic mirror of the present invention from an ideal parabolic mirror.
まず、光源点から17m地点に3.6mradの斜入射
角で放物面ミラーを設置して、光源からの発散光を平行
光にする場合を測定し確認した。このときの放物面ミラ
ーはF = 0.2203]9mm、 D = 16.
99978m、 Il、 = 1.5 m、 E I
=28186.6Nm2であり、この放物面に支持体
2を曲げるために要する曲げモーメントの大きさは、M
a= 318.ONm、Mb= 278.5Nmである
。第3図で、理想放物面ミラー6のY座標(μm)は左
側Y軸に示され、本実施例による放物面ミラー7の理想
放物面ミラー6のY座標からのずれ(%)が右側Y軸に
示されており、これから長さ1.5mのミラーでは高々
0.06%のずれで放物面ミラーを形成できることがわ
かる。また、Ma=Mb= 596.9Nmとすれば、
曲率半径4.722にIの円筒面ミラーを形成すること
ができ、これによりミラーからさらに17m下流に光を
集光することが可能となる。First, a parabolic mirror was installed at a point 17 m from the light source point at an oblique incidence angle of 3.6 mrad, and the case of converting diverging light from the light source into parallel light was measured and confirmed. The parabolic mirror at this time is F = 0.2203]9mm, D = 16.
99978 m, Il, = 1.5 m, E I
=28186.6Nm2, and the magnitude of the bending moment required to bend the support 2 into this paraboloid is M
a=318. ONm, Mb=278.5Nm. In FIG. 3, the Y coordinate (μm) of the ideal parabolic mirror 6 is shown on the left Y axis, and the deviation (%) of the parabolic mirror 7 according to this embodiment from the Y coordinate of the ideal parabolic mirror 6 is shown on the right Y-axis, and it can be seen from this that a parabolic mirror can be formed with a deviation of at most 0.06% for a mirror with a length of 1.5 m. Also, if Ma=Mb=596.9Nm,
A cylindrical mirror of I can be formed with a radius of curvature of 4.722, which allows light to be focused further 17 m downstream from the mirror.
(発明の効果〕
以上説明したように本発明は、平面ミラーまたは該平面
ミラーを密着させて支持する支持体の両端縁に独立可変
な所定の曲げモーメントをかけることにより、任意の放
物面および円筒面ミラーを同一機構によって形成するこ
とができ、特に実験目的に合わせて光の平行化および集
光化を同一機構で達成することが可能となり、曲率半径
が数Kmにおよぶ大きな二次曲面ミラーを形成できると
いう点で、真空紫外線から硬X線領域にわたる高輝度・
高指向性のシンクロトロン放射光の反射に適するという
効果がある。(Effects of the Invention) As explained above, the present invention enables arbitrary parabolic and Cylindrical mirrors can be formed using the same mechanism, making it possible to achieve parallelization and condensing of light with the same mechanism, especially for experimental purposes, and a large quadratic curved mirror with a radius of curvature of several kilometers. In the sense that it can form
It has the effect of being suitable for reflecting highly directional synchrotron radiation light.
第1図は平面ミラーが支持体に密着した状態で両端縁に
加えられた…口ずモーメントにより曲面に曲げられた状
態を示す図、第2図は放物線についてその二つの座標系
の相互関係を示すグラフ、第3図は本発明の二次曲面ミ
ラー形成方法の一実施例により製造された放物面ミラー
の理想放物面ミラーからのずれ測定結果を示すグラフで
ある。
1 ・・・平面ミラー 2 ・・・支持体、3.4
・・・支点、 5 ・・・中心線、6 ・・・
理想放物面ミラ
7 ・・・本実施例による放物面ミラー特許出願人
日本電信電話株式会社Figure 1 shows a plane mirror bent into a curved surface by a humming moment applied to both edges while in close contact with a support, and Figure 2 shows the mutual relationship between the two coordinate systems of a parabola. The graph shown in FIG. 3 is a graph showing the results of measuring the deviation of a parabolic mirror manufactured by an embodiment of the method for forming a quadratic curved mirror of the present invention from an ideal parabolic mirror. 1...Flat mirror 2...Support, 3.4
...Fully point, 5 ...Center line, 6 ...
Ideal parabolic mirror 7 Parabolic mirror according to this embodiment Patent applicant
Nippon Telegraph and Telephone Corporation
Claims (1)
筒面ミラーなどの二次曲面ミラーを形成する二次曲面ミ
ラーの形成方法において、 平面ミラーまたは該平面ミラーを密着させて支持する支
持体の相対向する平行直線状の両端縁を支点として、両
支点にそれぞれ、 Ma={3P+(12Q−3P^2)^1^/^2}/
6,Mb=Ma−Pここで、P=3EIl(FD)^1
^/^2/4(F+D)^3、Q=3F(EI)^2/
4(F+D)^3、Eは平面ミラーまたは平面ミラーを
含 む支持体の縦弾性係数、 Iはその断面二次モーメント、 lは両支点間の距離、 Fは二次曲面ミラーの焦点距離、 Dは両端縁を含む平面に対して二次曲 面ミラーの面の傾きがゼロとなる点より 二次曲面ミラーの対称面に下した垂線の 該対称面との交点と二次曲面ミラーの頂 点との間の距離 で表される値Ma、Mbを有する曲げモーメントを互い
に反対方向に加えて平面ミラーまたは支持体を湾曲させ
ることを特徴とする二次曲面ミラーの形成方法。[Claims] 1. A method for forming a quadratic curved mirror, which forms a quadratic curved mirror such as a parabolic mirror or a cylindrical mirror by bending a plane mirror to a predetermined curvature, comprising: Ma={3P+(12Q-3P^2)^1^/^2}/, using the opposing parallel straight edge edges of the supports that are closely supported as fulcrums, respectively.
6, Mb=Ma-P where P=3EIl(FD)^1
^/^2/4(F+D)^3, Q=3F(EI)^2/
4(F+D)^3, E is the longitudinal elastic modulus of the plane mirror or the support including the plane mirror, I is its moment of inertia, l is the distance between both supporting points, F is the focal length of the quadratic mirror, D is the intersection of the perpendicular line drawn from the point where the inclination of the surface of the quadratic mirror with respect to the plane including both edges is zero to the symmetry plane of the quadratic curved mirror and the vertex of the quadratic curved mirror. A method for forming a quadratic curved mirror, characterized in that a plane mirror or a support is curved by applying bending moments having values Ma and Mb expressed by the distance between them in opposite directions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20312788A JPH0252301A (en) | 1988-08-17 | 1988-08-17 | Formation of secondary curved surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20312788A JPH0252301A (en) | 1988-08-17 | 1988-08-17 | Formation of secondary curved surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252301A true JPH0252301A (en) | 1990-02-21 |
Family
ID=16468853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20312788A Pending JPH0252301A (en) | 1988-08-17 | 1988-08-17 | Formation of secondary curved surface |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252301A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100365541B1 (en) * | 1997-12-08 | 2002-12-18 | 레이티언 캄파니 | General asphere-conic conformal optical windows |
| JP2008249772A (en) * | 2007-03-29 | 2008-10-16 | Topcon Corp | Method of deflecting collimator mirror in illumination optical system of exposure apparatus and illumination optical system of exposure apparatus by the method |
| JP2012027430A (en) * | 2010-05-18 | 2012-02-09 | Olympus Corp | Projection optical device |
-
1988
- 1988-08-17 JP JP20312788A patent/JPH0252301A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100365541B1 (en) * | 1997-12-08 | 2002-12-18 | 레이티언 캄파니 | General asphere-conic conformal optical windows |
| JP2008249772A (en) * | 2007-03-29 | 2008-10-16 | Topcon Corp | Method of deflecting collimator mirror in illumination optical system of exposure apparatus and illumination optical system of exposure apparatus by the method |
| JP2012027430A (en) * | 2010-05-18 | 2012-02-09 | Olympus Corp | Projection optical device |
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