JPH0252431U - - Google Patents
Info
- Publication number
- JPH0252431U JPH0252431U JP1988132420U JP13242088U JPH0252431U JP H0252431 U JPH0252431 U JP H0252431U JP 1988132420 U JP1988132420 U JP 1988132420U JP 13242088 U JP13242088 U JP 13242088U JP H0252431 U JPH0252431 U JP H0252431U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- temperature
- vacuum container
- outside
- temperature signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988132420U JPH0252431U (pt) | 1988-10-11 | 1988-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988132420U JPH0252431U (pt) | 1988-10-11 | 1988-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252431U true JPH0252431U (pt) | 1990-04-16 |
Family
ID=31389364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988132420U Pending JPH0252431U (pt) | 1988-10-11 | 1988-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252431U (pt) |
-
1988
- 1988-10-11 JP JP1988132420U patent/JPH0252431U/ja active Pending
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