JPH0252432U - - Google Patents
Info
- Publication number
- JPH0252432U JPH0252432U JP13265888U JP13265888U JPH0252432U JP H0252432 U JPH0252432 U JP H0252432U JP 13265888 U JP13265888 U JP 13265888U JP 13265888 U JP13265888 U JP 13265888U JP H0252432 U JPH0252432 U JP H0252432U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- output
- temperature
- longitudinal direction
- infrared lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims 2
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例を示す概要断面図、
第２図は第１図の―線断面図である。
４……反応室、５……赤外線ランプ、５ａ〜５
ｅ……制御区分、７……サセプタ、８……ウエハ
、１０……ＲＦコイル、１２……加熱制御部、１
３……温度センサ、１４……ねじ軸、１５……窓
、１６……モータ、１７……位置検出部。
FIG. 1 is a schematic sectional view showing an embodiment of the present invention;
FIG. 2 is a sectional view taken along the line -- in FIG. 4...Reaction chamber, 5...Infrared lamp, 5a-5
e... Control section, 7... Susceptor, 8... Wafer, 10... RF coil, 12... Heating control section, 1
3...Temperature sensor, 14...Screw shaft, 15...Window, 16...Motor, 17...Position detection section.
Claims (1)
少なくとも前記サセプタの表面側から赤外線ラン
プで加熱するシリンダ型気相成長装置の温度制御
装置において、前記赤外線ランプの出力を前記サ
セプタの長手方向に多段に区切つて制御する加熱
制御部と、サセプタの長手方向に移動可能に設け
られたサセプタ温度測定用の温度センサと、同温
度センサのサセプタ長手方向の位置検出部とを備
え、前記加熱制御部は温度センサからの出力と位
置検出部の出力とに応じて赤外線ランプの出力を
各段毎に制御してサセプタの長手方向の温度分布
を所定の状態に制御するように構成されているこ
とを特徴とするシリンダ型気相成長装置の温度制
御装置。 The wafer is placed on a truncated polygonal pyramidal susceptor,
A temperature control device for a cylinder type vapor phase growth apparatus that heats the susceptor from at least a surface side with an infrared lamp, comprising: a heating control unit that controls the output of the infrared lamp by dividing it into multiple stages in the longitudinal direction of the susceptor; The heating controller includes a temperature sensor for measuring the temperature of the susceptor that is movable in the susceptor direction, and a position detection section of the temperature sensor in the longitudinal direction of the susceptor, and the heating control section is configured to control the output from the temperature sensor and the output from the position detection section. 1. A temperature control device for a cylinder type vapor phase growth apparatus, characterized in that the temperature distribution in the longitudinal direction of a susceptor is controlled to a predetermined state by controlling the output of an infrared lamp at each stage accordingly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13265888U JPH0252432U (en) | 1988-10-11 | 1988-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13265888U JPH0252432U (en) | 1988-10-11 | 1988-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252432U true JPH0252432U (en) | 1990-04-16 |
Family
ID=31389827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13265888U Pending JPH0252432U (en) | 1988-10-11 | 1988-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252432U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6355427B2 (en) * | 1981-02-23 | 1988-11-02 | Brother Ind Ltd |
-
1988
- 1988-10-11 JP JP13265888U patent/JPH0252432U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6355427B2 (en) * | 1981-02-23 | 1988-11-02 | Brother Ind Ltd |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6475837A (en) | Control device for air conditioner | |
| JPS642436U (en) | ||
| JPS6283877U (en) | ||
| JPH02126813U (en) | ||
| JPS6247092U (en) | ||
| JPH02101240U (en) | ||
| JPS6410309A (en) | Correcting device for actuator | |
| JPH01116348U (en) | ||
| JPH0232419U (en) | ||
| JPS62103188U (en) | ||
| JPS6352005U (en) | ||
| JPH01153817U (en) | ||
| JPS636043U (en) | ||
| JPH03115393U (en) | ||
| JPS6387110U (en) | ||
| JPS62116389U (en) | ||
| JPS62114053U (en) | ||
| JPS63150207U (en) | ||
| JPS63176048U (en) | ||
| JPH0413665U (en) | ||
| JPS62129799U (en) | ||
| JPS6410814U (en) | ||
| JPH01175605U (en) | ||
| JPH042095A (en) | High frequency heating device | |
| JPH0255005U (en) |