JPH0252989A - Heat exchanger - Google Patents
Heat exchangerInfo
- Publication number
- JPH0252989A JPH0252989A JP20197288A JP20197288A JPH0252989A JP H0252989 A JPH0252989 A JP H0252989A JP 20197288 A JP20197288 A JP 20197288A JP 20197288 A JP20197288 A JP 20197288A JP H0252989 A JPH0252989 A JP H0252989A
- Authority
- JP
- Japan
- Prior art keywords
- tube
- heat exchanger
- heat
- heat transfer
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims abstract description 17
- 238000001816 cooling Methods 0.000 claims abstract description 13
- 239000012530 fluid Substances 0.000 claims description 19
- 239000007788 liquid Substances 0.000 claims description 13
- 229920005597 polymer membrane Polymers 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 238000007872 degassing Methods 0.000 claims description 6
- 239000004033 plastic Substances 0.000 claims description 3
- 238000009849 vacuum degassing Methods 0.000 claims description 2
- 238000001311 chemical methods and process Methods 0.000 abstract description 4
- 239000000498 cooling water Substances 0.000 abstract description 2
- 239000008236 heating water Substances 0.000 abstract description 2
- 239000012528 membrane Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/02—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
- F28D7/024—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled the conduits of only one medium being helically coiled tubes, the coils having a cylindrical configuration
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、メツキ液、有機、無機、薬液、溶剤。[Detailed description of the invention] [Industrial application field] The present invention applies to plating liquids, organic, inorganic, chemical solutions, and solvents.
食品用液などケミカルプロセスに用いられる液体を、伝
熱管を置いて温度差のある二流体間例えば高温流体と低
温流体との間に熱の授受を行わせて熱回収若しくは放熱
などに用いられる熱交換器に関するものである。Heat transfer between liquids used in chemical processes, such as food-grade liquids, is performed between two fluids with a temperature difference, such as a high-temperature fluid and a low-temperature fluid, for heat recovery or heat dissipation. It concerns exchangers.
従来の熱交換器では、チューブ状の伝熱管が多管式に端
板にそれぞれ接合されて各管壁を経て温度差のある二流
体間に熱を伝熱させて、熱交換さ廿うる熱媒体の流路が
伝熱管の内外に構成されている。In conventional heat exchangers, tubular heat transfer tubes are connected to end plates in a multitubular manner, and heat is transferred between two fluids with a temperature difference through the walls of each tube. A medium flow path is configured inside and outside the heat transfer tube.
ところが、この熱交換器では伝熱管を経て熱伝達させて
熱交換させるだけとなり、無電解メツキなどのプロセス
液では含有される気泡（酸素）によって活性劣化するば
かりか、ケミカルプロセス又は超純水などの液中に約０
．１μ位の気泡が混入しても液中パーチクルカウンタ等
では計測しずらくなって制御系に支障を来すなど問題が
あった。However, this heat exchanger only performs heat exchange by transferring heat through heat transfer tubes, and in process liquids such as electroless plating, it not only deteriorates in activity due to the bubbles (oxygen) contained in it, but also Approximately 0 in the liquid
．． Even if air bubbles of about 1 micron were mixed in, it would be difficult to measure them using a submerged particle counter or the like, causing problems such as problems with the control system.
本発明では、これら従来の欠点を排除しようとするもの
で熱交換機能と脱気機能とを兼ね備え、ケミカルプロセ
スの処理を安全でかつ効果的に行いうる熱交換器を構成
簡単で安価な形態で提供しようとすることを目的とした
ものである。The present invention aims to eliminate these conventional drawbacks by providing a heat exchanger that has both heat exchange and degassing functions and is capable of safely and effectively performing chemical processes, with a simple and inexpensive configuration. It is intended to provide.
本発明は、温度差のある二流体間で熱の授受を行わせる
チューブ状の伝熱管をチューブプレート或いはチューブ
ヘッダに備えた熱交換器において、前記伝熱管が通気性
で可撓性のチューブであって、該チューブを介して脱気
用の真空チャンバーと加熱冷却用チャンバーとを備えた
ことを特徴とする熱交換器である。The present invention provides a heat exchanger in which a tube plate or a tube header is equipped with a tube-shaped heat transfer tube for transferring heat between two fluids having a temperature difference, wherein the heat transfer tube is an air-permeable and flexible tube. The heat exchanger is characterized in that it includes a vacuum chamber for degassing and a chamber for heating and cooling via the tube.
本発明の熱交換器では、真空チャンバー３が真空ポンプ
などの真空ｔＡ３１で負圧として伝熱管ｌに添って流過
するプロセス流体通路６中にプロセス液から内側伝熱管
１の高分子膜管壁を経て気泡を真空チャンバー３へ吸引
回収し脱気する。−労咳伝熱管１の外周側にあるプロセ
ス流体通路６の高分子膜の外側伝熱管１の管壁を経て該
管壁に添って流れる冷水又は温水とで熱交換させ、プロ
セス液の冷却或いは加温しつつ、さらに脱気処理されて
安全に用いられるものである。In the heat exchanger of the present invention, the vacuum chamber 3 uses a vacuum tA31 such as a vacuum pump to provide negative pressure from the process liquid to the polymer membrane tube wall of the inner heat exchanger tube 1 into the process fluid passage 6 which flows along the heat exchanger tube 1. After that, the air bubbles are sucked and collected into the vacuum chamber 3 and degassed. - Cooling or heating of the process liquid by exchanging heat with cold water or hot water flowing along the tube wall of the outer heat transfer tube 1 through the tube wall of the polymer membrane of the process fluid passage 6 on the outer circumferential side of the heat transfer tube 1 It is heated and degassed for safe use.
本発明を実施例につき第１図乃至第４図例で説明すると
、プロセス流体を流入又は流過させうるチューブ状の伝
熱管１．１１が、その一端を取付端部としてチューブプ
レート４あるいはチューブ。The present invention will be described with reference to FIGS. 1 to 4. A tubular heat transfer tube 1.11 through which a process fluid can flow in or through is attached to a tube plate 4 or a tube with one end thereof as a mounting end.
ヘッダに接合させ、温度差のある二流体間で熱の授受を
行わせるように加熱冷却用チャンバー５を区画してケー
ス２に備えた熱交換器において、前記伝熱管ｌ、１１が
通気性で可ＩＱ性のチ二−プであって、該チューブを介
して脱気用の真空チャンバー３と加熱冷却用チャンバー
５とを備えて熱交換器としである。In a heat exchanger that is connected to a header and is provided in a case 2 with a heating and cooling chamber 5 partitioned so as to transfer heat between two fluids having a temperature difference, the heat transfer tubes l and 11 are air permeable. It is a heat exchanger equipped with a vacuum chamber 3 for degassing and a chamber 5 for heating and cooling via the tube.
この場合、前記伝熱管１にはプロセス液流入口１１及び
流出口１２とを備え、加熱・冷却用水流入口２１及び流
出口２２のあるケース２との間に加熱冷却用チャンバー
５を区画形成すると共に、高分子膜の伝熱管りで前記プ
ロセス流体通路６の中に前記真空チャンバー３を区画配
備して構成され、該真空チャンバー３は真空ポンプの真
空源３、に連絡されている。また、伝熱管１の端末はフ
ランジ部を介して端板７で締結し、シール部材１３．１
４で密封構造にしである（第２図）。さらに前記プロセ
ス流体通路６はプロセス液タンク９からポンプ１０で流
入口１１に連絡して給液したとき、脱気用の伝熱管ｌ、
の表面積０．１８ｍとその効率は流量に対して第４図の
如くなる。In this case, the heat transfer tube 1 is provided with a process liquid inlet 11 and an outlet 12, and a heating/cooling chamber 5 is defined between it and the case 2 having a heating/cooling water inlet 21 and an outlet 22. In addition, the vacuum chamber 3 is divided into the process fluid passage 6 by a heat transfer pipe made of a polymer membrane, and the vacuum chamber 3 is connected to a vacuum source 3 of a vacuum pump. Further, the end of the heat exchanger tube 1 is fastened with the end plate 7 via the flange portion, and the sealing member 13.1
4 is the sealing structure (Figure 2). Furthermore, when the process fluid passage 6 connects the process fluid tank 9 to the inlet 11 by the pump 10 and supplies the fluid, the process fluid passage 6 includes a heat exchanger tube l for deaeration,
The surface area of 0.18 m and its efficiency with respect to flow rate are as shown in Fig. 4.
即ち、前記伝熱管１．ｌ、が、脱気熱交換可能の高分子
膜、例えば熱を管壁に経て伝達でき、かつ空気が過もで
きるテフロン（商標）、ポリカーボネート、ポリプロピ
レン、ポリエステル、シリコーンなどの高分子のプラス
チ、り製チューブを用いであるが、第５〜７図のように
政商分子膜チューブを多数平行に配列し、チューブプレ
ートに集束したハニカム構造としてもよい。That is, the heat exchanger tube 1. l, is a degassed heat exchangeable polymeric membrane, such as a polymeric plastic membrane such as Teflon (trademark), polycarbonate, polypropylene, polyester, silicone, etc., which can transfer heat through the tube wall and also allow air to pass through. Although a manufactured tube is used, a honeycomb structure in which a large number of political and commercial molecular membrane tubes are arranged in parallel and converged on a tube plate as shown in FIGS. 5 to 7 may be used.
なお、前記伝熱管のプラスチック製チューブでは加熱・
加圧によって高分子膜チューブ端末とスリーブとの一体
成形が行われ、該チューブの管壁内外に温水、冷水を流
過させて熱交換させると同時に水中の気泡を該チューブ
の管壁を通して真空チャンバー３へ脱気するもので、前
記熱交換用の伝熱管１が、蛇腹形態で伝熱面積を大きく
して管状ケース内に配備され、該伝熱管１中に真空源３
に連絡した脱気用高分子膜チューブの伝熱管１を内装し
て内外三重管構造としであるが、第８図例のように、同
心円状の伝熱管１．１＋をケース２内に装備したり、第
９図例のように伝熱管１の内部に加熱冷却用の流体を通
過させて真空チャンバー３を最外周側に形成し、両者間
にプロセス流体通路を形成してもよいし、第１０ｒ２の
ように、前記伝熱管が、高分子膜チューブで内部にプロ
セス液を流過させるものであって、熱交換ゾーンとなる
加熱冷却用チャンバー５と真空脱気ゾーンとなるプロセ
ス流体通路６とに仕切壁８で区画されたケース２中に配
備させた熱交換器と、してもよい。In addition, the plastic tube of the heat exchanger tube cannot be heated or
The end of the polymer membrane tube and the sleeve are integrally formed by pressurization, and hot water and cold water are passed inside and outside the tube wall to exchange heat, and at the same time, air bubbles in the water are passed through the tube wall into a vacuum chamber. The heat exchanger tube 1 is arranged in a tubular case with a bellows-shaped heat transfer area to enlarge the heat transfer area, and a vacuum source 3 is installed inside the heat exchanger tube 1.
The heat exchanger tube 1, which is a polymer membrane tube for degassing, is installed inside the case to create a triple-tube structure inside and outside, but as shown in the example in Fig. 8, a concentric heat exchanger tube 1.1+ is installed inside the case 2. Alternatively, as shown in the example in FIG. 9, a heating and cooling fluid may be passed through the inside of the heat transfer tube 1 to form the vacuum chamber 3 on the outermost side, and a process fluid passage may be formed between the two. 10r2, the heat transfer tube is a polymer membrane tube through which the process liquid flows, and includes a heating/cooling chamber 5 serving as a heat exchange zone and a process fluid passage 6 serving as a vacuum degassing zone. A heat exchanger may be installed in the case 2 partitioned by a partition wall 8.
なお、前記加熱冷却用チャンバー５に流入させる加熱流
体としては、蒸気、温水、Ａ風が用いられ、また冷却媒
体としては水道水冷媒などが選んで用いられる。Note that steam, hot water, or A-air may be used as the heating fluid flowing into the heating/cooling chamber 5, and tap water refrigerant or the like may be selected as the cooling medium.
本発明は、伝熱管が通気性で可撓性のチューブであって
、該チューブを介して脱気用の真空チャンバーと加熱冷
却用チャンバーとを備えたことにより、ケミカルプロセ
ス液の温度調整が容易で、かつ液中に含有される気泡の
排除をも適確に行え、プロセス液の劣化防止に役立つと
ともに、制御系の計測誤差による支障もなく、安全な運
転処理が可能であって、熱交換器として性能をも著しく
向上できるほか、保安管理面もらくで、常時熱交換率も
良好に保つことが容易に可能で保守も闇便であるなどの
実用上の効果がある。In the present invention, the heat transfer tube is an air permeable and flexible tube, and the temperature of the chemical process liquid can be easily adjusted by providing a vacuum chamber for degassing and a chamber for heating and cooling through the tube. It is also possible to accurately eliminate air bubbles contained in the liquid, which helps prevent deterioration of the process liquid, and allows safe operation without problems caused by measurement errors in the control system. In addition to being able to significantly improve the performance of the device, it also has practical benefits such as ease of security management, the ability to easily maintain a good heat exchange rate at all times, and maintenance being unnecessary.
図面は、本発明の実施例を示し、第１図は縦断面図、第
２図は一部の拡大切断側面図、第３図は系統説明図、第
４図は効率と流量との関係線間、第５図は他の実施例の
斜視図、第６図は他の実施例一部切欠側面図、第７図は
一部切欠正面図、第８図乃至第１０図はそれぞれ他の実
施例の一部切欠側面図である。
１．１．・・・伝熱管、２・・・ケース、３・・・真空
チャンバー、３Ｉ・・・真空源、４・・・チューブプレ
ート、５・・・加熱冷却用チャンバー、６・・・プロセ
ス流体通路、７・・・端板、１１・・・流入口、１２・
・・流出口。
第１因
第２図
汎ｉ ＜ＣＣ７’ｍ ｉｎ ）The drawings show an embodiment of the present invention; FIG. 1 is a longitudinal cross-sectional view, FIG. 2 is a partially enlarged cutaway side view, FIG. 3 is a system explanatory diagram, and FIG. 4 is a relationship line between efficiency and flow rate. Fig. 5 is a perspective view of another embodiment, Fig. 6 is a partially cutaway side view of another embodiment, Fig. 7 is a partially cutaway front view, and Figs. 8 to 10 are respectively other embodiments. It is a partially cutaway side view of an example. 1.1. ... Heat exchanger tube, 2 ... Case, 3 ... Vacuum chamber, 3I ... Vacuum source, 4 ... Tube plate, 5 ... Heating and cooling chamber, 6 ... Process fluid passage, 7... End plate, 11... Inlet, 12.
... Outlet. 1st factor diagram 2 general i <CC7'min)
Claims (5)
ーブ状の伝熱管をチューブプレート或いはチューブヘッ
ダに備えた熱交換器において、前記伝熱管が通気性で可
撓性のチューブであって、該チューブを介して脱気用の
真空チャンバーと加熱冷却用チャンバーとを備えたこと
を特徴とする熱交換器。(1) In a heat exchanger in which a tube plate or a tube header is equipped with a tube-shaped heat transfer tube that transfers heat between two fluids having a temperature difference, the heat transfer tube is an air-permeable and flexible tube. A heat exchanger comprising a vacuum chamber for degassing and a chamber for heating and cooling via the tube.
り、該高分子膜チューブを多数平行に配列し、チューブ
プレートに集束したハニカム構造となっていることを特
徴とする熱交換器。(2) The heat exchanger is characterized in that the heat transfer tube is made of a polymer membrane capable of deaeration heat exchange, and has a honeycomb structure in which a large number of the polymer membrane tubes are arranged in parallel and converged on a tube plate. vessel.
加圧によって高分子膜チューブ端末とスリーブとの一体
成形が行われ、該チューブの管壁内外に温水、冷水を流
過させて熱交換させると同時に水中の気泡を該チューブ
の管壁を通して真空チャンバーへ脱気するものである請
求項第１又は第２記載の熱交換器。(3) The heat transfer tube is heated with a plastic tube.
The end of the polymer membrane tube and the sleeve are integrally formed by pressurization, and hot water and cold water are passed inside and outside the tube wall to exchange heat, and at the same time, air bubbles in the water are passed through the tube wall into a vacuum chamber. The heat exchanger according to claim 1 or 2, wherein the heat exchanger degasses the heat exchanger.
ース内に配備され、該伝熱管中に真空部に連絡した脱気
用高分子膜チューブを内装して内外三重管構造とした請
求項第２又は第３記載の熱交換器。(4) The heat exchanger tube is arranged in a bellows shape in a tubular pressure case, and a deaeration polymer membrane tube connected to the vacuum section is installed inside the heat exchanger tube to create a triple-tube structure inside and outside. A heat exchanger according to claim 2 or 3.
ス液を流過させるものであって、熱交換ゾーンと真空脱
気ゾーンとに区画されたケース中に配備されていること
を特徴とする熱交換器。(5) The heat transfer tube is a polymer membrane tube through which a process liquid flows, and is arranged in a case divided into a heat exchange zone and a vacuum degassing zone. heat exchanger.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20197288A JPH0252989A (en) | 1988-08-15 | 1988-08-15 | Heat exchanger |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20197288A JPH0252989A (en) | 1988-08-15 | 1988-08-15 | Heat exchanger |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252989A true JPH0252989A (en) | 1990-02-22 |
Family
ID=16449814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20197288A Pending JPH0252989A (en) | 1988-08-15 | 1988-08-15 | Heat exchanger |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252989A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001070366A1 (en) * | 2000-03-22 | 2001-09-27 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Deaerator and deaerating method |
| JP2013069949A (en) * | 2011-09-26 | 2013-04-18 | Tokyo Electron Ltd | Liquid processing apparatus |
-
1988
- 1988-08-15 JP JP20197288A patent/JPH0252989A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001070366A1 (en) * | 2000-03-22 | 2001-09-27 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Deaerator and deaerating method |
| JP2013069949A (en) * | 2011-09-26 | 2013-04-18 | Tokyo Electron Ltd | Liquid processing apparatus |
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