JPH0253185B2 - - Google Patents
Info
- Publication number
- JPH0253185B2 JPH0253185B2 JP58057000A JP5700083A JPH0253185B2 JP H0253185 B2 JPH0253185 B2 JP H0253185B2 JP 58057000 A JP58057000 A JP 58057000A JP 5700083 A JP5700083 A JP 5700083A JP H0253185 B2 JPH0253185 B2 JP H0253185B2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- workpieces
- work
- belt conveyor
- guides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000032258 transport Effects 0.000 claims description 12
- 238000000034 method Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Feeding Of Workpieces (AREA)
- Multi-Process Working Machines And Systems (AREA)
- General Factory Administration (AREA)
- Sorting Of Articles (AREA)
Description
【発明の詳細な説明】
この発明は加工装置に係り、詳しくは複数の工
作機械を具備し、形状の異なる被工作物を適宜選
択して前記工作機械に供給することができる加工
装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a processing device, and more particularly to a processing device that is equipped with a plurality of machine tools and can appropriately select workpieces of different shapes and supply them to the machine tools.
近年、複数の工作機械を連係して自動制御する
とともに、各工作機械へ形状の異なる被加工物
（ワーク）を夫々自動供給する加工装置が開発さ
れている。そして、このような加工装置において
は供給されるワークの種類、形状、加工工程に応
じてワークを選別し、選別したワークを所望の工
作機械に供給するワーク選別搬送部が設けられ
る。ところで、従来のワーク選別搬送部はワーク
もしくはワークが載置されるプレート等に予め選
別用のマークを付し、このマークを検出、解析し
て前記ワークの加工を行う工作機械を割り出すと
いう構成をとつていた。したがつて、ワーク等に
いちいちマークを付さなければならない面倒があ
るとともに、マークの検出、解析および工作機械
の割り出しを行う回路等の構成が複雑になる欠点
があつた。 In recent years, processing devices have been developed that link and automatically control a plurality of machine tools and that automatically supply workpieces of different shapes to each machine tool. Such a processing device is provided with a workpiece sorting and conveying section that sorts the workpieces according to the type, shape, and processing step of the supplied workpieces, and supplies the sorted workpieces to a desired machine tool. By the way, conventional workpiece sorting and conveyance units have a structure in which a sorting mark is attached in advance to the workpiece or a plate on which the workpiece is placed, and the mark is detected and analyzed to determine the machine tool that will process the workpiece. It was clear. Therefore, it is troublesome to mark each workpiece, etc., and the configuration of circuits for detecting and analyzing the marks and indexing the machine tool becomes complicated.
この発明は上述した事情に鑑み、ワーク等にマ
ークを付す必要がなく、しかも、装置全体の構成
を簡略化でき、調整が容易で安価に製作すること
ができる加工装置を提供するもので、被加工物を
所定の搬送路に沿つて搬送する搬送部を設けると
ともに、前記搬送路上の被加工物のうち所定の高
さ以上の高さを有する被加工物を前記搬送路のど
ちらか一方の側部へ案内し、所定の高さ以下の高
さを有する被加工物をそのまま通過させるワーク
ガイドを前記搬送路に沿つて複数設け、前記各ワ
ークガイドにより前記被加工物を振り分けて選別
することを特徴としている。 In view of the above-mentioned circumstances, it is an object of the present invention to provide a processing device that does not require marks on workpieces, etc., can simplify the overall configuration of the device, is easy to adjust, and can be manufactured at low cost. A transport unit is provided to transport the workpiece along a predetermined transport path, and a workpiece having a height equal to or higher than a predetermined height among the workpieces on the transport path is moved to either side of the transport path. A plurality of workpiece guides are provided along the conveyance path, and the workpieces are sorted and sorted by each of the workpiece guides. It is a feature.
以下図面を参照してこの発明の実施例について
説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図はこの発明の一実施例の構成を示す平面
図である。 FIG. 1 is a plan view showing the configuration of an embodiment of the present invention.
図において１はワーク等を実線矢印方向に搬送
するベルトコンベアであり、このベルトコンベア
１の側方に数値制御旋盤（以下NC旋盤と称す）
２〜４が１列に配置されている。ベルトコンベア
１とNC旋盤２〜４との間には多軸型工業用ロボ
ツト５〜７が各々設けられており、このロボツト
５〜７はアーム５ａ，５ｂ，６ａ，６ｂ，７ａ，
７ｂおよびハンド５ｃ，６ｃ，７ｃを各々適宜旋
回、伸縮あるいは開閉することにより、NC旋盤
２〜４のチヤツク２ａ〜４ａに加工前のワークを
搬送し、また、加工後のワークをチヤツク２ａ〜
４ａからベルトコンベア１へ搬送する。８はロボ
ツト５の近傍に設けられている素材用コンベアで
あり、未加工ワーク９，９…とNC旋盤２で用い
られる工具１０，１０…とを各々楕円状の搬送路
に沿つて循環させている。また、ベルトコンベア
１の両側に近接して枠１２，１３が設けられてお
り、枠１２にはコンベア１上のワーク９を枠１３
側へ案内するワークガイド１４ａ，１４ｂおよび
ワーク９をベルトコンベア１上から取り込んだ
り、ベルトコンベア１上に搬出したりするワーク
入出部１５ａ，１５ｂが設けられ、枠１３にはワ
ーク９を枠１２側へ案内するワークガイド１４
ｃ，１４ｄが設けられている。また、ベルトコン
ベア１の搬送方向最終端には加工の終了したワー
クが搬入される台１８が設けられている。ここ
で、ワークガイド１４ａ〜１４ｄを左方から見た
場合の側面図を第２図イ〜ニに各々示す。この図
に示すようにワークガイド１４ａ〜１４ｄは各々
枠１２もしくは１３からベルトコンベア１の幅方
向中央部に延びる板状の部材で構成され、ベルト
コンベア１の上面とワークガイド１４ａ〜１４ｄ
の各下端との距離は各々d1，d2，d2，d1となつて
いる。この場合、距離d1，d2は各々５mmおよび30
mm程度に設定されている。したがつて、ベルトコ
ンベア１の上面からの高さが５mm以上30mm以下の
ワークは、ワークガイド１４ａ，１４ｄには案内
されるが、ワークガイド１４ｂ，１４ｃには案内
されずに素通りし、高さが30mm以上のワークはす
べてのワークガイド１４ａ〜１４ｄによつて案内
される。次に、ワーク入出部１５ａについて説明
する。第３図はワーク入出部１５ａの平面図であ
り、この図において２０ａは長方形状のプレート
である。このプレート２０ａ上には軸２１ａを中
心にして回動する略Ｖ字状のレバー２２ａが設け
られており、レバー２２ａの一方の端部２２ａ−
１には凹部２３ａが形成され、レバー２２ａの他
方の端部２２ａ−２には搬送されるワーク９を受
け止める受部２４ａと、ワーク９が受部２４ａに
確実に受け止められた時にONとなるリミツトス
イツチ２５ａとが設けられている。この場合、受
部２４ａに受け止められたワーク９はレバー２２
ａが矢印Ａ方向に回動することにより、ワーク止
め部材２６ａに当接するまで搬送され、部分Ｂに
達する。この部分Ｂにはプレート２０ａの下面側
から光を照射する反射型フオトセンサ２７ａが設
けられてり、このフオトセンサ２７ａの出力信号
により部分Ｂにワーク９があるか否かが検出でき
るようになつている。そして、部分Ｂに載置され
たワーク９はロボツト６によつてNC旋盤３のチ
ヤツク３ａまで搬送され、このチヤツク３ａに把
持されて加工される。また、NC旋盤３による加
工が終了したワーク９はロボツト６によつてチヤ
ツク３ａから部分Ｃまで搬送され、部分Ｃに載置
されたワーク９はレバー２２ａが回動した際にベ
ルトコンベア１上に搬出される。なお、第１図に
示すワーク入出部１５ｂは上述したワーク入出部
１５ａとまつたく同様であるので、その説明を省
略するが、対応する構成要素にはサフイツクスｂ
が付してある。なお、上述した構成におけるベル
トコンベア１、枠１２，１３、ワークガイド１４
ａ〜１４ｄおよびワーク入出部１５ａ，１５ｂに
よりワーク選別搬送部１９が構成されている。 In the figure, 1 is a belt conveyor that conveys workpieces, etc. in the direction of the solid line arrow, and a numerically controlled lathe (hereinafter referred to as an NC lathe) is installed on the side of this belt conveyor 1.
2 to 4 are arranged in one row. Multi-axis industrial robots 5-7 are provided between the belt conveyor 1 and the NC lathes 2-4, respectively, and the robots 5-7 have arms 5a, 5b, 6a, 6b, 7a,
7b and hands 5c, 6c, and 7c as appropriate, respectively, by rotating, extending/contracting, or opening/closing, unprocessed workpieces are transferred to the chucks 2a to 4a of the NC lathes 2 to 4, and processed workpieces are transferred to the chucks 2a to 4a of the NC lathes 2 to 4.
4a to the belt conveyor 1. Reference numeral 8 denotes a material conveyor installed near the robot 5, which circulates unprocessed workpieces 9, 9... and tools 10, 10... used in the NC lathe 2 along an elliptical conveyance path. There is. Further, frames 12 and 13 are provided adjacent to both sides of the belt conveyor 1, and the workpieces 9 on the conveyor 1 are placed in the frame 12.
Workpiece guides 14a, 14b for guiding the workpiece 9 to the side and workpiece entry/exit sections 15a, 15b for taking in the workpiece 9 from above the belt conveyor 1 and carrying it out onto the belt conveyor 1 are provided, Work guide 14 that guides you to
c, 14d are provided. Furthermore, a table 18 is provided at the final end of the belt conveyor 1 in the conveyance direction, onto which the processed workpiece is carried. Here, side views of the work guides 14a to 14d viewed from the left are shown in FIGS. 2A to 2D, respectively. As shown in this figure, each of the work guides 14a to 14d is composed of a plate-shaped member extending from the frame 12 or 13 to the widthwise center of the belt conveyor 1, and the work guides 14a to 14d are connected to the upper surface of the belt conveyor 1.
The distances from the lower ends of are d 1 , d 2 , d 2 , and d 1 , respectively. In this case, the distances d 1 and d 2 are 5 mm and 30 mm, respectively.
It is set to about mm. Therefore, a work whose height from the top surface of the belt conveyor 1 is 5 mm or more and 30 mm or less is guided by the work guides 14a and 14d, but passes through without being guided by the work guides 14b and 14c, and the height increases. Workpieces with a diameter of 30 mm or more are guided by all workpiece guides 14a to 14d. Next, the work entry/exit section 15a will be explained. FIG. 3 is a plan view of the work entry/exit section 15a, and in this figure, 20a is a rectangular plate. A substantially V-shaped lever 22a that rotates around a shaft 21a is provided on the plate 20a, and one end 22a-
1 is formed with a recess 23a, and the other end 22a-2 of the lever 22a has a receiving part 24a for receiving the workpiece 9 being conveyed, and a limit switch that is turned ON when the workpiece 9 is securely received by the receiving part 24a. 25a is provided. In this case, the workpiece 9 received by the receiving part 24a is held by the lever 22.
When a rotates in the direction of arrow A, it is conveyed until it comes into contact with the work stopper member 26a, and reaches part B. A reflective photo sensor 27a that irradiates light from the lower surface side of the plate 20a is provided in this portion B, and it is possible to detect whether or not there is a workpiece 9 in the portion B based on the output signal of this photo sensor 27a. . The workpiece 9 placed on the portion B is conveyed by the robot 6 to the chuck 3a of the NC lathe 3, and is gripped by the chuck 3a and processed. Further, the workpiece 9 that has been processed by the NC lathe 3 is transported from the chuck 3a to the section C by the robot 6, and the workpiece 9 placed on the section C is transferred onto the belt conveyor 1 when the lever 22a rotates. It will be carried out. Note that the workpiece input/output section 15b shown in FIG.
is attached. Note that the belt conveyor 1, frames 12, 13, and work guide 14 in the above-described configuration
A to 14d and the workpiece input/output sections 15a and 15b constitute a workpiece sorting and conveyance section 19.
次にこの実施例の動作を第１図および第３図を
参照して説明する。 Next, the operation of this embodiment will be explained with reference to FIGS. 1 and 3.
まず、ロボツト５が所定のプログラムに従つて
種々の大きさの未加工ワーク９を把んでチヤツク
２ａまで搬送し、また、NC旋盤２による加工が
終了したワーク９をベルトコンベア１上に搬送す
る。そして、ベルトコンベア１上に載置されたワ
ーク９はワークガイド１４ａによつて枠１３側に
寄せられてワークガイド１４ｃの位置に達する。
このワークガイド１４ｃの位置に達したワーク９
のうち形状の大きなものは枠１２側に寄せられ、
形状の小さなものはワークガイド１４ｃの下方を
通過して枠１２側の位置を保持する。なお、以後
説明のために形状の大きなワーク９にはサフイツ
クスａを付し、形状の小さなワーク９にはサフイ
ツクスｂを付す。次に、枠１２側に寄せられたワ
ーク９ａはレバー２２ａの受部２４ａ（第３図）
に当接してリミツトスイツチ２５ａにより検知さ
れる。そして、ワーク入出部１５ａは部分Ｂにワ
ークがないことをフオトセンサ２７ａの出力信号
に基づいて確認した後、レバー２２ａを回動させ
てワーク９ａをワーク止め部材２６ａまで搬送す
る。この時、部分ＣにNC旋盤３から加工の終了
したワーク９ａが搬送されていた場合は、このワ
ーク９ａがベルトコンベア１上に搬出される。一
方、ワークガイド１４ｃの下方を通過したワーク
９ｂは、レバー２２ａには接触せずにワークガイ
ド１４ｄの位置に達し、このワークガイド１４ｄ
により枠１２側に寄せられる。したがつて、ワー
クガイド１４ｄを過ぎた時点ではワーク９ａと９
ｂとは共に枠１２側にある。そして、ワーク９
ａ，９ｂがワークガイド１４ｂの位置に達する
と、ワーク９ａは枠１３側に寄せられ、ワーク９
ｂはワークガイド１４ｂの下方を通過して枠１２
側の位置を保持する。このワークガイド１４ｂの
下方を通過したワーク９ｂはレバー２２ｂに当接
し、ワーク入出部１５ｂは前述したワーク入出部
１５ａと同様の動作を行つてワーク９ｂをワーク
止め部材２６ｂまで搬送するとともに、部分Ｃ
（第３図）にNC旋盤４から加工の終了したワー
ク９ｂが搬送されていた場合は、このワーク９ｂ
をベルトコンベア１上に搬出する。そして、ワー
ク入出部１５ｂによつてベルトコンベア１上に搬
出されたワーク９ｂはそのまま搬送されて台１８
に達し、一方、ワークガイド１４ｂにより枠１３
側に寄せられたワーク９ａはレバー２２ｂには接
触せずに、枠１３側の位置のまま台１８まで搬送
される。 First, the robot 5 grasps unprocessed workpieces 9 of various sizes and transports them to the chuck 2a according to a predetermined program, and also transports the workpieces 9 that have been processed by the NC lathe 2 onto the belt conveyor 1. The work 9 placed on the belt conveyor 1 is moved toward the frame 13 by the work guide 14a and reaches the position of the work guide 14c.
Work 9 that has reached the position of this work guide 14c
Among them, the larger ones are moved to the frame 12 side,
Smaller shapes pass under the work guide 14c and are held in position on the frame 12 side. Hereinafter, for the sake of explanation, a large-shaped workpiece 9 will be labeled with a suffix a, and a small-shaped workpiece 9 will be labeled with a suffix b. Next, the workpiece 9a brought to the side of the frame 12 is moved to the receiving part 24a of the lever 22a (FIG. 3).
is detected by the limit switch 25a. Then, after confirming that there is no work in part B based on the output signal of the photo sensor 27a, the work entry/exit section 15a rotates the lever 22a to transport the work 9a to the work stopping member 26a. At this time, if a workpiece 9a that has been machined has been conveyed to part C from the NC lathe 3, this workpiece 9a is conveyed onto the belt conveyor 1. On the other hand, the workpiece 9b that has passed below the workpiece guide 14c reaches the position of the workpiece guide 14d without contacting the lever 22a, and this workpiece guide 14d
It is moved toward the frame 12 side. Therefore, after passing the work guide 14d, the works 9a and 9
b and are both on the frame 12 side. And work 9
When a and 9b reach the position of the work guide 14b, the work 9a is moved to the frame 13 side, and the work 9
b passes below the work guide 14b and the frame 12
Hold side position. The workpiece 9b that has passed below the workpiece guide 14b comes into contact with the lever 22b, and the workpiece input/output section 15b performs the same operation as the workpiece input/output section 15a described above to transport the workpiece 9b to the workpiece stopping member 26b, and
(Fig. 3), if the workpiece 9b that has been machined is being transported from the NC lathe 4, this workpiece 9b
is carried out onto belt conveyor 1. Then, the workpiece 9b carried out onto the belt conveyor 1 by the workpiece input/output section 15b is transported as it is to the table 18.
On the other hand, the frame 13 is moved by the work guide 14b.
The workpiece 9a that has been moved to the side is transported to the stand 18 while remaining on the frame 13 side without contacting the lever 22b.
このようにこの実施例においてはワークガイド
１４ａ〜１４ｄによつて、ワーク９が大きさ別に
振り分け選別されるので、NC旋盤２で一次加工
されたワーク９が、NC旋盤３，４へ夫々選別供
給され、したがつて、形状の異なるワークを同一
のラインで加工することができる。 In this embodiment, the workpieces 9 are sorted and sorted by size by the workpiece guides 14a to 14d, so that the workpieces 9 that have been primarily machined by the NC lathe 2 are sorted and supplied to the NC lathes 3 and 4, respectively. Therefore, workpieces with different shapes can be processed on the same line.
以上説明したようにこの発明によれば、被加工
物を所定の搬送路に沿つて搬送する搬送部を設け
るとともに、前記搬送路上の被加工物のうち所定
の高さ以上の高さを有する被加工物を前記搬送路
のどちらか一方の側部へ案内し、所定の高さ以下
の高さを有する被加工物をそのまま通過させるワ
ークガイドを前記搬送路に沿つて複数設け、前記
各ワークガイドにより前記被加工物を振り分けて
選別するようにしたので、選別のためにワーク等
にマークを付す必要がなく、しかも、ワークガイ
ドを設けるだけで選別を行うことができるから装
置全体での構成を簡略化することができる。 As explained above, according to the present invention, there is provided a conveyance unit that conveys the workpiece along a predetermined conveyance path, and among the workpieces on the conveyance path, the workpiece has a height equal to or higher than the predetermined height. A plurality of work guides are provided along the conveyance path to guide the workpiece to either side of the conveyance path and allow workpieces having a height below a predetermined height to pass through as they are, and each of the workpiece guides is provided along the conveyance path. Since the workpieces are sorted by sorting, there is no need to mark the workpieces, etc. for sorting.Furthermore, since the workpieces can be sorted simply by providing a work guide, the overall configuration of the apparatus can be simplified. It can be simplified.
第１図はこの発明の一実施例の構成を示す平面
図、第２図イ〜ニは各々第１図に示すワークガイ
ド１４ａ〜１４ｄの側面図、第３図は第１図に示
すワーク入出部１５ａの構成を示す平面図であ
る。
１……ベルトコンベア（搬送部、搬送路）、２，
３，４……NC旋盤装置（工作機械）、１４ａ〜
１４ｄ……ワークガイド。
FIG. 1 is a plan view showing the configuration of an embodiment of the present invention, FIGS. 2A to 2D are side views of the workpiece guides 14a to 14d shown in FIG. 1, respectively, and FIG. It is a top view which shows the structure of part 15a. 1... Belt conveyor (conveyance section, conveyance path), 2,
3, 4...NC lathe device (machine tool), 14a~
14d...Work guide.
Claims (1)
なる被加工物を適宜選別して前記各工作機械へ供
給する加工装置において、前記被加工物を所定の
搬送路に沿つて搬送する搬送部を設けるととも
に、前記搬送路上の被加工物のうち所定の高さ以
上の高さを有する被加工物を前記搬送路のどちら
か一方の側部へ案内し、所定の高さ以下の高さを
有する被加工物をそのまま通過させるワークガイ
ドを前記搬送路に沿つて複数設け、前記各ワーク
ガイドにより前記被加工物を振り分けて選別する
ことを特徴とする加工装置。1. A processing device that has a plurality of machine tools and that appropriately sorts workpieces of different shapes and supplies them to each of the machine tools, is provided with a transport section that transports the workpieces along a predetermined transport path, and , among the workpieces on the conveyance path, the workpieces having a height above a predetermined height are guided to either side of the conveyance path, and the workpieces having a height below the predetermined height are guided. A processing apparatus characterized in that a plurality of work guides are provided along the conveyance path through which the objects pass through, and the workpieces are distributed and sorted by each of the work guides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58057000A JPS59187442A (en) | 1983-04-01 | 1983-04-01 | Working apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58057000A JPS59187442A (en) | 1983-04-01 | 1983-04-01 | Working apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59187442A JPS59187442A (en) | 1984-10-24 |
| JPH0253185B2 true JPH0253185B2 (en) | 1990-11-15 |
Family
ID=13043211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58057000A Granted JPS59187442A (en) | 1983-04-01 | 1983-04-01 | Working apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59187442A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7117876B2 (en) | 1996-09-30 | 2006-10-10 | Akrion Technologies, Inc. | Method of cleaning a side of a thin flat substrate by applying sonic energy to the opposite side of the substrate |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0822492B2 (en) * | 1986-12-26 | 1996-03-06 | 松下電器産業株式会社 | Printed circuit board storage box transportation method |
| JP5221017B2 (en) * | 2005-09-27 | 2013-06-26 | 株式会社安川電機 | Transport system |
| JP7743113B1 (en) * | 2024-08-02 | 2025-09-24 | 株式会社アイファーム | Sorting and transporting equipment for processed objects |
-
1983
- 1983-04-01 JP JP58057000A patent/JPS59187442A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7117876B2 (en) | 1996-09-30 | 2006-10-10 | Akrion Technologies, Inc. | Method of cleaning a side of a thin flat substrate by applying sonic energy to the opposite side of the substrate |
| US7211932B2 (en) | 1996-09-30 | 2007-05-01 | Akrion Technologies, Inc. | Apparatus for megasonic processing of an article |
| US7268469B2 (en) | 1996-09-30 | 2007-09-11 | Akrion Technologies, Inc. | Transducer assembly for megasonic processing of an article and apparatus utilizing the same |
| US7518288B2 (en) | 1996-09-30 | 2009-04-14 | Akrion Technologies, Inc. | System for megasonic processing of an article |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59187442A (en) | 1984-10-24 |
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