JPH0254196U - - Google Patents
Info
- Publication number
- JPH0254196U JPH0254196U JP13230488U JP13230488U JPH0254196U JP H0254196 U JPH0254196 U JP H0254196U JP 13230488 U JP13230488 U JP 13230488U JP 13230488 U JP13230488 U JP 13230488U JP H0254196 U JPH0254196 U JP H0254196U
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- glass tube
- silica body
- heating wire
- powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Resistance Heating (AREA)
Description
図面は本考案の実施例に係る半導体ウエハの洗
浄装置を示す切欠斜視図である。 １２……電熱線、１１……石英ガラス管、１３
……シリカ体。
浄装置を示す切欠斜視図である。 １２……電熱線、１１……石英ガラス管、１３
……シリカ体。
Claims (1)
- 【実用新案登録請求の範囲】 １ 電熱線を収容した石英ガラス管内に、粉粒状
、繊維状若しくはこれらの組み合わせからなるシ
リカ体を充填し、該シリカ体により前記電熱線を
石英ガラス管内周面間に対し非接触の状態を維持
して支持させた事を特徴とする石英ガラス管ヒー
タ。 ２ 前記シリカ体が石英ガラス粉である事を特徴
とする請求項１記載の石英ガラス管ヒータ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988132304U JPH0528713Y2 (ja) | 1988-10-12 | 1988-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988132304U JPH0528713Y2 (ja) | 1988-10-12 | 1988-10-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0254196U true JPH0254196U (ja) | 1990-04-19 |
| JPH0528713Y2 JPH0528713Y2 (ja) | 1993-07-23 |
Family
ID=31389142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988132304U Expired - Lifetime JPH0528713Y2 (ja) | 1988-10-12 | 1988-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528713Y2 (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5615588A (en) * | 1979-07-17 | 1981-02-14 | Matsushita Electric Industrial Co Ltd | Sheathed heater with safety element |
-
1988
- 1988-10-12 JP JP1988132304U patent/JPH0528713Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5615588A (en) * | 1979-07-17 | 1981-02-14 | Matsushita Electric Industrial Co Ltd | Sheathed heater with safety element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0528713Y2 (ja) | 1993-07-23 |