JPH0255157U - - Google Patents
Info
- Publication number
- JPH0255157U JPH0255157U JP13298088U JP13298088U JPH0255157U JP H0255157 U JPH0255157 U JP H0255157U JP 13298088 U JP13298088 U JP 13298088U JP 13298088 U JP13298088 U JP 13298088U JP H0255157 U JPH0255157 U JP H0255157U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- vacuum chamber
- lid
- sample stage
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図ａ，ｂは本考案の実施例を示す説明図、
第２図ａ，ｂは従来例を示す説明図である。
１……蓋、４……試料、２……Ｏリング、５…
…ゴミ、３……試料台。
FIGS. 1a and 1b are explanatory diagrams showing an embodiment of the present invention,
FIGS. 2a and 2b are explanatory diagrams showing a conventional example. 1... Lid, 4... Sample, 2... O-ring, 5...
...garbage, 3...sample stand.
Claims (1)
ンバにおいて、上記蓋には、上記試料台と接し、
試料を囲む面にＯリング溝を切り、これにＯリン
グを取付けたことを特徴とする真空チヤンバ。 In a vacuum chamber consisting of a sample stage and a lid covering the sample, the lid is in contact with the sample stage,
A vacuum chamber characterized by having an O-ring groove cut in the surface surrounding the sample and an O-ring attached to the groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13298088U JPH0255157U (en) | 1988-10-12 | 1988-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13298088U JPH0255157U (en) | 1988-10-12 | 1988-10-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0255157U true JPH0255157U (en) | 1990-04-20 |
Family
ID=31390437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13298088U Pending JPH0255157U (en) | 1988-10-12 | 1988-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0255157U (en) |
-
1988
- 1988-10-12 JP JP13298088U patent/JPH0255157U/ja active Pending