JPH0256875U - - Google Patents
Info
- Publication number
- JPH0256875U JPH0256875U JP13524588U JP13524588U JPH0256875U JP H0256875 U JPH0256875 U JP H0256875U JP 13524588 U JP13524588 U JP 13524588U JP 13524588 U JP13524588 U JP 13524588U JP H0256875 U JPH0256875 U JP H0256875U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- line
- auxiliary exhaust
- solenoid valve
- energized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003111 delayed effect Effects 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
Landscapes
- Details Of Valves (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Magnetically Actuated Valves (AREA)
Description
第１図は本考案の実施例の真空排気用遅延リー
クバルブの電気的遅延回路の図、第２図は遅延リ
ークバルブを接続する排気系の図である。
１……遅延リークバルブ、２……ロータリーポ
ンプ、３……補助排気ライン、４……フオアライ
ンバルブ、５……ターボ分子ポンプ、６……通電
時閉の小型電磁弁（リークバルブ）、７……コン
デンサー、８……抵抗、９……ダイオード、１０
……電源、１１……補助接点１１ａ付きの電磁開
閉器。
FIG. 1 is a diagram of an electrical delay circuit of a delayed leak valve for evacuation according to an embodiment of the present invention, and FIG. 2 is a diagram of an exhaust system to which the delayed leak valve is connected. 1...Delayed leak valve, 2...Rotary pump, 3...Auxiliary exhaust line, 4...Four line valve, 5...Turbo molecular pump, 6...Small solenoid valve (leak valve) that closes when energized, 7 ... Capacitor, 8 ... Resistor, 9 ... Diode, 10
... Power supply, 11 ... Electromagnetic switch with auxiliary contact 11a.
Claims (1)
ンバルブ、補助排気ライン、補助排気ポンペのこ
の順の接続で構成される排気系の、該補助排気ラ
インに接続される遅延リークバルベにおいて、該
遅延リークバルブを、電源と、通電時閉の電磁弁
と、該電源および該電磁弁の間に介在して、電源
スイツチをＯＦＦした後も暫くの間は該電磁弁へ
の通電を続けるようにした電気的遅延回路と、の
三者の組合わせで構成したことを特徴とする真空
排気系の遅延リークバルブ。 In a delayed leak valve connected to the auxiliary exhaust line of an exhaust system that is configured to connect a main exhaust pump, a four-line valve, an auxiliary exhaust line, and an auxiliary exhaust pump in this order to the vacuum vessel, the delayed leak valve is connected to the auxiliary exhaust line. A power source, a solenoid valve that is closed when energized, and an electrical device that is interposed between the power source and the solenoid valve so that the solenoid valve continues to be energized for a while even after the power switch is turned off. A delay leak valve for a vacuum exhaust system, characterized in that it is configured by a combination of a delay circuit and a delay circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988135245U JPH0435583Y2 (en) | 1988-10-17 | 1988-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988135245U JPH0435583Y2 (en) | 1988-10-17 | 1988-10-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0256875U true JPH0256875U (en) | 1990-04-24 |
| JPH0435583Y2 JPH0435583Y2 (en) | 1992-08-24 |
Family
ID=31394704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988135245U Expired JPH0435583Y2 (en) | 1988-10-17 | 1988-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0435583Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62160785U (en) * | 1986-03-31 | 1987-10-13 |
-
1988
- 1988-10-17 JP JP1988135245U patent/JPH0435583Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62160785U (en) * | 1986-03-31 | 1987-10-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0435583Y2 (en) | 1992-08-24 |
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