JPH0257097U - - Google Patents

Info

Publication number
JPH0257097U
JPH0257097U JP13657688U JP13657688U JPH0257097U JP H0257097 U JPH0257097 U JP H0257097U JP 13657688 U JP13657688 U JP 13657688U JP 13657688 U JP13657688 U JP 13657688U JP H0257097 U JPH0257097 U JP H0257097U
Authority
JP
Japan
Prior art keywords
drive mechanism
rotating sample
rotating
sample stand
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13657688U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13657688U priority Critical patent/JPH0257097U/ja
Publication of JPH0257097U publication Critical patent/JPH0257097U/ja
Pending legal-status Critical Current

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Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の回転試料台回転駆動機構を実
施するのに使用される装置構成の一例を示す概要
図である。 １……回転試料台、３……軸、５……エアー軸
受、７……ボールベアリング軸受、９……筒体、
１１……永久磁石、１３……磁気シールド材、１
５……ステータ側回転磁界発生用コイル、１９…
…回転磁界発生用ドライバ、２１……Ｚステージ
、２３……Ｚ軸駆動用ドライバ、２５……Ｘステ
ージ、２７……Ｙステージ。 FIG. 1 is a schematic diagram showing an example of an apparatus configuration used to implement the rotary sample stage rotation drive mechanism of the present invention. 1... Rotating sample stage, 3... Axis, 5... Air bearing, 7... Ball bearing bearing, 9... Cylindrical body,
11... Permanent magnet, 13... Magnetic shielding material, 1
5... Stator side rotating magnetic field generation coil, 19...
...Rotating magnetic field generation driver, 21...Z stage, 23...Z-axis drive driver, 25...X stage, 27...Y stage.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウエハの異物検査を行う異物検査装置における
半導体ウエハなどを保持するための回転試料台の
回転駆動機構において、前記回転試料台の外周側
壁面に複数個の永久磁石が固設されていて、この
永久磁石に対峙して回転磁界発生用コイルが配設
されていることを特徴とする回転試料台の回転駆
動機構。 In a rotation drive mechanism for a rotating sample stand for holding semiconductor wafers, etc. in a foreign object inspection device that inspects foreign objects on wafers, a plurality of permanent magnets are fixedly attached to the outer peripheral side wall surface of the rotating sample stand. A rotational drive mechanism for a rotating sample stage, characterized in that a rotating magnetic field generating coil is disposed facing a magnet.
JP13657688U 1988-10-19 1988-10-19 Pending JPH0257097U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13657688U JPH0257097U (en) 1988-10-19 1988-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13657688U JPH0257097U (en) 1988-10-19 1988-10-19

Publications (1)

Publication Number Publication Date
JPH0257097U true JPH0257097U (en) 1990-04-25

Family

ID=31397216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13657688U Pending JPH0257097U (en) 1988-10-19 1988-10-19

Country Status (1)

Country Link
JP (1) JPH0257097U (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333603A (en) * 1976-09-10 1978-03-29 Hitachi Ltd Turntable
JPS61168853A (en) * 1985-01-23 1986-07-30 Hitachi Ltd Testing device
JPS63271191A (en) * 1987-04-28 1988-11-09 三菱電機株式会社 Three-point support stage device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333603A (en) * 1976-09-10 1978-03-29 Hitachi Ltd Turntable
JPS61168853A (en) * 1985-01-23 1986-07-30 Hitachi Ltd Testing device
JPS63271191A (en) * 1987-04-28 1988-11-09 三菱電機株式会社 Three-point support stage device

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