JPH0258337U - - Google Patents
Info
- Publication number
- JPH0258337U JPH0258337U JP13832088U JP13832088U JPH0258337U JP H0258337 U JPH0258337 U JP H0258337U JP 13832088 U JP13832088 U JP 13832088U JP 13832088 U JP13832088 U JP 13832088U JP H0258337 U JPH0258337 U JP H0258337U
- Authority
- JP
- Japan
- Prior art keywords
- movable inner
- inner frame
- frame
- rectangular parallelepiped
- fixed outer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
Description
第１図は本考案のウエハ保持治具の一実施例を
示す説明図、第２図は従来治具の説明図を示す。
５：ウエハ、６：固定枠、７：可動枠、８，９
：波形支持壁、１０：ガイド。
FIG. 1 is an explanatory view showing one embodiment of the wafer holding jig of the present invention, and FIG. 2 is an explanatory view of a conventional jig. 5: Wafer, 6: Fixed frame, 7: Movable frame, 8, 9
: Corrugated support wall, 10: Guide.
Claims (1)
ウエハ保持治具において、前記直方体の各辺を支
持する固定外枠と、該固定外枠に出入容易に挿入
される可動内枠と、該可動内枠の両側及び底部に
伸縮自在に取付られ、前記可動内枠が前記固定外
枠に挿入時はピツチが大きく挿入後は圧縮されて
ピツチが小となる弾性状の波形ウエハ支持壁とよ
りなることを特徴とするウエハ保持治具。 A rectangular parallelepiped-shaped wafer holding jig that holds a large number of wafers side by side includes a fixed outer frame that supports each side of the rectangular parallelepiped, a movable inner frame that is easily inserted into and out of the fixed outer frame, and a movable inner frame that supports each side of the rectangular parallelepiped. The movable inner frame has an elastic corrugated wafer support wall that is telescopically attached to both sides and the bottom of the frame, and has a large pitch when the movable inner frame is inserted into the fixed outer frame, and is compressed and has a small pitch after insertion. A wafer holding jig featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13832088U JPH0258337U (en) | 1988-10-24 | 1988-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13832088U JPH0258337U (en) | 1988-10-24 | 1988-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0258337U true JPH0258337U (en) | 1990-04-26 |
Family
ID=31400549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13832088U Pending JPH0258337U (en) | 1988-10-24 | 1988-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0258337U (en) |
-
1988
- 1988-10-24 JP JP13832088U patent/JPH0258337U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH01112092U (en) | ||
| JPS5937780U (en) | Cord support device for electrical equipment box | |
| JPH0185217U (en) | ||
| JPS6413120U (en) | ||
| JPS6344382U (en) | ||
| JPS63153868U (en) | ||
| JPS6017129U (en) | storage basket | |
| JPH0474694U (en) | ||
| JPS626584U (en) | ||
| JPS5922786U (en) | packing equipment | |
| JPS60161032U (en) | packaging parts | |
| JPS6296850U (en) | ||
| JPS63186692U (en) | ||
| JPS5875828U (en) | Handrail holding hardware | |
| JPH0164408U (en) | ||
| JPH01115276U (en) | ||
| JPS6416639U (en) | ||
| JPH0196947U (en) | ||
| JPH01179442U (en) | ||
| JPH0350786U (en) | ||
| JPS6219984U (en) | ||
| JPH01121061U (en) | ||
| JPH02123985U (en) | ||
| JPS6379744U (en) | ||
| JPS60177090U (en) | Vacuum cleaner packing equipment |