JPH0258337U - - Google Patents
Info
- Publication number
- JPH0258337U JPH0258337U JP13832088U JP13832088U JPH0258337U JP H0258337 U JPH0258337 U JP H0258337U JP 13832088 U JP13832088 U JP 13832088U JP 13832088 U JP13832088 U JP 13832088U JP H0258337 U JPH0258337 U JP H0258337U
- Authority
- JP
- Japan
- Prior art keywords
- movable inner
- inner frame
- frame
- rectangular parallelepiped
- fixed outer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
Description
第１図は本考案のウエハ保持治具の一実施例を
示す説明図、第２図は従来治具の説明図を示す。 ５：ウエハ、６：固定枠、７：可動枠、８，９
：波形支持壁、１０：ガイド。
示す説明図、第２図は従来治具の説明図を示す。 ５：ウエハ、６：固定枠、７：可動枠、８，９
：波形支持壁、１０：ガイド。
Claims (1)
- 多数のウエハを並立させて保持する直方体状の
ウエハ保持治具において、前記直方体の各辺を支
持する固定外枠と、該固定外枠に出入容易に挿入
される可動内枠と、該可動内枠の両側及び底部に
伸縮自在に取付られ、前記可動内枠が前記固定外
枠に挿入時はピツチが大きく挿入後は圧縮されて
ピツチが小となる弾性状の波形ウエハ支持壁とよ
りなることを特徴とするウエハ保持治具。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13832088U JPH0258337U (ja) | 1988-10-24 | 1988-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13832088U JPH0258337U (ja) | 1988-10-24 | 1988-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0258337U true JPH0258337U (ja) | 1990-04-26 |
Family
ID=31400549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13832088U Pending JPH0258337U (ja) | 1988-10-24 | 1988-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0258337U (ja) |
-
1988
- 1988-10-24 JP JP13832088U patent/JPH0258337U/ja active Pending
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