JPH026050Y2 - - Google Patents

Description

[Detailed Description of the Invention] Industrial Application Field The present invention relates to a device for vertically transporting objects in a clean room.

Conventional technology and its problems Conventionally, an electric dumbwaiter has been put into practical use as a vertical conveyance device, but this method uses roller guides,
There is a lot of dust generated from the balance weight guide and the hoisting device installed at the top of the vertical transport path, so it cannot be used as a vertical transport method for transport tables on which precision electronic circuit parts and the like are mounted in a clean room.

Generally, in a clean room, clean air is supplied into the room through a Heba filter installed on the ceiling. However, as this filter section becomes bulky, buildings are becoming taller due to the limited floor space of factories, and the need for three-dimensional transportation is increasing. There is a demand for practical use of transport devices.

Means for Solving the Problems The present invention has been made in view of the above, and is a device for vertically transporting a transport platform on which an object is placed along a guide rail provided in a vertical transport path. A clean air supply device that supplies clean air downward into the vertical conveyance path, a return duct fixedly installed along substantially the entire length of the vertical conveyance path, and an exhaust device provided in the return duct, A universal joint is installed in the
The conveyance table is supported by a lifting guide provided on the side of the conveyance table via a universal joint; the upper surface of the conveyance table is supported by a wire rope, and a compressed clean is placed between the lift guide and the guide rail. A compressed clean air supply device for supplying air is provided to form an air film between the lifting guide and the guide rail, and a guide plate is provided at the lower end of the side surface of the transport platform,
The present invention is characterized in that a conveyance platform rocking prevention device is provided on the inner wall side of the vertical conveyance path and moves in the horizontal direction to press the guide plate.

Embodiments The present invention will be described below based on embodiments shown in the drawings.

In the figure, 1 indicates a vertical conveyance path, the upper end of which is connected to the ceiling, the lower end of which is fixed to the open floor, and the conveyance is carried in which the objects to be conveyed are placed in the conveyance path surrounded by a peripheral wall 11. The stand 2 is conveyed vertically by a winding device 4. This conveyance table 2 is a cage formed of a frame, and has an entrance door for taking in and taking out objects to be conveyed on one side. The carrier is provided with a hanging fitting 22 at the upper end of the frame. The wire W, one end of which is attached to the hanging fitting 22 of the conveyance table 2, is connected to a winding device 4 installed on the underground pit floor via a sheave 3 vertically suspended from a beam in contact with the ceiling of the vertical conveyance path 1. The conveyor table 2 is moved up and down within the vertical conveyance path by stretching the frame and winding and unwinding the winding device 4. A guide rail 7 is erected inside the circumferential wall 11 of the vertical conveyance path 1 to hold a lifting guide 9 provided on one side of the conveyance table 2. It is desirable that the guide rail 7 has a height from above the ground floor to a beam in contact with the ceiling, and that its cross-sectional shape is pipe-shaped. Note that an inlet 5 and an outlet (not shown) for the conveyed object are provided at desired locations on this vertical conveyance path. A return duct 6 is provided on at least one inner circumferential wall 11 of the vertical conveyance path 1 along the substantially entire length between the beams touching the ceiling from the floor surface of the circumferential wall.

This return duct 6 has one side wall connected to the peripheral wall 11.
The other side wall may be provided with an appropriate slope to improve the flow of clean air, which will be described later.

An exhaust port 61 is provided at the lower end of the return duct 6 below the floor surface, and the air in the underground pit is guided upward through the return duct and exhausted by an exhaust fan (not shown).
A clean air supply device (not shown) that generates clean air is installed on the ceiling, and the supplied clean air is vertically injected downward in the vertical conveyance path as shown by the arrow. . An exhaust fan is provided above the return duct so that the clean air flowing down in the vertical conveyance path 1 is discharged to the outside through the return duct 6.

On the other hand, a universal joint 8 is provided on one side wall of the underframe of the conveyance table 2 and protrudes in the vertical direction, and an elevating guide 9 is provided at the end of the universal joint 8. The guide rails 7 erected in the vertical conveyance path are passed through.

FIG. 4 is a sectional view of essential parts of the elevating guide 9 and the universal joint 8.

The lifting guide 9 is made up of a sleeve-shaped housing 92 and an inner sleeve 93, and the inner sleeve 93 is configured to hold the guide rail 7 with a slight gap therebetween. .

Further, the sleeve-shaped inner surface of the housing 92 and the outer surface of the inner sleeve 93 are arranged to face each other with a predetermined gap 95 interposed therebetween;
Moreover, the upper and lower end surfaces of each are crimped to make the gap 95 airtight. Further, the inner sleeve 93 is provided with a plurality of nozzles 94.

Furthermore, the conveyance table 2 is equipped with an intake section (not shown) for an air hose 24 that is connected to a compressed clean air supply device (not shown) provided outside the device, and the intake section for the air hose 24 and the lifting guide 9 are connected to each other. The space 95 is connected with the air pipe 23,
Compressed clean air supplied from the compressed clean air supply device is ejected from the gap 95 through the nozzle 94 toward the guide rail 7 to form an air film between the guide rail 7 and the inner sleeve 93. This is designed to prevent dust from being generated as the transport platform 2 moves up and down in a non-contact state.

The universal joint 8 is composed of a mounting plate 81 fixed to one side of the conveyor table 2, a joint plate 82, and a support plate 83 fixed to the lifting guide 9, and is supported by pins 84 and 85, respectively. . Therefore, fluctuations in the posture of the conveyor table 2 caused by swinging as the conveyor table 2 moves up and down, elongation of the wire rope, and unbalanced loads are caused by the mounting plate 81 and the pins 84 and 85 being the center.
When the joint plate 82 and the support plate 83 rotate, they act as a universal joint and are absorbed, so that the lifting guide 9 and the guide rail 7 are always connected.
The concentricity of the air is maintained so as not to destroy the air film.

FIG. 6 shows a sectional view of the vertical conveyance path. FIG. 8 shows an example of how the striker 31 and sensor 32 are attached.

The conveyance table 2 moves up and down without contact along the guide rail 7, and a striker 31 provided vertically on one side wall of the conveyance table 2 passes a positioning sensor 32 provided on the inner wall of one side of the vertical conveyance path 1. By doing so, the stop position is detected and the conveyance table 2 stops moving up and down. One set of sensors 31 is provided for each stop position of the conveyance table, and in consideration of dust generation, the sensor 31 is configured as, for example, a photoelectric switch or the like that operates without contact.

On the other hand, a carriage swinging device 41 is provided on the inner wall side of the vertical conveyance path 1 in order to prevent the carriage 2 from swinging when the carriage 2 is stopped and during loading and unloading work of conveyed objects. .

A pair of anti-swing devices 41 are provided at each stop position of the conveyor table 2 facing the inner wall side of the vertical conveyor path 1, and two anti-swing devices 41 are provided at right angles to the side surface to which the universal joint 8 and the lifting guide 9 of the conveyor table 2 are attached. It is placed in a position to hold the sides.

When the stop position is detected by the sensor 32 and the striker 31, the vibration prevention device 41 is activated, and all operation commands are processed by the control device 35 installed on the underground pit floor to control the operation. It will be done.

FIG. 7 shows a conveyor table rocking prevention device. A is a plan view, and b is a side view.

This device consists of a cylinder 42, a roller 43 attached to its tip, two guide shafts 44, a linear ball bearing 45, a mount block 46 to which these are attached, and a solenoid valve 47. When it stops, the pair of cylinders 42 extend while being guided by the guide shaft 44, and the rollers 43 press the guide plate 51 attached to the lower end of the side surface of the conveyor table 2 to sandwich the conveyor table 2 and prevent it from swinging. It's becoming like that. The clamping point is located at the lower end of the conveyor table 2 where the conveyed object is not affected by dust.

The solenoid valve 47 operates according to a command from the control device 35 to supply air to the cylinder 42 and perform a shutoff operation.
Since the anti-swing device 41 is designed to expand and contract, the cylinder 42 is retracted while the conveyance table 2 is being moved up and down, so that it is controlled so as not to interfere with the up and down movement.

Operation Clean air is blown out downward in the vertical conveyance path 1, passes through the return duct 6, and is forcibly returned to the clean air supply device by the exhaust fan. The object to be transported by another device or a person to the entrance/exit 5 is transferred to the transport platform 2, which is raised by the wire winding of the winding device 4, and at the exit/exit 5, the object is transferred to the transport platform 2, which is raised by the wire winding of the winding device 4, and then at the exit port 5, the object is transported by another device or by a person.
Removal by another device or person.

Clean air is vertically flowing down this vertical conveyance path 1, and the vertical movement between the conveyor table's lift guide 9 and the guide rail 7 is lifted and lowered by the lifting device between the intake port and the take-out port. Nozzle 94 provided in the guide
The compressed clean air ejected from the guide rail is ejected onto the outer peripheral surface of the guide rail, creating an air film between the lifting guide and the guide rail, forming an air bearing.
In addition, since the lift guide supports the conveyor table via a free joint, the air film is prevented from being destroyed due to swings and changes in the posture of the conveyor table, and fine dust generated by the lift and lower movement of the conveyor table is also prevented. Without,
In addition, the area around the transported object is always kept clean, and there is no dust attached to the transported object placed on the transport platform.
Can be transported while maintaining cleanliness. Further, when the conveyance table is stopped, the shaking of the conveyance table is eliminated by the anti-swing device, so that loading and unloading operations of the objects to be conveyed can be carried out stably.

In the above embodiment, the conveyor table is raised and lowered by a winding device, but the raising and lowering means is not limited to this and may be a lifter or the like.

Effects of the invention This invention eliminates dust generation in the vertical conveyance path where clean air flows down, so it is possible to prevent fine dust from adhering to the conveyed objects with a simple configuration, and it is possible to constantly shake the conveyed objects. Since it can be transported stably without movement, it is particularly suitable for vertical transport in a clean room.

[Brief explanation of drawings]

FIG. 1 is a front view of one embodiment, FIG. 2 is a front view showing the outline of FIG. 1, FIG. 3 is a front view from a different position, and FIG. a is a sectional view, b is a plan view, FIG. 5 is a perspective view, FIG. 6 is a sectional view of the vertical conveyance path, FIG. 7 is a swing prevention device, a is a plan view, b is a side view, and FIG. FIG. 8 is an explanatory diagram of an example of mounting a sensor and a striker. 1 is a vertical transport path, 2 is a transport platform, 3 is a sheave, 4
is a winding device, 5 is an intake port, 6 is a return duct,
7 is a guide rail, 8 is a universal joint, 9 is a lifting guide, W is a wire, 41 is a rocking prevention device, 32 is a sensor, 31 is a striker, 35 is a control device, 51 is a guide plate, 42 is a cylinder, 43 is a roller, 44 is a guide shaft, 47
is a solenoid valve.

Claims (1)

[Scope of utility model registration request] A device for vertically transporting a transport platform carrying an object to be transported along a guide rail provided in a vertical transport path, and a clean air supply device for supplying clean air downward into the vertical transport path; A return duct is provided that is fixedly installed along substantially the entire length of the vertical conveyance path, and an exhaust device is provided on the return duct, and a universal joint is provided on the side surface of the conveyance platform, and the conveyance platform is A compressed clean air supply device that supplies compressed clean air between the lift guide and the guide rail, the conveyor table being supported by a lift guide provided on a side surface thereof, and the upper surface of the conveyor table being supported by a wire rope; an air film is formed between the lifting guide and the guide rail, and a guide plate is provided at the lower end of the side surface of the transport platform,
1. A vertical conveyance device for use in a clean room, characterized in that a conveyor platform swing prevention device is provided on an inner wall side of a vertical conveyance path to move horizontally and press the guide plate.