JPH0261198U - - Google Patents

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Publication number
JPH0261198U
JPH0261198U JP13975088U JP13975088U JPH0261198U JP H0261198 U JPH0261198 U JP H0261198U JP 13975088 U JP13975088 U JP 13975088U JP 13975088 U JP13975088 U JP 13975088U JP H0261198 U JPH0261198 U JP H0261198U
Authority
JP
Japan
Prior art keywords
rotor
stator
blades
blade
multiple stages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13975088U
Other languages
English (en)
Other versions
JPH0640955Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13975088U priority Critical patent/JPH0640955Y2/ja
Publication of JPH0261198U publication Critical patent/JPH0261198U/ja
Application granted granted Critical
Publication of JPH0640955Y2 publication Critical patent/JPH0640955Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Non-Positive Displacement Air Blowers (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係るターボ分子ポンプの静翼
及び動翼部分を示す断面図、第２図ａはターボ分
子ポンプの吸引側静翼の展開図、第２図ｂは同図
ａのＥ―Ｅ断面矢視図、第３図は従来の玉軸受を
用いたターボ分子ポンプの構造を示す縦断面図、
第４図はロータが傾いた状態を示す図である。 図中、１……ケーシング、２……静翼、３……
動翼、４……ロータ胴、５……ロータ軸、６……
リング状板体。

Claims (1)

    【実用新案登録請求の範囲】
  1. 多数段の動翼を有するロータと、多数段の静翼
    を有するステータを具備し、該ロータを磁気軸受
    にて支承し、前記ロータを回転することにより前
    記ステータの静翼間をロータの動翼が通過する構
    造の磁気軸受型ターボ分子ポンプにおいて、前記
    動翼と静翼のクリアランスを吸気側を排気側より
    大きくしたことを特徴とする磁気軸受型ターボ分
    子ポンプ。
JP13975088U 1988-10-26 1988-10-26 磁気軸受型ターボ分子ポンプ Expired - Lifetime JPH0640955Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13975088U JPH0640955Y2 (ja) 1988-10-26 1988-10-26 磁気軸受型ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13975088U JPH0640955Y2 (ja) 1988-10-26 1988-10-26 磁気軸受型ターボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPH0261198U true JPH0261198U (ja) 1990-05-07
JPH0640955Y2 JPH0640955Y2 (ja) 1994-10-26

Family

ID=31403301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13975088U Expired - Lifetime JPH0640955Y2 (ja) 1988-10-26 1988-10-26 磁気軸受型ターボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPH0640955Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119641669A (zh) * 2025-01-26 2025-03-18 宁波方太厨具有限公司 轴流风机及包括其的油烟机和送风设备

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119641669A (zh) * 2025-01-26 2025-03-18 宁波方太厨具有限公司 轴流风机及包括其的油烟机和送风设备

Also Published As

Publication number Publication date
JPH0640955Y2 (ja) 1994-10-26

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