JPH0261956U - - Google Patents
Info
- Publication number
- JPH0261956U JPH0261956U JP13916588U JP13916588U JPH0261956U JP H0261956 U JPH0261956 U JP H0261956U JP 13916588 U JP13916588 U JP 13916588U JP 13916588 U JP13916588 U JP 13916588U JP H0261956 U JPH0261956 U JP H0261956U
- Authority
- JP
- Japan
- Prior art keywords
- sublimate
- block
- water
- cooled hearth
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は従来の昇華物蒸発源装置の截断側面図
、第２図は第１図示の装置の蒸発状態を示す截断
側面図、第３図は本考案の実施例の截断側面図、
第４図は第３図示の装置の蒸発状態を示す截断側
面図である。
１……真空蒸着室、２……ハース、３……冷却
管、４……昇華物、５……電子ビーム、６……周
壁。
FIG. 1 is a cutaway side view of a conventional sublimate evaporation source device, FIG. 2 is a cutaway side view showing the evaporation state of the device shown in FIG. 1, and FIG. 3 is a cutaway side view of an embodiment of the present invention.
FIG. 4 is a cutaway side view showing the evaporation state of the apparatus shown in FIG. 1... Vacuum deposition chamber, 2... Hearth, 3... Cooling pipe, 4... Sublimate, 5... Electron beam, 6... Surrounding wall.
Claims (1)
するブロツク状の昇華物を収めた水冷ハースを設
けるようにしたものに於いて、該水冷ハースを該
昇華物のブロツクの高さよりも低い周壁を備えた
浅皿形に形成したことを特徴とする昇華物蒸発源
装置。 In a vacuum evaporation chamber in which a water-cooled hearth containing a block-shaped sublimate that is evaporated by irradiation with an electron beam is provided, the water-cooled hearth is provided with a peripheral wall lower than the height of the block of the sublimate. A sublimate evaporation source device characterized by being formed into a shallow dish shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13916588U JPH0336519Y2 (en) | 1988-10-27 | 1988-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13916588U JPH0336519Y2 (en) | 1988-10-27 | 1988-10-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0261956U true JPH0261956U (en) | 1990-05-09 |
| JPH0336519Y2 JPH0336519Y2 (en) | 1991-08-02 |
Family
ID=31402169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13916588U Expired JPH0336519Y2 (en) | 1988-10-27 | 1988-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0336519Y2 (en) |
-
1988
- 1988-10-27 JP JP13916588U patent/JPH0336519Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0336519Y2 (en) | 1991-08-02 |