JPH026207U - - Google Patents
Info
- Publication number
- JPH026207U JPH026207U JP8465188U JP8465188U JPH026207U JP H026207 U JPH026207 U JP H026207U JP 8465188 U JP8465188 U JP 8465188U JP 8465188 U JP8465188 U JP 8465188U JP H026207 U JPH026207 U JP H026207U
- Authority
- JP
- Japan
- Prior art keywords
- light
- stylus
- moves
- optical
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 4
- 241001422033 Thestylus Species 0.000 claims 2
- 238000006073 displacement reaction Methods 0.000 claims 2
- 230000001427 coherent effect Effects 0.000 claims 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Description
第１図は本考案の具体的一実施例の光マイクロ
測定干渉部を示す縦断面図、第２図および第３図
は本考案の実施例による測定結果を示す図表であ
る。
１……筐体、２……支持筒、３……マイクロレ
ンズ、４……セラミツクフエルール、５……偏波
面保存フアイバ、６……基板、７……偏光ビーム
スプリツタ、８……無偏光ビームスプリツタ、９
……１／４波長板、１０……偏光ビームスプリツ
タ、１１……偏光ビームスプリツタ、１２，１２
……受光素子、１６……シリンダ、１７……移動
円筒支持体、１８……直角プリズム、１９……触
針、２０……支持板、２１……コイルスプリング
、２２……カバー。
FIG. 1 is a vertical cross-sectional view showing an optical micro-measurement interference section according to a specific embodiment of the present invention, and FIGS. 2 and 3 are charts showing measurement results according to the embodiment of the present invention. 1... Housing, 2... Support tube, 3... Micro lens, 4... Ceramic ferrule, 5... Polarization preserving fiber, 6... Substrate, 7... Polarizing beam splitter, 8... None Polarizing beam splitter, 9
...1/4 wavelength plate, 10...Polarizing beam splitter, 11...Polarizing beam splitter, 12,12
... Light receiving element, 16 ... Cylinder, 17 ... Moving cylindrical support, 18 ... Right angle prism, 19 ... Stylus, 20 ... Support plate, 21 ... Coil spring, 22 ... Cover.
Claims (1)
、投光光学素子の光軸方向に進退する触針と、投
光光学素子からの投光を触針方向と受光素子方向
へ２分割する無偏光ビームスプリツタと、触針と
一体的に移動し２分割されて触針方向へ向う光を
反射する直角プリズムと、直角プリズムから反射
された光と前記２分割された光とを通す偏光ビー
ムスプリツタを備え、被測定物の移動に伴い触針
が変位し、その変位量を光の干渉を利用して測定
することを特徴とした光マイクロメータ。 (2) 光源から導かれたコヒーレント光が光路長
が不変な基準光と、被測定物の移動に伴い光路長
が変化する測定光の二つに分け両者を円偏光と直
線偏光にし干渉させ、干渉光の光強度を測定して
変位量を検出することを特徴とする光マイクロメ
ータ。[Scope of Claim for Utility Model Registration] (1) A light emitting optical element, a light receiving element, a stylus that moves back and forth in the optical axis direction of the light emitting optical element, and a stylus that touches the light emitted from the light emitting optical element within the measurement terminal. A non-polarized beam splitter that splits the beam into two in the direction of the needle and the direction of the light-receiving element, a right-angle prism that moves integrally with the stylus and reflects the two-split beam toward the stylus, and the light reflected from the right-angle prism. An optical micrometer comprising a polarizing beam splitter that passes the two-split light, a stylus is displaced as the object to be measured moves, and the amount of displacement is measured using light interference. . (2) Coherent light guided from a light source is divided into two parts: a reference light whose optical path length remains unchanged, and a measurement light whose optical path length changes as the object to be measured moves, making both circularly polarized light and linearly polarized light and made to interfere. An optical micrometer that detects displacement by measuring the light intensity of interference light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8465188U JPH026207U (en) | 1988-06-27 | 1988-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8465188U JPH026207U (en) | 1988-06-27 | 1988-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH026207U true JPH026207U (en) | 1990-01-16 |
Family
ID=31309332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8465188U Pending JPH026207U (en) | 1988-06-27 | 1988-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH026207U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0534963U (en) * | 1991-10-23 | 1993-05-14 | フランスベツド株式会社 | Bed device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4843656A (en) * | 1971-10-04 | 1973-06-23 | ||
| JPS4917264A (en) * | 1972-06-03 | 1974-02-15 | ||
| JPS61175505A (en) * | 1985-01-31 | 1986-08-07 | Toshiba Corp | Micrometer |
-
1988
- 1988-06-27 JP JP8465188U patent/JPH026207U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4843656A (en) * | 1971-10-04 | 1973-06-23 | ||
| JPS4917264A (en) * | 1972-06-03 | 1974-02-15 | ||
| JPS61175505A (en) * | 1985-01-31 | 1986-08-07 | Toshiba Corp | Micrometer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0534963U (en) * | 1991-10-23 | 1993-05-14 | フランスベツド株式会社 | Bed device |
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