JPH0262084A - ceramic actuator - Google Patents
ceramic actuatorInfo
- Publication number
- JPH0262084A JPH0262084A JP63213947A JP21394788A JPH0262084A JP H0262084 A JPH0262084 A JP H0262084A JP 63213947 A JP63213947 A JP 63213947A JP 21394788 A JP21394788 A JP 21394788A JP H0262084 A JPH0262084 A JP H0262084A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic actuator
- piezoelectric element
- view
- electrode
- configuration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
産業上の利用分野
本発明は各種機器部品の微小変位化の要望を満たすセラ
ミックアクチュエータに関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a ceramic actuator that satisfies the demand for minute displacement of various equipment components.
従来の技術
従来のこの種のセラミックアクチュエータは第４図、第
５図、第６図に示すように構成されている。2. Description of the Related Art A conventional ceramic actuator of this type is constructed as shown in FIGS. 4, 5, and 6.
第４図は斜視図、第５図は要部拡大断面図、第６図は使
用時の構成例を示す断面図である。FIG. 4 is a perspective view, FIG. 5 is an enlarged sectional view of a main part, and FIG. 6 is a sectional view showing an example of the configuration in use.
従来のセラミックアクチュエータは、置方形状の薄金属
板よりなるシム１と、上記シム１より長尺方向に少し短
い薄板状の圧電素子２とからなり、この圧電素子２が上
記シム１の表側面に一端部を揃えた状態に貼り合されて
いる。また、上記圧電素子２０表裏には電極３，４が薄
膜状に形成されているものである。A conventional ceramic actuator consists of a shim 1 made of a rectangular thin metal plate, and a thin plate-shaped piezoelectric element 2 that is slightly shorter than the shim 1 in the longitudinal direction. are attached with one end aligned. Furthermore, electrodes 3 and 4 are formed in the form of thin films on the front and back sides of the piezoelectric element 20.
そして、長方形状の一端部は固定台６．５ａに接着また
はバネ加圧力による挾み込み固定の片持梁状に構成され
、片持梁の先端部には被微小変位物が取付けられる。こ
のような構成で固定台５゜５ａの間に電圧６が入力され
ると、圧電素子２は伸びまたは縮みを生じ、シム１は伸
縮をしないため、屈曲動作を生じるものである。One end of the rectangular shape is formed into a cantilever shape that is fixed to the fixing base 6.5a by gluing or using spring pressure, and an object to be minutely displaced is attached to the tip of the cantilever. With this configuration, when a voltage 6 is input between the fixed bases 5.degree. 5a, the piezoelectric element 2 expands or contracts, and the shim 1 does not expand or contract, causing a bending motion.
発明が解決しようとする課題
このような従来の構成では、製造工法上、シムと素子の
貼り合わせが重要であり、貼り合せ加圧力、接着剤等の
条件選出、また貼り合せ面の汚れ除去等が必要であり、
工法上で制約を受は易く、特性のばらつきも多く発生し
易いという課題があった。Problems to be Solved by the Invention In such a conventional configuration, bonding the shim and element is important from the manufacturing method, and it is important to select conditions such as bonding pressure and adhesive, and to remove dirt from the bonding surface. is necessary,
There were problems in that the construction method was easily subject to restrictions and variations in characteristics were likely to occur.
本発明はこのような課題を解決するもので、素子、シム
の構成形態を変更し、貼り合せ工法上に制約を受けず、
また特性上で安定し、且つ、安価な製品を供給すること
を目的とするものである。The present invention solves these problems by changing the configuration of elements and shims, and is not subject to restrictions on the bonding method.
Furthermore, the purpose is to supply products that are stable in terms of characteristics and are inexpensive.
課題を解決するための手段
この課題を解決するために本発明は、シムを用いず、圧
電素子の表裏における電極の膜厚に差を設けた構成とし
たものである。Means for Solving the Problems In order to solve this problem, the present invention does not use shims, but has a structure in which the film thicknesses of the electrodes on the front and back sides of the piezoelectric element are different.
作用
この構成により、圧電素子の表裏における電極膜厚を片
側は薄く、他方側を厚くすることで、シムを貼り合゛わ
せたのと同様の効果が得られ、従って貼り合せ加工が不
要となり、それにより特性ばらつきを抑えることができ
、部品数も削減され、性能的に安定した、安価な製品が
供給できることとなる。Function: With this configuration, the electrode film thickness on the front and back sides of the piezoelectric element is made thinner on one side and thicker on the other side, thereby achieving the same effect as bonding shims together, thus eliminating the need for bonding processing. This makes it possible to suppress variations in characteristics, reduce the number of parts, and provide inexpensive products with stable performance.
実施例
第１図は本発明の一実施例によるセラミックアクチュエ
ータの斜視図、第２図はその要部拡大断面図であり、第
３図は使用時の構成例を示す断面図である。Embodiment FIG. 1 is a perspective view of a ceramic actuator according to an embodiment of the present invention, FIG. 2 is an enlarged sectional view of a main part thereof, and FIG. 3 is a sectional view showing an example of the configuration in use.
尚、従来例と同一箇所には同一番号を付している。Note that the same numbers are given to the same parts as in the conventional example.
本発明のセラミックアクチュエータでは、薄板長方形状
の圧電素子７の表面には薄膜状の電極８が、また裏面に
は厚膜状の電極９がそれぞれ設けられている。In the ceramic actuator of the present invention, a thin film-like electrode 8 is provided on the front surface of a thin plate rectangular piezoelectric element 7, and a thick film-like electrode 9 is provided on the back surface.
このように構成されたセラミックアクチュエータは、固
定部側を固定台６．５１Ｌに固定して片持梁状に構成さ
れ、他端部へ被変位物等を取付け、上記固定台５．６ａ
間に電気信号を入力し、使用されるものである。すなわ
ち、固定台６，５ａに電電信号が入力されると、圧電素
子７は電圧量に応じ伸縮するが、片面の電極８は薄く、
他面側の電極９を厚くしているために、素子表裏間で伸
縮が異り、従って屈曲動作を生じるものである。The ceramic actuator configured in this manner has a cantilever shape with the fixing part side fixed to the fixing base 6.51L, and the object to be displaced etc. is attached to the other end, and the fixed part side is fixed to the fixing base 5.6a.
It is used by inputting electrical signals between the two. That is, when an electric signal is input to the fixed bases 6, 5a, the piezoelectric element 7 expands and contracts according to the amount of voltage, but the electrode 8 on one side is thin.
Since the electrode 9 on the other side is made thicker, the expansion and contraction differ between the front and back sides of the element, thus causing a bending action.
発明の効果
以上のように本発明によれば、シムを用いず、圧電素子
の表裏電極の膜厚に差を設けるのみの構成としているた
めに構造、構成が簡単であり、低価格のセラミックアク
チュエータが供給できるばかりでなく、特性ばらつきの
要因である貼り合せを行わないために特性的に安定した
製品が供給できることとなる。Effects of the Invention As described above, according to the present invention, the structure and structure are simple because no shims are used, and only a difference in film thickness is provided between the front and back electrodes of the piezoelectric element, and a low-cost ceramic actuator can be obtained. Not only can we supply products with stable characteristics, but we can also supply products with stable characteristics because there is no bonding, which is a cause of variation in characteristics.
第１図は本発明の一実施例によるセラミックアクチュエ
ータの斜視図、第２図はその要部拡大断面図、第３図は
使用時の構成例を示す断面図、第４図は従来のセラミッ
クアクチュエータの斜視図、第５図はその要部拡大断面
図、第６図は使用時の構成例を示す断面図である。
６．６ａ・・・・・・固定台、６・・・・・・電圧、γ
・・・・・・圧電素子、８．９・・・・・・電極。
代理人の氏名 弁理士 粟 野 重 孝 ほか１名第１
図
δ電極
＼
第２図
／
第
図
第
図
＼
第
図Fig. 1 is a perspective view of a ceramic actuator according to an embodiment of the present invention, Fig. 2 is an enlarged cross-sectional view of its main parts, Fig. 3 is a cross-sectional view showing an example of the configuration in use, and Fig. 4 is a conventional ceramic actuator. FIG. 5 is an enlarged sectional view of the main part thereof, and FIG. 6 is a sectional view showing an example of the configuration in use. 6.6a...Fixed base, 6...Voltage, γ
...Piezoelectric element, 8.9... Electrode. Name of agent: Patent attorney Shigetaka Awano and 1 other person 1st
Figure δ Electrode\ Figure 2/ Figure Figure Figure\ Figure
Claims (1)
成し、上記の厚膜電極にシムと同様の機能を持たせた圧
電素子単板で構成するモノモルフ構造のセラミックアク
チュエータ。A ceramic actuator with a monomorph structure consisting of a single piezoelectric element plate in which the electrode film of the piezoelectric element is thinner on one side and thicker on the other side, and the thick film electrode has the same function as a shim.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63213947A JPH0262084A (en) | 1988-08-29 | 1988-08-29 | ceramic actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63213947A JPH0262084A (en) | 1988-08-29 | 1988-08-29 | ceramic actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0262084A true JPH0262084A (en) | 1990-03-01 |
Family
ID=16647684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63213947A Pending JPH0262084A (en) | 1988-08-29 | 1988-08-29 | ceramic actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0262084A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11152024B1 (en) * | 2020-03-30 | 2021-10-19 | Western Digital Technologies, Inc. | Piezoelectric-based microactuator arrangement for mitigating out-of-plane force and phase variation of flexure vibration |
-
1988
- 1988-08-29 JP JP63213947A patent/JPH0262084A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11152024B1 (en) * | 2020-03-30 | 2021-10-19 | Western Digital Technologies, Inc. | Piezoelectric-based microactuator arrangement for mitigating out-of-plane force and phase variation of flexure vibration |
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