JPH0262085A - ceramic actuator - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a ceramic actuator that satisfies the demand for minute displacement of various equipment parts.

BACKGROUND ART Conventionally, this type of ceramic actuator has been constructed as shown in FIGS. 4, 6, and 6.

FIG. 4 is a perspective view, FIG. 6 is an enlarged sectional view of a main part, and FIG. 6 is a sectional view showing an example of the configuration in use.

4 to 6, a thin rectangular piezoelectric element 2 is bonded to one side of a shim 1 made of a rectangular thin metal plate. One end of this rectangular shape is configured into a cantilever shape that is fixed to the fixing base 3.3 by gluing or using spring pressure, and the tip of the cantilever is equipped with an object to be minutely displaced (not shown).
is installed.

When a voltage 4 is input between the fixed bases 3 and 3, the piezoelectric element 2 expands and contracts depending on the polarity of the voltage, and is bent due to the non-extensibility and contraction of the bonded shim 1.

Problems to be Solved by the Invention In such a conventional configuration, the shim 1 is a single flat plate, and in order to obtain a large amount of displacement, it is necessary to reduce the total thickness, but in this case, mechanical resonance This results in a decrease in frequency and a decrease in driving force, which poses a problem in that it is likely to be subject to restrictions in actual use.

The present invention aims to solve these problems by changing the shape of the shim, ensuring a large amount of displacement and driving force, and providing a product with versatility that is difficult for all parties to use. It is something.

Means for Solving the Problem In order to solve this problem, the present invention has a configuration in which the shim has a plurality of thickness changes in the longitudinal direction on one side of the shim.

Effect: With this configuration, the shim has multiple thickness changes in the longitudinal direction on one side, and is thicker on the fixed part side and thinner towards the drive part tip side, resulting in displacement.

A large amount of driving force can be secured, and various restrictions in actual use are less likely to be imposed.

Embodiment FIG. 1 is a perspective view of a ceramic actuator according to an embodiment of the present invention, FIG. 2 is an enlarged sectional view of a main part thereof, and FIG. 3 is a sectional view showing an example of the configuration in use.

Note that the same numbers are given to the same parts as in the conventional example.

1 and 2, a thin rectangular piezoelectric element 2 is bonded to the surface of a shim 5 made of a rectangular thin plate of metal or electrically conductive resin.

In the longitudinal direction of the shim 6, there are a plurality of thickness change portions 6a.
, 61), and 50, which are thick on the fixed part side 62L and become thinner toward the drive end sides 6b and 6C.

As shown in FIG. 3, the ceramic actuator formed in this manner has a cantilever shape in which the fixed part side a is fixed to the fixed base 3.3a, and the object to be displaced is attached to the other end. A voltage 4 is input and used between the fixed base 3.3a, and when the voltage 4 is input, the piezoelectric element 2 expands and contracts depending on the polarity of the voltage 4, and the bonded shim 6 does not expand or contract. Deflection occurs depending on the relationship.

Effects of the Invention As described above, according to the present invention, partially changing the thickness of the shim is equivalent to partially changing the total thickness of the actuator, and the amount of deflection corresponding to each thickness can be obtained. ,
Overall, a large amount of displacement can be obtained.

In addition, since the thickness is changed from the fixed part side to the drive part side, the volume on the drive tip side becomes smaller, and the same effect as reducing the load on the tip part is obtained, the mechanical resonance frequency becomes dog, and the fixed part Because the sides are thick, a large amount of driving force can be obtained, and a versatile product that is not subject to various restrictions in actual use can be provided.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing a ceramic actuator according to an embodiment of the present invention, FIG. 2 is an enlarged sectional view of the main part thereof, and FIG.
The figure is a sectional view showing an example of the configuration in use, Figure 4 is a perspective view showing a conventional ceramic actuator, Figure 5 is an enlarged sectional view of its main parts, and Figure 6 is a sectional view showing an example of the configuration in use. be. 2...Piezoelectric element, 3,311...Fixing base, 6...Shim, 6a, sb, esc...
・Thickness dimension change part. Fig. 1 zE: Calculator 7/ /'' 5 Sim Fig. 2? δ0 sb Fig. 5? Fig. 5/ 3 u/ ?

Claims (2)

[Claims] (1) Consisting of a thin plate-shaped shim and a thin plate-shaped piezoelectric element bonded to the shim, the shim is thick on the fixed part side in the longitudinal direction of one side of the shim, and is set to become thinner toward the drive tip side. Ceramic actuator with multiple thickness-variable parts. (2) The ceramic actuator according to claim 1, wherein the shim is made of metal or a resin body having electrical conductivity.