JPH0263020A - Active matrix type liquid crystal display element - Google Patents

Active matrix type liquid crystal display element

Info

Publication number
JPH0263020A
JPH0263020A JP63213692A JP21369288A JPH0263020A JP H0263020 A JPH0263020 A JP H0263020A JP 63213692 A JP63213692 A JP 63213692A JP 21369288 A JP21369288 A JP 21369288A JP H0263020 A JPH0263020 A JP H0263020A
Authority
JP
Japan
Prior art keywords
electrode
liquid crystal
substrate
pattern
display
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63213692A
Other languages
Japanese (ja)
Other versions
JP2693513B2 (en
Inventor
Makoto Shibusawa
誠 渋沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP21369288A priority Critical patent/JP2693513B2/en
Publication of JPH0263020A publication Critical patent/JPH0263020A/en
Application granted granted Critical
Publication of JP2693513B2 publication Critical patent/JP2693513B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136213Storage capacitors associated with the pixel electrode
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133512Light shielding layers, e.g. black matrix

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Liquid Crystal (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)

Abstract

PURPOSE:To minimize a decrease in light transmissivity and to obtain such picture quality that a display is bright and a flicker is small by prescribing an opening area by a pattern for a capacity forming electrode formed of a light shield material on an array substrate. CONSTITUTION:A light shield layer 37 has the specific opening part corresponding to a display picture element electrode 25 and covers the substrate completely except the display picture element electrode 25. Further, the contour line 44 of the opening part which is prescribed by the pattern of the light shield layer 37 is put within the pattern of the capacity forming electrode 28. The width L1 indicates the gap between the outer periphery of the capacity forming electrode 28 and the contour line 44 and the width L2 indicates the gap between the inner periphery of the capacity forming electrode 28 and the contour line 44. Those widths L1 and L2 are set preferably to size larger than the sticking accuracy between the array substrate and a counter substrate 38. Consequently, the opening area can be increased and the picture quality of a bright display with a small flicker is obtained.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) この発明は、薄膜トランジスタ(Th1n FilmT
ransister 、 T F T >をスイッチ素
子として表示画素電極アレイを構成したアクティブマト
リクス型液晶表示素子に関する。
[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention relates to a thin film transistor (Thin Film Transistor).
The present invention relates to an active matrix type liquid crystal display element in which a display pixel electrode array is configured using TFT> as a switch element.

(従来の技術) 近年、液晶を用いた表示素子は、テレビ表示やグラフィ
ックデイスプレィ等を指向した大容量で高密度のアクテ
ィブマトリクス型表示素子の開発及び実用化が盛んであ
る。このような表示素子では、クロストークのない高コ
ントラストの表示が行えるように、各画素の駆動と制御
を行う手段として半導体スイッチが用いられる。その半
導体スイッチとしては、透過型表示が可能であり大面積
化も容易である等の理由から、透明絶縁基板上に形成さ
れたTPT等が、通常用いられている。
(Prior Art) In recent years, with regard to display elements using liquid crystals, active matrix type display elements with large capacity and high density are being actively developed and put into practical use for use in television displays, graphic displays, and the like. In such display elements, semiconductor switches are used as means for driving and controlling each pixel so that high contrast display without crosstalk can be performed. As the semiconductor switch, a TPT or the like formed on a transparent insulating substrate is usually used because it is capable of transmissive display and can easily be made into a large area.

第2図はTPTを備えた表示画素電極アレイを用いた液
晶表示素子の一画素を表す簡単な回路図である。同図に
おいて、交差する走査線1と信号線2の各交点位置には
TFT3が設けられ、TFT3のゲートは行ごとに走査
線1に接続され、TPT3のドレインは列ごとに信号線
2に接続されている。また、TFT3のソースは表示画
素電極4に接続されており、表示画素電極4と対向電極
5との間には液晶層6が挟持されている。
FIG. 2 is a simple circuit diagram showing one pixel of a liquid crystal display element using a display pixel electrode array equipped with TPT. In the figure, a TFT 3 is provided at each intersection of a scanning line 1 and a signal line 2 that intersect, the gate of the TFT 3 is connected to the scanning line 1 for each row, and the drain of the TPT 3 is connected to the signal line 2 for each column. has been done. Further, the source of the TFT 3 is connected to a display pixel electrode 4, and a liquid crystal layer 6 is sandwiched between the display pixel electrode 4 and the counter electrode 5.

次に、この液晶表示素子の駆動方法について説明する。Next, a method of driving this liquid crystal display element will be explained.

即ち、TFT3のゲートに走査線選択電圧(Vlj、O
n)が印加されている期間(スイッチング期間)に、表
示画素電極4の電位が映像信号電位と同電位に設定され
、TFT3のゲートに走査線非選択電圧(Vq、off
 )が印加されている期間は、表示画素電極4がこの電
位を保持する。この結果、表示画素電極4と、所定の電
位に設定されている対向電極5との間に挟持されている
液晶層6に、映像信号電圧に応じた電位差がかかる。そ
して、この電位差に応じて液晶層6の配列状態が変化す
ることにより、この部分の光透過率も変化し、画像表示
が行なわれる。また、液晶層6は直流駆動すると、液晶
分子の電気分解により劣化し寿命が短くなるため、交流
駆動を行う。−船釣には、対向電極5の電位を直流電位
に設定し、この対向電極5の電位に対して映像信号電圧
を偶奇フレームで正負対称に設定することによって、交
流駆動が行われる。即ち、映像信号電圧はある直流電圧
(VSC)と、映像信号に対応した正負対称な交流電圧
(VSa)とが加算されたものでおる。
That is, the scanning line selection voltage (Vlj, O
n) is applied (switching period), the potential of the display pixel electrode 4 is set to the same potential as the video signal potential, and a scanning line non-selection voltage (Vq, off) is applied to the gate of the TFT 3.
) is applied, the display pixel electrode 4 holds this potential. As a result, a potential difference corresponding to the video signal voltage is applied to the liquid crystal layer 6 sandwiched between the display pixel electrode 4 and the counter electrode 5 set at a predetermined potential. Then, by changing the arrangement state of the liquid crystal layer 6 in accordance with this potential difference, the light transmittance of this portion also changes, and an image is displayed. Furthermore, if the liquid crystal layer 6 is driven with direct current, it will deteriorate due to electrolysis of liquid crystal molecules and its life will be shortened, so it is driven with alternating current. - For boat fishing, alternating current driving is performed by setting the potential of the counter electrode 5 to a direct current potential, and setting the video signal voltage symmetrically with respect to the potential of the counter electrode 5 in positive and negative frames in even and odd frames. That is, the video signal voltage is the sum of a certain DC voltage (VSC) and an AC voltage (VSa) that is symmetrical in positive and negative directions and corresponds to the video signal.

ところで、第2図に示すように、TPT3のゲト・ソー
ス間には寄生容1(Cgs)が存在する。
By the way, as shown in FIG. 2, a parasitic capacitance 1 (Cgs) exists between the gate and source of the TPT3.

このCqsのため、走査信号電圧がvg、onからvg
Because of this Cqs, the scanning signal voltage changes from vg,on to vg
.

offに切り替わる際に、容量分割により表示画素電極
4のΔ■pだけ負側にシフトする。このシフト量は、△
vp〜ΔV(If *CfjS/ (CC1s十〇Ic
)という関係にある。ここで、Δvg=vg、onyg
、orrであり、C1cは液晶層6の容量を表している
。そこで、このへ■p分だけ対向電極5の電位を負側に
シフトさせることにより、液晶層6に印加される電圧が
偶奇フレームで等しくなるようにする。
When switched off, the display pixel electrode 4 is shifted to the negative side by Δ■p due to capacitance division. This shift amount is △
vp~ΔV(If *CfjS/ (CC1s〇Ic
). Here, Δvg=vg, onyg
, orr, and C1c represents the capacitance of the liquid crystal layer 6. Therefore, by shifting the potential of the counter electrode 5 to the negative side by this amount (p), the voltage applied to the liquid crystal layer 6 is made equal in even and odd frames.

(発明が解決しようとする課題) しかしながら、CICは印加される電圧に対して容量変
化を示すため、映像信号ごとに△Vpの値が異なる。即
ち、映像信号ごとに最適な対向電極電位が異なる。一般
に、対向電極電位は全画素に対して同時に同電位に設定
されるため、種々の映像信号電圧が与えられる表示画面
内では、全画素に対して同時に最適な対向電極電位に設
定することができない。この結果、表示画面のちらつき
であるフリッカ−が生じる。
(Problem to be Solved by the Invention) However, since the CIC exhibits a capacitance change with respect to the applied voltage, the value of ΔVp differs for each video signal. That is, the optimal counter electrode potential differs for each video signal. Generally, the counter electrode potential is set to the same potential for all pixels at the same time, so in a display screen where various video signal voltages are applied, it is not possible to set the optimal counter electrode potential for all pixels at the same time. . As a result, flicker occurs, which is flickering on the display screen.

第3図は例えば特開昭56−162793号公報に記載
されていて、上述の不具合を解決することが可能な液晶
表示素子の一画素を表す簡単な回路図である。同図にお
いて、第3図と対応する部分には同一の符号を付してあ
り、印加電圧に対する容量変化のない蓄積容量(C3)
をCICと並列に新たに挿入することにより、△Vpの
映像信号電圧依存性を低減させることができる。この結
果、第2図に示した例の場合と比べ、フリッカ−を減少
させることができる。
FIG. 3 is a simple circuit diagram showing one pixel of a liquid crystal display element, which is described in, for example, Japanese Unexamined Patent Publication No. 56-162793 and is capable of solving the above-mentioned problems. In the figure, parts corresponding to those in Figure 3 are given the same reference numerals, and the storage capacitor (C3) does not change in capacitance with respect to the applied voltage.
By newly inserting ΔVp in parallel with the CIC, the dependence of ΔVp on the video signal voltage can be reduced. As a result, flicker can be reduced compared to the example shown in FIG.

第4図は第3図に示した液晶表示素子について、表示画
素電極アレイ基板における一画素の平面構造を説明する
ための平面図である。同図に示すように、TFTloは
、走査線11と一体のゲート電極12、信号線13と一
体のドレイン電極14、表示画素電極15に接続された
ソース電極16、及び半導体層17から構成されている
。また、走査線11と概略平行な方向には、補助容量形
成用配線18が表示画素電極15と部分的に絶縁膜(図
示せず)を介して対向するように形成されており、表示
画素電極15と補助容量形成用配線18との重なり部分
で付加的な蓄積容量(C3)が得られる。
FIG. 4 is a plan view for explaining the planar structure of one pixel on the display pixel electrode array substrate of the liquid crystal display element shown in FIG. 3. FIG. As shown in the figure, TFTlo is composed of a gate electrode 12 integrated with a scanning line 11, a drain electrode 14 integrated with a signal line 13, a source electrode 16 connected to a display pixel electrode 15, and a semiconductor layer 17. There is. Further, in a direction approximately parallel to the scanning line 11, an auxiliary capacitance forming wiring 18 is formed so as to partially face the display pixel electrode 15 with an insulating film (not shown) interposed therebetween. An additional storage capacitor (C3) is obtained at the overlapped portion between the storage capacitor 15 and the auxiliary capacitor forming wiring 18.

第4図において、補助容量形成用配線18は透明導電膜
或いは遮光性の金属膜で形成される。補助容量形成用配
線18を透明導電膜で形成する場合は、成膜工程やフォ
トリソグラフィー工程が増加し、製造プロセス而での欠
点が多い。一方、補助容量形成用配線18を遮光性の金
属膜で形成する場合は、光が透過する部分の面積である
開口面積が低下し、液晶表示素子の光透過率の低下に直
結する。
In FIG. 4, the auxiliary capacitance forming wiring 18 is formed of a transparent conductive film or a light-shielding metal film. When the auxiliary capacitance forming wiring 18 is formed of a transparent conductive film, the number of film forming steps and photolithography steps is increased, and there are many drawbacks in the manufacturing process. On the other hand, when the auxiliary capacitance forming wiring 18 is formed of a light-shielding metal film, the opening area, which is the area of the portion through which light passes, decreases, which directly leads to a decrease in the light transmittance of the liquid crystal display element.

この発明は、このような事情に鑑みてなされたものであ
る。
This invention was made in view of such circumstances.

[発明の構成] (課題を解決するための手段) この発明は、絶縁基板の一主面上にTPT及びこれに接
続される画素電極からなる一画素をマトリクス状に配し
且つ各画素に対し画素電極と絶縁膜を介して対向する遮
光性材料からなる容量形成用電極が設けられてなるアレ
イ基板と、絶縁基板の一主面上に共通電極及び遮光層を
形成してなる対向基板と、アレイ基板と対向基板を互い
の一生面側が対向するように組み合わせて得られる間隙
に挟持してなる液晶とを備えたアクティブマトリクス型
液晶表示素子についてのものである。そして、一画素に
ついての対向基板の一主面上への投影図で、遮光層のパ
ターンにより規定される開口部の輪郭線が、容量形成用
電極のパターン内に収まるようなアレイ構成としている
[Structure of the Invention] (Means for Solving the Problems) This invention arranges one pixel consisting of a TPT and a pixel electrode connected thereto in a matrix on one main surface of an insulating substrate, and an array substrate provided with a capacitor-forming electrode made of a light-shielding material that faces a pixel electrode with an insulating film interposed therebetween; a counter substrate formed with a common electrode and a light-shielding layer formed on one principal surface of the insulating substrate; This invention relates to an active matrix type liquid crystal display element including a liquid crystal sandwiched between an array substrate and a counter substrate, which are sandwiched between a gap obtained by combining an array substrate and a counter substrate such that their surfaces face each other. In a projection view of one pixel onto one main surface of the opposing substrate, the array configuration is such that the outline of the opening defined by the pattern of the light shielding layer falls within the pattern of the capacitor forming electrode.

(作 用) TPTを用いたアクティブマトリクス型液晶表示素子に
おいて、容量形成用電極を形成しない場合、或いは第4
図に示した例の場合には、アレイ塞板と対向基板との貼
り合わせが精度範囲内でずれた場合にも、コントラスト
比の低下を防ぐために、対向基板上の遮光層パターンは
、表示画素電極パターン以外の部分、即ち、液晶層によ
り変調されない光が透過する部分を覆うように形成され
る。具体的には、対向基板上の遮光層パターンが表示画
素電極パターンの周辺部分に貼り合わせ精度分だけ重な
り合うように形成される。従って、表示画素電極パター
ンの外周部に、表示に寄与しない無効領域が存在する。
(Function) In an active matrix liquid crystal display element using TPT, when no capacitance forming electrode is formed, or when the fourth
In the case of the example shown in the figure, the light shielding layer pattern on the counter substrate is designed to prevent the contrast ratio from decreasing even if the bonding between the array cover plate and the counter substrate deviates within the precision range. It is formed to cover a portion other than the electrode pattern, that is, a portion through which light not modulated by the liquid crystal layer passes. Specifically, the light shielding layer pattern on the counter substrate is formed so as to overlap the peripheral portion of the display pixel electrode pattern by the amount of bonding accuracy. Therefore, an invalid area that does not contribute to display exists at the outer periphery of the display pixel electrode pattern.

この発明では、この無効領域を付加的な蓄積容量(Cs
 )の形成のために利用している。
In this invention, this invalid area is used as an additional storage capacity (Cs
) is used for the formation of

(実施例) 以下、図面を参照してこの発明の詳細な説明する。(Example) Hereinafter, the present invention will be described in detail with reference to the drawings.

第1図はこの発明の一実施例を示す図であり、同図(a
>はアレイ基板上の一画素部分の平面図、同図(b)は
一画素部分の概略断面図、同図(C)は一画素部分での
概略投影図を表している。第1図(a)において、薄膜
トランジスタ(TPT)20は、第4図の場合と同様に
、走査線21と一体のゲート電極22、信号線23と一
体のドレイン電4fA24、表示画素電極25に接続さ
れたソース電極26、及び半導体層27から構成されて
いる。また、TPT20近辺には、走査線21と概略平
行な方向に直線状に延び且つ表示画素電極25の周囲を
絶縁膜(図示せず)を介して取り囲むように、容量形成
用電極28が形成されており、表示画素電極25と容量
形成用電極28との重なり部分で付加的な蓄積容!(C
s)が得られる。
FIG. 1 is a diagram showing an embodiment of the present invention, and FIG.
> represents a plan view of one pixel portion on the array substrate, FIG. In FIG. 1(a), a thin film transistor (TPT) 20 is connected to a gate electrode 22 integrated with a scanning line 21, a drain electrode 4fA 24 integrated with a signal line 23, and a display pixel electrode 25, as in the case of FIG. The semiconductor layer 27 includes a source electrode 26 and a semiconductor layer 27. Further, a capacitor forming electrode 28 is formed near the TPT 20 so as to extend linearly in a direction substantially parallel to the scanning line 21 and surround the display pixel electrode 25 with an insulating film (not shown) interposed therebetween. An additional storage capacity is formed at the overlapped portion of the display pixel electrode 25 and the capacitance forming electrode 28! (C
s) is obtained.

第1図(b)は第1図(a)におけるA−A −断面を
矢印方向からみたときに相当する。第1図(b)におい
て、例えばガラスからなる絶縁基板30の一主面上には
、例えば遮光性材料であるCr(クロム)膜をスパッタ
法で被膜した後、所定の形状にフォトエツチングするこ
とによりゲート電極22と容量形成用電極28が同時に
形成され、更に、これを覆うように例えば酸化シリコン
(SiQx)からなるゲート絶縁膜31がプラズマCV
D法により形成されている。ここで、図示はしていない
が、ゲート電極22と容量形成用電極28が形成される
際に、同じ工程で走査線21も形成される。また、ゲー
ト絶縁11131が、第1図(a)における容量形成用
電極28と表示画素電極25との間に介在する絶縁膜で
ある。そして、ゲート絶縁膜31のゲート電極22に対
向する部分には、例えばi型の水素化アモルファスシリ
コン(a−8i : H)からなる半導体層27がプラ
ズマCVD法を利用して形成されており、更に、半導体
層27上には互いに電気的に分離されたn型a−8i:
Hからなるドレイン領域32とソース領域33とが、同
じくプラズマCVD法を利用して設けられている。そし
て、半導体層27のソース領域33側に隣接するゲート
絶縁膜31上には、例えばITO(インジウム・チン・
オキサイド)膜をスパッタ法で被膜した後、所定の形状
にフォトエツチングすることにより表示画素電極25が
設けられている。また、ンース領域33にはソース電極
26の一端が接続され、ソース電極26の他端は表示画
素電極25上に延在して接続されている。更に、トレイ
ン領域32にはドレイン電極24の一端が接続されてい
る。ここで、ドレイン電極24とソース電極26とは、
例えばMO(モリブデン)膜とAI(アルミニウム)膜
とをスパッタ法で順次被膜した1麦、所定の形状にフォ
トエツチングするという同じ工程で形成しており、また
、図示はしていないが、第1図(a)における信号線2
3もドレイン電極24とソ、−ス電極26と同じ工程で
形成している。こうして、所望のアレイ基板34が得ら
れる。一方、例えばガラスからなる絶縁基板35の−1
面上には、例えばITOからなる共通電極36及び例え
ばA1(アルミニウム)からなるブラックマトリクスと
しての遮光層37が順次形成されることにより、対向基
板38が構成されている。そして、アレイ基板34の−
1面上には、更に全面に例えば低温キュア型のポリイミ
ド(PI)からなる配向膜39が形成されており、また
、対向基板38の−1面上にも全面に同じく、例えば低
温キュア型のポリイミドからなる配向膜40が形成され
ている。
FIG. 1(b) corresponds to the AA section in FIG. 1(a) when viewed from the direction of the arrow. In FIG. 1(b), on one main surface of an insulating substrate 30 made of glass, for example, a Cr (chromium) film, which is a light-shielding material, is coated by sputtering, and then photo-etched into a predetermined shape. The gate electrode 22 and the capacitor forming electrode 28 are simultaneously formed by this process, and furthermore, a gate insulating film 31 made of silicon oxide (SiQx), for example, is formed by plasma CVD to cover this.
It is formed by the D method. Although not shown, when the gate electrode 22 and the capacitor forming electrode 28 are formed, the scanning line 21 is also formed in the same process. Further, the gate insulator 11131 is an insulating film interposed between the capacitor forming electrode 28 and the display pixel electrode 25 in FIG. 1(a). In a portion of the gate insulating film 31 facing the gate electrode 22, a semiconductor layer 27 made of, for example, i-type hydrogenated amorphous silicon (a-8i:H) is formed using a plasma CVD method. Further, on the semiconductor layer 27 are n-type a-8i layers electrically isolated from each other:
A drain region 32 and a source region 33 made of H are also provided using the plasma CVD method. Then, on the gate insulating film 31 adjacent to the source region 33 side of the semiconductor layer 27, for example, ITO (indium tin) is deposited.
A display pixel electrode 25 is provided by coating an oxide film by sputtering and then photo-etching it into a predetermined shape. Furthermore, one end of the source electrode 26 is connected to the source region 33, and the other end of the source electrode 26 extends over and is connected to the display pixel electrode 25. Furthermore, one end of the drain electrode 24 is connected to the train region 32 . Here, the drain electrode 24 and the source electrode 26 are
For example, an MO (molybdenum) film and an AI (aluminum) film are sequentially coated by a sputtering method, and are formed by the same process of photo-etching into a predetermined shape. Signal line 2 in figure (a)
3 is also formed in the same process as the drain electrode 24 and the source and source electrodes 26. In this way, the desired array substrate 34 is obtained. On the other hand, -1 of the insulating substrate 35 made of glass, for example.
A common electrode 36 made of, for example, ITO and a light shielding layer 37 as a black matrix made of, for example, A1 (aluminum) are sequentially formed on the surface, thereby forming a counter substrate 38 . Then, - of the array substrate 34
An alignment film 39 made of, for example, low-temperature cure type polyimide (PI) is further formed on the entire surface of the first surface, and an alignment film 39 made of, for example, low-temperature cure type polyimide (PI) is also formed on the entire surface of the opposite substrate 38. An alignment film 40 made of polyimide is formed.

そして、アレイ基板34と対向基板38の−1面上に、
各々の配向膜39,40を所定の方向に布等でこするこ
とにより、ラビングによる配向処理がそれぞれ施される
ようになる。更に、アレイ基板34と対向基板38とは
互いの一主面側が対向し且つ互いの配向軸が概略90’
をなすように組み合わせられ、これにより得られる間隙
には液晶41が挟持されている。そして、アレイ基板3
4と対向基板38の他主面側には、それぞれ偏光板42
.43が被着されており、アレイ基板34と対向基板3
8のどちらか一方の他主面側から照明を行う形になって
いる。
Then, on the −1 plane of the array substrate 34 and the counter substrate 38,
By rubbing each of the alignment films 39 and 40 in a predetermined direction with a cloth or the like, alignment treatment by rubbing is performed, respectively. Furthermore, the array substrate 34 and the counter substrate 38 have one main surface facing each other, and their orientation axes are approximately 90'.
The liquid crystal 41 is sandwiched in the gap thus obtained. And array board 3
4 and the other main surface side of the counter substrate 38, there are polarizing plates 42, respectively.
.. 43 is adhered to the array substrate 34 and the counter substrate 3.
8, illumination is performed from the other main surface side.

第1図(C)は第1図(a)に相当する部分についての
対向基板38の−1面上への概略投影図を表している。
FIG. 1(C) shows a schematic projection of a portion corresponding to FIG. 1(a) onto the -1 plane of the opposing substrate 38.

第1図(C)において、遮光層37は第1図(a)にお
ける表示画素電極25に対応した所定の開口部を有して
おり、表示画素電極25を除く部分は完全に覆っている
。また、遮光層37のパターンにより規定される開口部
の輪郭線44が、容量形成用電極28のパターン内に収
まるようになっている。更に、第1図(C)において、
幅L1は容量形成用N極28の外周と輪郭線44との間
隔を示しているのに対し、幅L2は容量形成用電極28
の内周と輪郭線44との間隔を示している。この幅L1
.L2はともに、アレイ基板34と対向基板38の貼り
合わせ精度以上の寸法に設定することが望ましい。この
理由は、幅L1の場合はアレイ基板34と対向基板38
の合わせずれによるコンラスト比の低下を防ぐためであ
り、幅L2の場合はアレイ基板34と対向基板38の合
わせずれによる開口面積の変動をなくすか或いは少なく
するためである。
In FIG. 1(C), the light shielding layer 37 has a predetermined opening corresponding to the display pixel electrode 25 in FIG. 1(a), and completely covers the portion other than the display pixel electrode 25. Further, the outline 44 of the opening defined by the pattern of the light shielding layer 37 is arranged to fit within the pattern of the capacitor forming electrode 28. Furthermore, in FIG. 1(C),
The width L1 indicates the distance between the outer periphery of the capacitance forming N pole 28 and the contour line 44, while the width L2 indicates the distance between the capacitance forming N electrode 28 and the contour line 44.
The distance between the inner periphery of the contour line 44 and the contour line 44 is shown. This width L1
.. It is desirable that both L2 be set to a dimension that is greater than the bonding accuracy of the array substrate 34 and the counter substrate 38. The reason for this is that when the width is L1, the array substrate 34 and the counter substrate 38
This is to prevent a decrease in contrast ratio due to misalignment between the array substrate 34 and the counter substrate 38, and in the case of the width L2, to eliminate or reduce variations in the opening area due to misalignment between the array substrate 34 and the counter substrate 38.

この実施例では、遮光層37のパターンにより規定され
る開口部の輪郭線44が、容量形成用電極28のパター
ン内に収まるように、容量形成用電極28と遮光層37
の形状を工夫することにより、表示画素電極25のパタ
ーンの表示に寄与しない無効領域を付加容ff1(C3
)形成することかできる。この結果、容量形成用電極2
8の材料として、フォトリソグラフィー工程が増加して
しまう透明導電膜ではなく、金属膜を選定したときにも
、開口面積を大きくとることができる。従って、この実
施例は、従来に比べ、表示が明るくてちらつきの少ない
画質が得られる。
In this embodiment, the capacitor-forming electrode 28 and the light-shielding layer 37 are arranged so that the outline 44 of the opening defined by the pattern of the light-shielding layer 37 falls within the pattern of the capacitor-forming electrode 28.
By devising the shape of the display pixel electrode 25, an additional capacity ff1 (C3
) can be formed. As a result, the capacitance forming electrode 2
Even when a metal film is selected as the material of No. 8, instead of a transparent conductive film that requires an additional photolithography process, the opening area can be increased. Therefore, in this embodiment, the display is brighter and the image quality with less flicker can be obtained compared to the conventional display.

なお、この実施例では、容量形成用電極28は走査線2
1ヤゲート電極22と同時に形成したが、表示画素電極
25と絶縁膜を介して対向する形であれば、信号線23
等と同時に形成されるものであってもよいことは言うま
でもない。
Note that in this embodiment, the capacitance forming electrode 28 is connected to the scanning line 2.
Although the signal line 23 is formed at the same time as the 1-Y gate electrode 22, if it faces the display pixel electrode 25 with an insulating film interposed therebetween, the signal line 23
It goes without saying that they may be formed at the same time.

[発明の効果] この発明は、アレイ基板上に形成された遮光性材料から
なる容量形成用電極のパターンで開口領域を規定させる
ことにより、金属膜で付加的な蓄積容ff1(Cs)を
形成したときにも、光透過率の低下を最小限に抑えられ
、表示が明るくちらつきの少ない画質を得ることができ
る。
[Effects of the Invention] This invention forms an additional storage capacitor ff1 (Cs) with a metal film by defining an opening area with a pattern of a capacitance forming electrode made of a light-shielding material formed on an array substrate. Even when this happens, the decrease in light transmittance can be kept to a minimum, and a bright display with less flickering can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例を示す図、第2図と第3図
は従来のアクティブマトリクス型液晶表示素子の一画素
の一例を示す概略回路図、第4図は従来のアクティブマ
トリクス型液晶表示素子のアレイ基板における一画素の
平面構造を説明するための図である。 20・・・薄膜トランジスタ 25・・・表示画素電極 28・・・容量形成用電極 30.35・・・絶縁基板 34・・・アレイ基板 36・・・共通電極 37・・・遮光層 38・・・対向基板 41・・・液晶 44・・・輪郭線 代理人 弁理士 則 近 憲 佑 同    竹 花 喜久男 第1図 (a) 第1図
FIG. 1 is a diagram showing an embodiment of the present invention, FIGS. 2 and 3 are schematic circuit diagrams showing an example of one pixel of a conventional active matrix type liquid crystal display element, and FIG. 4 is a diagram showing an example of a conventional active matrix type liquid crystal display element. FIG. 2 is a diagram for explaining a planar structure of one pixel on an array substrate of a liquid crystal display element. 20... Thin film transistor 25... Display pixel electrode 28... Capacitor formation electrode 30.35... Insulating substrate 34... Array substrate 36... Common electrode 37... Light shielding layer 38... Opposing substrate 41...Liquid crystal 44...Contour line Agent Patent attorney Nori Chika Ken Yudo Kikuo Takehana Figure 1 (a) Figure 1

Claims (1)

【特許請求の範囲】 絶縁基板の一主面上に薄膜トランジスタ及びこれに接続
される表示画素電極からなる一画素をマトリクス状に配
し且つ各画素に対し前記表示画素電極と絶縁膜を介して
対向する遮光性材料からなる容量形成用電極が設けられ
てなるアレイ基板と、絶縁基板の一主面上に共通電極及
び前記表示画素電極に対応した所定の開口部を有する遮
光層を形成してなる対向基板と、前記アレイ基板と前記
対向基板を互いの前記一主面側が対向するように組み合
わせて得られる間隙に挟持してなる液晶とを備えたアク
ティブマトリクス型液晶表示素子において、 前記一画素についての前記対向基板の前記一主面上への
投影図で、前記遮光層のパターンにより規定される前記
開口部の輪郭線が、前記容量形成用電極のパターン内に
収まることを特徴とするアクティブマトリクス型液晶表
示素子。
[Claims] One pixel consisting of a thin film transistor and a display pixel electrode connected thereto is arranged in a matrix on one main surface of an insulating substrate, and each pixel is opposed to the display pixel electrode with an insulating film interposed therebetween. an array substrate provided with a capacitor-forming electrode made of a light-shielding material; and a light-shielding layer having a common electrode and a predetermined opening corresponding to the display pixel electrode formed on one main surface of the insulating substrate. In an active matrix liquid crystal display element comprising a counter substrate and a liquid crystal sandwiched between a gap obtained by combining the array substrate and the counter substrate so that the one principal surface sides thereof face each other, the one pixel includes: is a projection view onto the one main surface of the counter substrate, wherein the outline of the opening defined by the pattern of the light-shielding layer falls within the pattern of the capacitance forming electrode. type liquid crystal display element.
JP21369288A 1988-08-30 1988-08-30 Active matrix type liquid crystal display device Expired - Lifetime JP2693513B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21369288A JP2693513B2 (en) 1988-08-30 1988-08-30 Active matrix type liquid crystal display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21369288A JP2693513B2 (en) 1988-08-30 1988-08-30 Active matrix type liquid crystal display device

Publications (2)

Publication Number Publication Date
JPH0263020A true JPH0263020A (en) 1990-03-02
JP2693513B2 JP2693513B2 (en) 1997-12-24

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JPH0490513A (en) * 1990-08-03 1992-03-24 Casio Comput Co Ltd Liquid crystal display element
JPH05150262A (en) * 1991-11-28 1993-06-18 Sanyo Electric Co Ltd Liquid crystal display device
JPH05203981A (en) * 1991-09-05 1993-08-13 Samsung Electron Co Ltd Liquid crystal display device and manufacturing method thereof
JPH05224236A (en) * 1992-02-07 1993-09-03 Sharp Corp Active matrix liquid crystal display device
JPH0635001A (en) * 1992-07-16 1994-02-10 Alps Electric Co Ltd Active matrix liquid crystal display device
JPH06194687A (en) * 1992-10-30 1994-07-15 Nec Corp Transmission type active matrix liquid crystal element
JPH0792495A (en) * 1993-09-24 1995-04-07 Casio Comput Co Ltd Active matrix liquid crystal display
US5459596A (en) * 1992-09-14 1995-10-17 Kabushiki Kaisha Toshiba Active matrix liquid crystal display with supplemental capacitor line which overlaps signal line
US5686977A (en) * 1992-06-01 1997-11-11 Samsung Electronics Co., Ltd. Liquid crystal display and a manufacturing method thereof
US6064358A (en) * 1990-08-08 2000-05-16 Hitachi, Ltd. Liquid crystal display device and driving method therefor
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Publication number Priority date Publication date Assignee Title
JPH0490513A (en) * 1990-08-03 1992-03-24 Casio Comput Co Ltd Liquid crystal display element
US6064358A (en) * 1990-08-08 2000-05-16 Hitachi, Ltd. Liquid crystal display device and driving method therefor
US6331845B1 (en) 1990-08-08 2001-12-18 Hitachi, Ltd Liquid crystal display device and driving method therefor
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JPH05203981A (en) * 1991-09-05 1993-08-13 Samsung Electron Co Ltd Liquid crystal display device and manufacturing method thereof
JPH05150262A (en) * 1991-11-28 1993-06-18 Sanyo Electric Co Ltd Liquid crystal display device
JPH05224236A (en) * 1992-02-07 1993-09-03 Sharp Corp Active matrix liquid crystal display device
US5686977A (en) * 1992-06-01 1997-11-11 Samsung Electronics Co., Ltd. Liquid crystal display and a manufacturing method thereof
US5847780A (en) * 1992-06-01 1998-12-08 Samsung Electronics Co., Ltd. Liquid crystal display and a manufacturing method thereof
JPH0635001A (en) * 1992-07-16 1994-02-10 Alps Electric Co Ltd Active matrix liquid crystal display device
US5600461A (en) * 1992-09-14 1997-02-04 Kabushiki Kaisha Toshiba Active matrix liquid crystal display device
US5459596A (en) * 1992-09-14 1995-10-17 Kabushiki Kaisha Toshiba Active matrix liquid crystal display with supplemental capacitor line which overlaps signal line
KR100356604B1 (en) * 1992-09-18 2003-03-10 가부시끼가이샤 히다치 세이사꾸쇼 LCD Display
JPH06194687A (en) * 1992-10-30 1994-07-15 Nec Corp Transmission type active matrix liquid crystal element
JPH0792495A (en) * 1993-09-24 1995-04-07 Casio Comput Co Ltd Active matrix liquid crystal display
KR100355023B1 (en) * 1994-03-17 2002-10-05 가부시끼가이샤 히다치 세이사꾸쇼 Active matrix type liquid crystal display system
KR100360355B1 (en) * 1994-03-17 2003-01-15 가부시끼가이샤 히다치 세이사꾸쇼 Active matrix type liquid crystal display system
KR100447768B1 (en) * 1994-09-30 2005-01-31 산요덴키가부시키가이샤 Liquid crystal display device with charge holding capacity
US7683978B2 (en) 1995-05-08 2010-03-23 Semiconductor Energy Laboratory Co., Ltd. Display device
US7190420B2 (en) 1995-05-08 2007-03-13 Semiconductor Energy Laboratory Co., Ltd. Display device
JP2007193347A (en) * 1997-05-29 2007-08-02 Samsung Electronics Co Ltd Wide viewing angle LCD
US7768615B2 (en) 1997-05-29 2010-08-03 Samsung Electronics Co., Ltd. Liquid crystal display having wide viewing angle
US9041891B2 (en) 1997-05-29 2015-05-26 Samsung Display Co., Ltd. Liquid crystal display having wide viewing angle
US6890616B2 (en) 2001-12-03 2005-05-10 Hitachi Metals Ltd. Ceramic honeycomb filter and its structure
US7297175B2 (en) 2002-03-13 2007-11-20 Ngk Insulators, Ltd. Exhaust gas purifying filter
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