JPH0263203B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to the manufacture of color filters, which are used to recognize light,
One example is the field of separating light into spectra. Specifically, color video cameras, tinted lenses, and CRTs.
These include anti-reflection coatings for displays, LCD televisions, etc.

Structure of conventional examples and their problems Conventionally, the dyeing base used when forming color filters containing two or more color pigments (for example, mosaic-like, striped color filters, etc.) is casein or gelatin and dichromium. Additions of acid salts as crosslinking agents have been used. A method for manufacturing a color filter using a gelatin-dichromate-based photosensitive resin will be described below with reference to FIGS. 1 to 3.

First, a gelatin-dichromate-based photosensitive resin 2 is uniformly applied onto a substrate 1 by spin coating (FIG. 1). This is irradiated with ultraviolet rays through a mask having a predetermined pattern, and developed with water to make the pattern visible. After drying, the remaining resin pattern is dyed using a dye having a predetermined spectrum to obtain a colored pattern 3. An optically transparent intermediate film 4 is formed on top of it to prevent contamination (second
figure). Repeat the above process for 2nd color and 3rd color.
A colored pattern is formed, and finally a protective film 5 is uniformly applied to the entire surface (FIG. 3).

Photosensitive resins made by adding dichromate to casein or gelatin, which have been conventionally used as dyeing bases, contain hexavalent chromium, which poses problems in the disposal of photosensitive solutions and wastewater treatment during development. Furthermore, since the color filter manufactured in the above process has a multilayer structure, the overall thickness of the filter is large, and light diffraction becomes a problem when it is formed on a solid-state image sensor. Furthermore, when trying to form a single-layer filter to prevent diffraction of light, in addition to the above steps, alignment - exposure - development - of each contamination prevention film is required.
A drying step is included, which significantly increases the number of steps, causing not only a decrease in work efficiency but also a decrease in yield.

Purpose of the invention The present invention uses a resin containing an O-naphthoquinone diazide compound as a dyeing base,
To provide a method for manufacturing a color filter that is free from pollution, uses a single layer, and requires a small number of manufacturing steps.

Structure of the Invention The present invention is characterized in that a resin containing an O-naphthoquinonediazide compound is used as a dyeing base. When the O-naphthoquinone diazide compound is irradiated with ultraviolet light, the following rearrangement reaction occurs. By utilizing this photoreaction, The -COOH group produced is dyed using a basic dye, cationic dye, etc. to form a colored part. O-
The resin containing the naphthoquinone diazide compound is required to be optically transparent. Examples include polymethyl methacrylate, polybutyl methacrylate, polypropyl methacrylate, polymethyl acrylate, polybutyl acrylate, polypropyl acrylate, polyglycidyl methacrylate, etc.

Further, a resin having an O-naphthoquinone diazide compound as a functional group in its molecule can also be used as the dyeing base used in the present invention.

Description of Examples Examples of the color filter manufacturing method using the present invention will be described below with reference to FIGS. 4 to 9.

First, a resin 6 containing an O-naphthoquinone diazide compound is uniformly applied onto a transparent substrate 1 by a spin coating method. Ultraviolet rays are irradiated through a mask having a predetermined pattern to form a pattern 6A of the first color (FIG. 4). This is dyed under the following conditions to obtain colored pattern 7.

Dyeing conditions Sumiacryl Red N-G 5g/Acetic acid 0.5cc/Dyeing temperature/time 80℃, 5 minutes After dyeing, remove excess dye by washing with water and dry.

Next, a transparent film pattern 8 is formed on the colored pattern 7 to prevent mixed dyeing. First, a transparent film is uniformly applied by spin coating, exposed through a mask having a predetermined pattern, and developed to reveal the film pattern 8A (FIG. 5).

Furthermore, in order to form a second colored pattern, the resin 6 is similarly exposed to light through a mask having a predetermined pattern, and dyed under the following conditions to obtain a colored pattern 9 (FIG. 6).

Dyeing conditions Kayacrylic Brilliant Yellow 5GL
-ED 5g / Kayacrylic Blue GSL-ED 10g / Anhydrous Glauber's Salt 1g / Dyeing temperature and time 80℃, 10 minutes After washing and drying, apply a transparent resin, expose and develop in the same way, and dye the second color. A mixed dyeing prevention film pattern 8B is formed on the colored pattern (FIG. 7).

Similarly, the resin 6 was exposed through a mask with a predetermined pattern, dyed under the following conditions, and washed with water.Dyeing conditions: Sumiacryl Blue N-GRL 10g / Acetic acid 1g / Dyeing temperature and time: 80°C , 5 minutes to form a third colored pattern 10.

Finally, a protective film 5 is formed over the entire filter.
In this way, a color filter stacked solid-state imaging device is produced.

Effects of the Invention The method for producing a color filter using a resin containing an O-naphthoquinone diazide compound of the present invention includes the following steps:
Compared to conventional manufacturing methods using photosensitive resins in which dichromate is added to casein or gelatin, there is no concern about pollution, and thin-film single-layer filters can be manufactured more easily. As a result, effects such as improved workability, shortened working time, and improved yield can be obtained.

[Brief explanation of the drawing]

Figures 1 to 3 are diagrams showing a conventional color filter manufacturing method using a gelatin-dichromate-based photosensitive resin, and Figures 4 to 9 are diagrams showing a method for manufacturing a color filter using a resin containing an O-naphthoquinone diazide compound. FIG. 2 is a diagram showing an embodiment of the present invention. 6... Resin containing an O-naphthoquinone diazide compound, 7... Coloring pattern of the first color, 8... Coloring pattern of the second color, 9... Coloring pattern of the third color.

Claims (1)

[Claims] 1 A step of applying a resin containing an O-naphthoquinone diazide compound onto a substrate, a step of forming an exposed area on the coating film through a mask having a predetermined pattern, and a step of forming the exposed area using a dye having a predetermined spectrum. A method for producing a color filter, which comprises a step of dyeing, a step of applying an optically transparent resin, a step of exposing the coating film to light through a mask having a predetermined pattern, and a step of making the pattern visible through development.