JPH0264002A - Ink for forming superconducting thin films - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Use The present invention relates to an ink for forming patterned superconducting thin films.

BACKGROUND OF THE INVENTION Conventionally, superconducting materials have been mainly limited to metal materials, but in recent years high-temperature superconducting materials using ceramic materials have been developed and are attracting great expectations.

However, since these materials have inferior mechanical strength, it is better to use them as thin films formed on strong substrates, and sputtering is the preferred method for forming thin films.

Physical methods such as vacuum evaporation and chemical methods such as CVN and thermal decomposition methods are known.

Problems to be Solved by the Invention However, thin films formed by physical methods only cover the entire surface of the substrate.
If you want to create a specific pattern, you have no choice but to apply resist and then etch it. moreover,
Physical methods such as Nupatta and vacuum deposition, CVN, etc. have high equipment costs and are difficult to manufacture over a large area. On the other hand, while the thin film forming method using the thermal decomposition method has low equipment cost and is easy to manufacture on a large area, the solution of the metal-containing compound used in the method has a low solution viscosity, and it is difficult to print in a shibata pattern. is not possible. In other words, various resins such as cellulose resins and acrylic resins, which are known as general thickening materials, are often incompatible with the above compounds, so they are not suitable for thickening solutions of mixed metal compounds. could not be used. Furthermore, even when there is mutuality, it is difficult to obtain a uniform coating film due to the difference in thermal decomposition behavior between the thickener and the above-mentioned compound, making it extremely difficult to select this type of thickener.

Means for Solving the Problems The present invention provides a thermally decomposable compound containing superconducting constituent elements in its structure, V! ! The present invention is characterized in that a patterned superconducting thin film is formed using a superconducting ink containing I, rosin or abietic acid, and a solvent as main constituents. In addition, in order to improve printability, a V belling agent, an antifoaming agent, etc. may be included in addition to the above-mentioned main components.

Function By forming a patterned superconducting thin film using the ink for forming a superconducting thin film according to the present invention, it becomes possible to form a homogeneous patterned superconducting thin film by performing an etching operation.

Example An overview of the present invention will be described below.

The thermally decomposable compounds containing electrically conductive structural elements in their structure include inorganic compounds or organic compounds containing gold and other elements such as lithium, strontium, ytterbium, terbium, barium, lead, and copper. Examples include compounds. Examples include chlorides of these metal elements, inorganic metal salts such as nitrochloride, various carboxylates, organometallic compounds, and various organometallic structures such as beta diketones such as metallocene acetylacetone and crown ethers.

These compounds are thermally decomposed at a temperature of 200 to 200°C to produce oxides or carbonates of the constituent elements, and the carbonates also become oxides when heated at higher temperatures.

A compound having an arbitrary composition can be produced by mixing and thermally decomposing the composition ratios of these compounds in accordance with the composition of the target product.

Rosin or abietin is suitable as the thickener for the above-mentioned gold-magnetic compound solution. Rosin is the main component of pine tar and is available as a natural product. These have good compatibility with the above metal compounds, and exhibit a viscosity suitable for pattern printing when dissolved in a solvent. However, when attempting to create a particularly fine pattern, abietin, which is the main component of rosin, is preferable to natural rosin. In other words, rosin has different properties depending on its raw material.

As a result, the liquid properties of the rosin change minutely.

For this reason, when attempting to manufacture fine patterns with good reproducibility, it is preferable to use d-abietic acid.

The solvent for dissolving the above compound and rosin or abietic acid is alcohol-based or ketone-based.

Nute/Shi type 1 You can choose from various petroleum-based and hydrocarbon-based solvents. If the metal element is different, the solubility of the compound changes even if the anion or organic moiety is the same, so sufficient preliminary consideration is required before actual use.

A specific example will be described below.

Example 1 Yttrium 2-ethylhexanoate Barium 2-ethylhexanoate and copper 2-ethylhexanoate in a molar ratio of 1
80 parts by weight of Chinese rosin was added to 20 parts by weight of the above mixture and dissolved in 100 parts by weight of an alcoholic solvent to produce an ink. Mark a pattern of concentric coils on the zirconia substrate with this ink.
iiiIJ l,, After drying at 150'C, it was fired at 900°C. After repeating this operation 5 times, the substrate was annealed at 800"C in an oxygen atmosphere to give a conductor thickness of approximately 1.2
Manufactured micron superconducting coils.

This coil exhibited a fully superconducting state at 72''.

Example 2 Ytterbium nitrate, barium nitrate, and copper nitrate were mixed in a molar ratio of 1:2:3, respectively, and the above mixture 20
To the parts by weight, add 80 parts by weight of Chinese rosin to 100 parts by weight.
An ink was prepared by dissolving it in parts by weight of an alcoholic solvent.

Thereafter, a superconducting coil having a conductor thickness of approximately 1.2 microns was manufactured in the same manner as in Example 1.

This coil exhibited a fully superconducting state at 80'.

Example 3 In Example 1, abietic acid was used instead of rosin. When using this ink, the line spacing is 100 microns.
It was possible to print line widths. The properties of the produced film were similar to those of Example 1.

Effects of the Invention As is clear from the above explanation, by using the ink for forming a superconducting thin film according to the present invention, a patterned superconducting thin film can be formed on a substrate, which has great industrial effects.

Claims (2)

[Claims] (1) An ink for forming a superconducting thin film characterized by containing a thermally decomposable compound containing a superconducting substance constituent element in its structure, a rosin, and a solvent as main constituents. (2) An ink for forming a superconducting thin film, characterized in that it contains a thermally decomposable compound containing superconducting material constituent elements in its structure, abietic acid, and a solvent as main constituents.