JPH0264938A - Optical memory body - Google Patents

Optical memory body

Info

Publication number
JPH0264938A
JPH0264938A JP63216779A JP21677988A JPH0264938A JP H0264938 A JPH0264938 A JP H0264938A JP 63216779 A JP63216779 A JP 63216779A JP 21677988 A JP21677988 A JP 21677988A JP H0264938 A JPH0264938 A JP H0264938A
Authority
JP
Japan
Prior art keywords
film
reflecting film
transparent substrate
corrosion resistance
reflective film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63216779A
Other languages
Japanese (ja)
Inventor
Hirotaka Yamaguchi
弘高 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP63216779A priority Critical patent/JPH0264938A/en
Publication of JPH0264938A publication Critical patent/JPH0264938A/en
Pending legal-status Critical Current

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  • Optical Record Carriers And Manufacture Thereof (AREA)

Abstract

PURPOSE:To improve the corrosion resistance of a reflecting film which is applied on a transparent substrate and consists of zirconium oxide by providing the above-mentioned reflecting film and a protective film applied on this reflecting film to the memory body. CONSTITUTION:The reflecting film 2 is formed to 50 to 500nm thickness by a high-frequency magnetron sputtering method, ion plating method, cluster ion beam method, plasma CVD method, etc., of the zirconium nitride on the transparent substrate 1 consisting of, for example, tempered glass, quartz glass, polycarbonate resin, etc. The resin film is then applied on this reflecting film 2 as the protective film 3. The corrosion resistance of the reflecting film 2 is improved in this way.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は音響機器などに用いられる光記憶体に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to an optical storage medium used in audio equipment and the like.

〔従来の技術〕[Conventional technology]

従来、光記憶体の一つであるコンパクトディスク(以下
、CDと記す)の反射膜として、アルミニウムが使用さ
れている。しかし、近年、CDにコンピュータデータを
記録したCD−ROMが普及し、従来にも増して、高温
・高湿下での保存性の高いものが望まれている。
Conventionally, aluminum has been used as a reflective film for compact discs (hereinafter referred to as CDs), which are one type of optical storage medium. However, in recent years, CD-ROMs in which computer data is recorded on CDs have become widespread, and there is a demand for CD-ROMs that can be stored at high temperatures and high humidity more than ever before.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上述した従来の光記憶体は、かかる過酷な環境下におい
て、蒸着された金属反射膜が腐食し、信号読み取りの指
標とされるエラーレートが増加し、上記のニーズに適応
できないという問題があった。
The above-mentioned conventional optical memory had the problem that under such harsh environments, the deposited metal reflective film corroded and the error rate, which is used as an indicator for signal reading, increased, making it unable to meet the above needs. .

本発明は、光記憶体の耐腐食性、特に反射膜の耐腐食性
を強化し、信頼性を向上させた光記憶体を提供すること
にある。
An object of the present invention is to provide an optical storage medium with improved corrosion resistance, particularly the corrosion resistance of a reflective film, and improved reliability.

〔課題を解決するための手段〕[Means to solve the problem]

本発明の光記憶体は、透明基板と、前記透明基板上に被
覆した窒化ジルコニウムからなる反射膜と、前記反射膜
上に被覆した保護膜とを備えて構成される。
The optical memory of the present invention includes a transparent substrate, a reflective film made of zirconium nitride coated on the transparent substrate, and a protective film coated on the reflective film.

〔実施例〕〔Example〕

次に、本発明の実施例について図面を参照して説明する
Next, embodiments of the present invention will be described with reference to the drawings.

第1図は本発明の一実施例を示す光記憶体の部分断面図
である。
FIG. 1 is a partial sectional view of an optical storage medium showing an embodiment of the present invention.

第1図に示すように、強化ガラス、石英ガラス、ポリカ
ーボネート樹脂等からなる透明基板1の上に窒化ジルコ
ニウムを高周波マグネトロンスパッタ法、イオンブレー
ティング法、クラスターイオンビーム法、プラズマCV
D法等により50〜500nmの膜厚で被覆して反射膜
2を形成し、反射膜2の上に保護膜3として樹脂膜を被
覆する。
As shown in FIG. 1, zirconium nitride is deposited on a transparent substrate 1 made of tempered glass, quartz glass, polycarbonate resin, etc. by high-frequency magnetron sputtering, ion blating, cluster ion beam, plasma CV.
A reflective film 2 is formed by coating with a film thickness of 50 to 500 nm using the D method or the like, and a resin film is coated on the reflective film 2 as a protective film 3.

ここで、耐腐食性を試験するために、第1表に示すよう
な透明基板1の上に窒化ジルコニウムからなる反射膜2
と保護膜3を順次被覆して設けた6個の試料を準備した
Here, in order to test the corrosion resistance, a reflective film 2 made of zirconium nitride was placed on a transparent substrate 1 as shown in Table 1.
Six samples were prepared which were sequentially coated with the protective film 3 and the protective film 3.

第1表 ラム膜を使用した従来品について初期のエラーレートを
測定した結果、透明基板1の材質や反射膜2の膜厚の違
いにもかかわらずすべての試料について5×101の値
を得た。
Table 1: As a result of measuring the initial error rate of conventional products using RAM membrane, a value of 5 x 101 was obtained for all samples despite differences in the material of transparent substrate 1 and the film thickness of reflective film 2. .

次に、これら試料I〜■及び従来品に対して温度80℃
、相対湿度90%の雰囲気中の耐腐食性試験を1力月間
実施した後、信号の良否の指標となるエラーレートを測
定した結果を第2表に示す、第2表に示すように、従来
品では測定不能となったのに対して本発明の試料I〜■
では多少の劣化がみられるものの充分実用できるものが
実現できた。
Next, the temperature for these samples I to ■ and the conventional product was 80°C.
After carrying out a corrosion resistance test in an atmosphere of 90% relative humidity for one month, the error rate, which is an indicator of signal quality, was measured and the results are shown in Table 2.As shown in Table 2, conventional Samples of the present invention could not be measured, whereas samples I~■ of the present invention
Although some deterioration was observed, we were able to create something that was sufficiently usable for practical use.

第2表 第1図は本発明の一実施例を示す光記憶体の部分断面図
である。
FIG. 1 of Table 2 is a partial sectional view of an optical storage body showing an embodiment of the present invention.

1・・・透明基板、2・・・反射膜、3・・・保護膜。1... Transparent substrate, 2... Reflective film, 3... Protective film.

Claims (1)

【特許請求の範囲】[Claims] 透明基板と、前記透明基板上に被覆した窒化ジルコニウ
ムからなる反射膜と、前記反射膜上に被覆した保護膜と
を備えたことを特徴とする光記憶体。
An optical memory comprising: a transparent substrate; a reflective film made of zirconium nitride coated on the transparent substrate; and a protective film coated on the reflective film.
JP63216779A 1988-08-30 1988-08-30 Optical memory body Pending JPH0264938A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63216779A JPH0264938A (en) 1988-08-30 1988-08-30 Optical memory body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63216779A JPH0264938A (en) 1988-08-30 1988-08-30 Optical memory body

Publications (1)

Publication Number Publication Date
JPH0264938A true JPH0264938A (en) 1990-03-05

Family

ID=16693758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63216779A Pending JPH0264938A (en) 1988-08-30 1988-08-30 Optical memory body

Country Status (1)

Country Link
JP (1) JPH0264938A (en)

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