JPH0264941A - Polishing device for optical disc master and method for manufacturing optical disc master - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an optical disc master for manufacturing optical discs capable of recording, reproducing, or erasing digital signals such as video discs, digital audio discs, still image two-document files, etc. The present invention relates to a polishing device and a manufacturing method thereof.

Conventional technology In general, optical discs are considered promising as information media due to their extremely high information density, high S/N ratio, and low noise, and have been commercialized as video discs and digital audio discs, which record digital signals. In recent years, research and development has been conducted on optical discs for playback.

Hereinafter, an example of the conventional optical disc master polishing apparatus and its manufacturing method described above will be described with reference to the drawings. FIG. 6 also shows a conventional general optical disc and its manufacturing method.

In FIG. 6, (,) to (i) are cross-sectional views showing each process, where 1 is a glass plate, 2 is a photoresist, 3 is a laser beam, 4 is a digital signal section, 5 is a metal thin film, and 6 is a plating film, 7 is a resin substrate, 8 is a reflective film or recording film, 9
is the retention membrane. The resin substrate 7 is generally mass-produced by a molding method such as injection molding or injection/compression molding, and FIG. 7 shows a cross-sectional view of a mold used for the molding. In Figure 7,
Reference numeral 10 indicates an optical disk master, a stamper 111 is a mold on the cavity side, 12 is a mold on the core side, 13 is a stamper holder, and 14 is a resin injection port. In this molding, the optical disc master, that is, the stamper, is attached to the mirror-finished core-side mold as shown in Figure 7, so the core-side surface of the optical disc master, that is, the side opposite to the signal (back side), is also polished. By doing this, it is necessary to obtain a mirror finish. FIGS. 8 and 9 schematically show the polishing of the back surface of the optical disc master. In FIGS. 8 and 9, 15 is an optical disc master, 18 is a pasting jig section consisting of an adhesive 16 and a pasting substrate 17, 19 is an abrasive discharge section, and 22 is a polishing bat (cross) 20. and a turntable 21. Generally, as shown in FIG. 6, in an optical disk, a digital signal portion 4 is formed by applying a photoresist 2 to a glass substrate 1, recording a digital signal with a laser beam 3, and developing the photoresist 2. Next, a metal film 5 such as nickel (Ni) or silver (Aq) is formed by a method such as vapor deposition, and a plating film 6 is formed by applying nickel plating thereon.

Thereafter, when it is peeled off from the glass substrate 1, an optical disk master called a stamper is formed. Next, the inner and outer peripheries of the optical disc master are processed to fit the molding mold, and the mold surface side, that is, the back surface, is polished, and then the signal is transferred to the resin substrate 7 by molding, and the signal surface side is silver ( Aq) and aluminum (AJ)! An optical disc is completed by forming a reflective film or recording film 8 by a method such as vapor deposition, and then applying a protective film 9 to prevent scratches thereon. Here, in order to polish the back side of the optical disk master shown in step e of FIG. 6,
First, as shown in FIG.
6, the optical disk master 16 is pasted on the pasting substrate 17, and as shown in FIG. Place on top of 2o and turn tape A/2
Polishing is performed by dropping an abrasive such as an oxidized alumite solution from the abrasive discharge part 19 while rotating the rotor. Since the polished optical disc master is attached to a mold, the most important thing during polishing is the thickness of the optical disc master after polishing. The thickness of the optical disk master during polishing is controlled by the polishing time or actual measurement using a micrometer 22 as shown in FIG.

Problems to be Solved by the Invention However, with the above configuration, the polishing speed changes depending on the temperature of the abrasive during polishing and the hardness of the optical disc master, and the thickness of the optical disc master cannot be controlled by time management. It's difficult to do, and it's not very accurate. In addition, in actual measurement using a micrometer, etc., it is necessary to measure with the adhesive pasted on the pasting board, so variations in the thickness of the pasting board are included in the measurement, resulting in poor accuracy and measurement accuracy. You have to stop polishing every time, which takes a lot of time.

In view of the above-mentioned problems, the present invention provides a polishing device for optical disc masters that can be polished with higher precision and with ease, and a method for manufacturing the same.

Means for Solving the Problems In order to solve the above problems, the present invention provides a polishing device for optical disc masters and a method thereof, which improves the depth of the thickness dimension required after polishing in the substrate for pasting of optical disc masters. A recess is provided in the recess, and an optical disc master is stuck to the recess and polished until the height of the optical disc master and the recess are equal.

Function The present invention allows easy polishing with the above-described configuration, and also allows the thickness of the optical disk master to be finished with high precision during polishing.

EXAMPLE Hereinafter, an optical disc master polishing apparatus and a manufacturing method thereof according to an embodiment of the present invention will be described with reference to the drawings.

FIGS. 1 and 2 show a pasting jig for an optical disc master of an optical disc master polishing apparatus according to a first embodiment of the present invention, and a sectional view of the pasted state. FIG. 3 is a sectional view of a polishing device for optical disk masters. In FIGS. 1, 2, and 3, reference numeral 32 denotes a pasting jig section consisting of a pasting substrate 30 for pasting the optical disc master and an adhesive 31 for pasting, and 33 denotes the optical disc master. , 34 is an abrasive discharge part, and 37 is a base part consisting of a polishing bat (cloth) 36 and a turntable 3e for rotation. FIG. 4 is a sectional view showing the state of the thickness of the optical disk master before and after polishing. In FIG. 4, A shows the sectional view before polishing, B shows the sectional view after polishing, 39 indicates the dimension after polishing and removing υ, and 39 indicates the dimension after polishing the optical disk master. A jig for pasting the optical disc master, that is, a pasting board 30
In this case, the material of this substrate is the optical disk master, such as glass or stainless steel, which is harder than nickel, and only the part to which the optical disk master is attached is made up of the required dimensions after the optical disk master is polished, as shown in Figures 1 and 2. Usually, a recess is provided by about 0.3±0,02 fl). An optical disc master 33 is pasted onto the concave portion of the pasting substrate 30 using an adhesive 31 such as paraffin or ultraviolet curable resin, with the surface to be polished facing upward, and as shown in FIG. Place it on the bat (cross) 36,
Polishing is performed by dropping an abrasive such as an oxidized alumite solution from the abrasive discharge part 34 while rotating the turn tape/L'36. The polishing time is continued until the thickness of the optical disk master matches the height of the concavity of the bonding substrate as shown in FIG. Since the affixing substrate 3o is made of a hard material such as glass or stainless steel, the height of the concave of the affixing substrate 30 and the thickness of the optical disc master match as shown in FIG. 4B. Since the affixing substrate 3o comes into contact with the polishing vat 36 and stops polishing the optical disk master, the thickness of the optical disk master will never become thinner and will not be over-polished. Also, the thickness of the adhesive 31 is 6~
Since it is very thin, about 10 microns, the thickness of the adhesive and variations in thickness are not a problem at all.

A second embodiment of the present invention will be described below with reference to the drawings. FIG. 6 shows a cross-sectional view of a pasting jig portion of an optical disk master polishing apparatus in an embodiment of the tube 2 of the present invention. In FIG. 5, the reference numeral 42 indicates a bonding jig section consisting of an adhesive 40 and a bonding substrate 41, and the reference numeral 43 indicates an optical disc master. What differs from Figure 2 here is that a protrusion is provided in the center of the concave to measure the thickness of the optical disc master, the same size as the center hole of the optical disc master, and the same height as the outside of the attachment board. That's true. By providing this convexity, centering can be performed when pasting the optical disc master.
Furthermore, it is possible to eliminate variations in polishing between the inner and outer peripheries during polishing, thereby making it possible to polish more uniformly.

Effects of the Invention As described above, the present invention provides a concavity having the same size as the thickness required after polishing the optical disc master in a substrate for attaching an optical disc master of an optical disc master polishing device, and an optical disc is attached to the concave portion. By attaching and polishing the master disc, the thickness of the optical disc master can be easily and precisely determined, and the thickness can always be maintained at a constant level.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view of a substrate for attaching an optical disk master used in an optical disk master polishing apparatus in an embodiment of the tube 1 of the present invention, and FIG. 2 is a cross-sectional view of an optical disk master pasted on the pasting substrate. , FIG. 3 is a sectional view of a polishing device for optical disk masters, FIG. 4 is a cross-sectional view of the optical disk master before and after polishing, and FIG. 6 is a sectional view of the optical disk master used in the optical disk master polishing device in the embodiment of the tube 2 of the present invention. 6 is a sectional view showing a conventional optical disk and its manufacturing method; FIG. 7 is a sectional view of a molding die; FIG. 8 is a sectional view of a conventional optical disk master affixing substrate; FIG. 9 is a cross-sectional view of a conventional optical disk master polishing apparatus, and FIG. 10 is a cross-sectional view showing thickness measurement of an optical disk master during conventional polishing. 30... Optical disc master, 32... Pasting jig part, 34... Abrasive discharge part, 37
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Claims (2)

[Claims] (1) An optical disk master pasting jig section with a recess for increasing the thickness during polishing of the optical disk master, an abrasive discharge section for supplying abrasive, and a base for polishing the optical disk master. 1. A polishing device for an optical disc master, comprising: a. (2) An optical disc characterized in that an optical disc master is pasted in a recess provided in a jig for pasting the master optical disc, and the thickness of the optical disc during polishing is determined by the size of the step in the recess of the jig for pasting. Master production method.