JPH0265223U - - Google Patents

Info

Publication number
JPH0265223U
JPH0265223U JP14163288U JP14163288U JPH0265223U JP H0265223 U JPH0265223 U JP H0265223U JP 14163288 U JP14163288 U JP 14163288U JP 14163288 U JP14163288 U JP 14163288U JP H0265223 U JPH0265223 U JP H0265223U
Authority
JP
Japan
Prior art keywords
back plate
holder
support member
elastic support
pressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14163288U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14163288U priority Critical patent/JPH0265223U/ja
Publication of JPH0265223U publication Critical patent/JPH0265223U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
第１図ａは本考案の一実施例による基板保持機
構の断面構成図、第１図ｂは本機構を取り付けた
状態を説明するための図、第２図ａは従来機構の
断面構成図、第２図ｂは従来機構の問題点を説明
するための図である。 １……基板、２……背板、３……サブホルダ、
５……板ばね、１０……冷却ジヤケツト、２０…
…クランプ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 基板背面が密着固定される背板と、この背板を
    保持するホルダと、このホルダに前記背板を弾性
    的に支持するための弾性支持部材と、この弾性支
    持部材を介して前記背板が加熱面又は冷却面に接
    触するよう前記ホルダを押圧する押圧機構とを備
    えた基板保持機構。
JP14163288U 1988-10-28 1988-10-28 Pending JPH0265223U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14163288U JPH0265223U (ja) 1988-10-28 1988-10-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14163288U JPH0265223U (ja) 1988-10-28 1988-10-28

Publications (1)

Publication Number Publication Date
JPH0265223U true JPH0265223U (ja) 1990-05-16

Family

ID=31406871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14163288U Pending JPH0265223U (ja) 1988-10-28 1988-10-28

Country Status (1)

Country Link
JP (1) JPH0265223U (ja)

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