JPH0265331U - - Google Patents
Info
- Publication number
- JPH0265331U JPH0265331U JP14489188U JP14489188U JPH0265331U JP H0265331 U JPH0265331 U JP H0265331U JP 14489188 U JP14489188 U JP 14489188U JP 14489188 U JP14489188 U JP 14489188U JP H0265331 U JPH0265331 U JP H0265331U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- disk
- shaped semiconductor
- flat
- orientation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本考案の実施例を示す図である。
図において、１は半導体基板（ウエハー）、２
はオリエンテーシヨンフラツト、Ａ，ＢはＲ部を
示す。
FIG. 1 is a diagram showing an embodiment of the present invention. In the figure, 1 is a semiconductor substrate (wafer), 2
indicates the orientation flat, and A and B indicate the R section.
Claims (1)
に円板状の一部を直線で切り欠いたオリエンテー
シヨンフラツト２を設けた半導体基板１において
、 上記オリエンテーシヨンフラツト２の両端に互
いに曲率半径の異なるＲ部Ａ，Ｂを設けたことを
特徴とする半導体基板の形状構造。[Claims for Utility Model Registration] In a semiconductor substrate 1 provided with an orientation flat 2 formed by cutting out a part of a disk-shaped semiconductor substrate with a straight line in order to define the crystal orientation of the disk-shaped semiconductor substrate, A shape structure of a semiconductor substrate characterized in that R portions A and B having mutually different radii of curvature are provided at both ends of a stationary flat 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14489188U JPH0265331U (en) | 1988-11-08 | 1988-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14489188U JPH0265331U (en) | 1988-11-08 | 1988-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0265331U true JPH0265331U (en) | 1990-05-16 |
Family
ID=31412998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14489188U Pending JPH0265331U (en) | 1988-11-08 | 1988-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0265331U (en) |
-
1988
- 1988-11-08 JP JP14489188U patent/JPH0265331U/ja active Pending